• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.313-316
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• 2004

Chemical mechanical polishing(CMP) process has been widely used to planarize dielectric layers, which can be applied to the integrated circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of in the defect-free inter-level dielectrics(ILD). we investigated the performance of $WO_3$ CMP used silica slurry, ceria slurry, tungsten slurry In this paper, the effects of addition oxidizer on the $WO_3$ CMP characteristics were investigated to obtain the higher removal rate and lower non-uniformity.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.188-191
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• 2003

Chemical mechanical polishing (CMP) process has been widely used to planarize dielectric layers, which can be applied to the integrated circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of in the defect-free inter-level dielectrics (ILD). we investigated the performance of $WO_3$ CMP used silica slurry, ceria slurry, tungsten slurry. In this paper, the effects of addition oxidizer on the $WO_3$ CMP characteristics were investigated to obtain the higher removal rate and lower non-uniformity.

• Particle and aerosol research
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• v.5 no.4
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• pp.189-197
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• 2009

Wet-type particulate removal system is employed in most of ironmaking processes. These de-dusting systems require additional downstream aggregates for treatment of water and for drying of the collected slurry. Thus dried slurry can be pressed in shape of briquettes and recycled in the steelmaking process. Different from the wet-type, the dry-type particulate removal systems generate no slurry. A high-temperature, high-pressure de-dusting system with inertial inlet was developed. The target application of this system was to remove particulate matter generated from the novel ironmaking process and other steelmaking processes. In this study we conducted tests with this newly developed system to evaluate the performance of the silica-carbide (SiC) ceramic filters. In addition, for purpose of comparison, we also conducted tests with a unit which has conventional direct inlet. Fe-Particles collected from the novel ironmaking process were used in our tests as test dusts. The temperature and the pressure were kept constant at their respective values $800^{\circ}C$ and $3kg_f/cm^2$.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.1
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• pp.69-74
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• 2015

Cadmium telluride (CdTe) is being developed for thin film of the X-Ray detector recently. But a rough surface of the CdTe should be improved for resolution and signal speed. This paper shows the study on the improvement of surface roughness and removal rate by applying Chemical Mechanical Polishing. The conventional potassium hydroxide (KOH) based colloidal silica slurry could not realize a mirror surface without physical defects, resulting in low material removal rate and many scratches on surface. In order to enhance chemical reaction such as form oxidized layer on the surface of cadmium telluride, we used hydrogen peroxide ($H_2O_2$) as an oxidizer. Consequently, in case of 3 wt% concentration of hydrogen peroxide, the highest MRR (938 nm/min) and the lowest surface roughness ($R_{p-v}=10.69nm$, $R_a=0.8nm$) could be obtained. EDS was also used to confirm the generated oxide of cadmium telluride surface.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.32 no.1B
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• pp.79-84
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• 2012

Nitrate is a common contaminant in groundwater aquifer. The present study investigates the performance of the bipolar zero valent iron (ZVI, $Fe^0$) packed bed electrolytic cell in removing nitrate in different operating conditions. The packing mixture consists of ZVI as electronically conducting material and silica sand as non-conducting material between main cathode and anode electrodes. In the continuous experiments for the simulated wastewater (contaminated groundwater, initial nitrate about 30 mg/L as N and electrical conductivity about 300 ${\mu}S/cm$), over 99% removal of nitrate was achieved in the applied voltage 600 V and at the flow rate of 20 mL/min. The optimum packing ratio (v/v) and flow rate were determined to be 1:1~2:1 (silica sand to ZVI), 30 mL/ min respectively. Effluent pH was proportional to nitrate influx concentration, and ammonia which is the final product of nitrate reduction was about 60% of nitrate influx. Magnetite was observed on the surface of the used ZVI as major oxidation product.

• Journal of the Korean Society of Food Science and Nutrition
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• v.30 no.4
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• pp.732-738
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• 2001

This study was attempted to isolate and identify the anticancer compounds from Eucommia ulmoides leaves using a human colon cancer cell line HCT-116. The petroleum ether extracts with anticancer activity was chromatographed on silica gel TLC and finally anticancer compounds was purified by HPLC. Their chemical structures were roughly elucidate by UV-VIS absorption spectral data HPLC elution pattern and FAM/MS spectroscopy. From this study these compounds were suspected to be pheophytin a formed by the removal of $Mg^{2+}$ from chlorophyll a and pyropheophytina formed by the removal of acetate group from pheophytin a respectively. To confirm the anticancer effects against HCT-116 cancer cell petroleum ether extract fractions of column chromatography and fractions separated on TLC were tested. All samples tested including the extract of petroleum ether fractions of column chromatograph and three bands (0.13,0.19,0.25) of TLC appeared to inhibit the growth of HCT-116 cancer cell however especially 0.19 and 0.25 fractions separated on TLC plate revealed the strongest effect. These results suggest that chlorophyll derivatives in Eucommia ulmoides may be potential anticancer agents against a human colon cancer cell HCT-116.

• Journal of Korean Society of Water and Wastewater
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• v.9 no.3
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• pp.99-107
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• 1995

Various humic substances are widely distributed in natural water body, such as rivers and lakes and cause the yellowish or brownish color to water. The evidence that humic substances are precursors of THMs formation in chlorinated drinking water has been reported m the Jiteratures. For the reason of public health as well as aesthetics, needs for humic substances removal have been increased in the conventional water treatment processes. In this research, the characteristics of aluminium coagulation of humic acids and humic acids were investigated. The optimum pH and coagulants dosage to remove these materials simultaneously by coagulation were alto studied. The results are as followed; 1. UV-254 absorptiometry for measuring the concentration of aquatic humic acids showed good applicability and stable results. 2. The optimal pH range for humic acids removal by aluminium coagulation was 5 to 5.5, however, an increase in aluminium coagulant dosage could enhance the removal rate of humic acids in the wide pH range. 3. Coprecipitation of humic acids in the typical pH range of 6.5 to 8 in water treatment processes may require the sweep coagulation mechanism with the excess aluminium coagulant dosage. 4. Using PAC(poly aluminium chloride) or PASS(poly aluminium silica sulfate) as coagulants was able to expand the operating range for removing humic acids. 5. From the coagulation of humic substances(UV-254) and turbidity at pH range of 5.5 - 6.0 and alum dose of 86 ppm, the removal efficiency of turbidity from the reservoir water was above 90% and that of UV-254 was above 70%. 6. By using the reservoir water, the optimum condition of rapid mixing for simultaneous removal of turbidity and UV-254 absorbance was pH of 5.8 and LAS dose of 86 ppm, in this study.

• Membrane Journal
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• v.5 no.4
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• pp.137-144
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• 1995

This studies concern the separation of aqueous boric acid solution and same solution containing silica using cellulose acetate RO S/W 4040 module manufactured by Hydranautics Co. The operating conditions of the applied pressures, temperatures, and feed flow rate are also investigated to characterize the permeabilities, biroc acid recovery, and silica rejection, so that the optimum operating conditions would be found out. In the case where the operating conditions are the temperature 35$^{\circ}$C, The pressure 20atm, and the feed flow rate 2.82 l/min, for the boric acid aqueous solution, the boric acid recovery 58.7% and the permeation rate 2.82 l/min were obtained. And also the results showed the boric acid recovery 68.1% and the permeation rate 1.56 l/min at the operating conditions, 35$^{\circ}$C and 10atm. For the boric acid solution containing silica, when the feed solution are at the conditions of 35$^{\circ}$C and 3.2atm, the boric acid recovery 69.7%, the silica rejection 97.5% and the permeation rate 0.47 l/min were obtained. And the operating conditions were at 35$^{\circ}$C, 20atm and the feed flow rate 2.92 l/min, the results showed the boric acid recovery 56.4%, the silica rejection 96.1% and the permeation rate 2.72 l/min.

• Journal of the Mineralogical Society of Korea
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• v.25 no.4
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• pp.271-282
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• 2012

We explore the effect of removal of organic ligand on the atomic configurations around oxygen in hydroxyl groups in amorphous silica gel (synthesized through hydrolysis of $SiCl_4$ in diethyl-ether) using high resolution $^{17}O$ solid state NMR spectroscopy. $^1H$ and $^{29}Si$ MAS NMR spectra for amorphous silica gel showed diverse hydrogen environments including water, hydroxyl groups (e.g., hydrogen bonded silanol, isolated silanol), and organic ligands (e.g., alkyl chain) that may interact with surface hydroxyls in the amorphous silica gel, for instance, forming silica-organic ligand complex (e.g., Si-$O{\cdots}R$). These physically and chemically adsorbed organic ligands were partly removed by ultrasonic cleaning under ethanol and distilled water for 1 hour. Whereas $^{17}O$ MAS NMR spectra with short pulse length ($0.175{\mu}s$) at 9.4 T and 14.1 T for as-synthesized amorphous silica gel showed the unresolved peak for Si-O-Si and Si-OH structures, the $^{17}O$ MAS NMR spectra with long pulse length ($2{\mu}s$) showed the additional peak at ~0 ppm. The peak at ~0 ppm may be due to Si-OH structure with very fast relaxation rate as coupled to liquid water molecules or organic ligands on the surface of amorphous silica gel. The observation of the peak at ~0 ppm in $^{17}O$ MAS NMR spectra for amorphous silica gel became more significant as the organic ligands were removed. These results indicate that the organic ligands on the surface of amorphous silica gel interact with oxygen atoms in Si-OH and provide the information about atomic structure of silanol and siloxane in amorphous silica gel. The current results could enhance the understanding of dehydration mechanism of diverse silicates, which is known as atomic scale origins of intermediate depth (approximately, 70~300 km) earthquakes in subduction zone.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.1
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• pp.74-79
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• 2007

Most studies on copper Chemical Mechanical Planarization (CMP) have focused on material removal and its mechanisms. Although many studies have been conducted on the mechanism of Cu CMP, a study on uniformity in Cu CMP is still unknown. Since the aim of CMP is global and local planarization, the approach to various factors related to uniformity in Cu CMP is essential to elucidate the Cu CMP mechanism as well. The main purpose of the experiment reported here was to investigate and mechanically analyze the roles of slurry components in the formation of the uniformity in Cu CMP. In this paper, Cu CMP was performed using citric acid($C_{6}H_{8}O_{7}$), hydrogen peroxide($H_{2}O_{2}$), colloidal silica, and benzotriazole($BTA,\;C_{6}H_{4}N_{3}H$) as a complexing agent, an oxidizer, an abrasive, and a corrosion inhibitor, respectively. All the results of this study showed that within-wafer non-uniformity(WIWNU) of Cu CMP could be controlled by the contents of slurry components.