• 제목/요약/키워드: Silica nanoparticle

검색결과 93건 처리시간 0.033초

반도체 몰딩 공정에서 발생하는 EMC 폐기물의 재활용을 통한 실리카 나노입자의 제조 및 반도체용 CMP 슬러리로의 응용 (Fabrication of Silica Nanoparticles by Recycling EMC Waste from Semiconductor Molding Process and Its Application to CMP Slurry)

  • 김하영;추연룡;박규식;임지수;윤창민
    • 유기물자원화
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    • 제32권1호
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    • pp.21-29
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    • 2024
  • 본 연구에서는 반도체 패키징의 몰딩 공정에서 발생하는 EMC 폐기물을 재활용하여 실리카 나노입자를 성공적으로 제조하였으며, 이를 CMP 공정용 슬러리의 연마재 물질로 응용하였다. 상세히는, EMC 폐기물을 암모니아 용액과 소니케이터를 활용하여 열과 에너지를 가하는 에칭 과정을 통해 실리카 나노입자를 제조하기 위한 실라놀 전구체를 추출하였다. 이후 실라놀 전구체를 활용하여 졸-겔법을 통해 약 100nm를 나타내는 균일한 구형의 실리카 나노입자(e-SiO2, experimentally synthesized SiO2)를 합성하였다. 제조한 e-SiO2는 물리화학적 분석을 통해 상용화된 실리카 입자(c-SiO2, commercially SiO2)와 동일한 형상과 구조를 지니고 있음을 확인할 수 있었다. 최종적으로, e-SiO2를 연마재로 사용하여 CMP 공정용 슬러리를 제조하여 실제적인 반도체 칩의 연마 성능을 확인하였다. 그 결과, 반도체 칩의 표면에 존재하던 스크래치가 성공적으로 제거되어 매끈한 표면으로 바뀌게 된 것을 확인하였다. 본 연구 결과는 물질의 재활용법에 대한 설계를 통해 EMC 폐기물의 부가가치를 향상시키기 위하여 반도체 공정에서 대표적으로 활용되는 고부가가치 소재인 실리카 입자로 성공적으로 제조하고 이를 응용하는 방법에 대해 제시하였다.

비정질 규산염 나노입자의 입자 크기에 따른 원자 구조 변화 : 고상 핵자기공명 분석 및 양자화학계산 연구 (Effect of Particle Size on the Atomic Structure of Amorphous Silica Nanoparticles: Solid-state NMR and Quantum Chemical Calculations)

  • 김현나;이성근
    • 한국광물학회지
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    • 제21권3호
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    • pp.321-329
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    • 2008
  • 비정질 규산염 나노입자는 지각에 풍부한 규소와 산소로 이루어진 비다공성 나노입자로서 광물학을 포함한 지구환경과학과 산업적 측면에서 모두 중요한 물질이다. 본 연구에서는 $^{1}H$$^{29}Si$ MAS NMR분광분석을 통해 7 nm와 14 nm 규산염 나노입자의 규소와 수소 원자 환경을 측정하고, 입자 크기에 따른 규산염 나노입자 원자 환경 변화를 규명하였다. NMR 스펙트럼의 화학적 이동 값의 이론적 배경을 이해하기 위해 양자화학계간을 통해 $Si_{3}O_{6}H_6,\;Si_{4}O_{5}H_{10},\;Si_{5}O_{4}H_{12}$ 분자계간모델의 화학 차폐를 계산하였다. $^{29}Si$ MAS NMR의 결과, 이중 실라놀(geminal silanol)과 단일 실라놀(single silanol), 실록산(siloxane) 구조의 Si 원자 환경에 해당하는 $Q^2,\;Q^3,\;O^4$가 구분되어 나타나며 입자 크기에 따라 $Q^2,\;Q^3,\;O^4$가 7 nm규산염 나노입자에는 $7{\pm}1%,\;27{\pm}2%,\;66{\pm}2%$, 14 nm 규산염 나노입자에는 $6{\pm}1%,\;21{\pm}2%,\;73{\pm}2%$의 분포를 갖는다. $Q^2,\;Q^3$ 구조는 나노 입자의 표면적에 대부분 존재하는 것으로 예상되었으나, 두 규산염 나노입자의 표면적 차이에 비해 $Q^2,\;Q^3$ 양의 차이가 적으며, 이는 입자 표면 뿐 아니라 입자 내부에도 $Q^2,\;Q^3$ 구조가 존재함을 의미한다. $^{1}H$ MAS NMR 스펙트럼은 물리흡착 된 물(physisorbed water), 수소결합 된 수산기(hydrogen bended silanol), 비 수소결합 된 수산기(non-hydrogen bonded silanol)를 구분하여 나타낸다. 14 nm 비정질 규산염 나노입자에 비해 7nm 나노입자에 약 3.4 배의 수소 원자가 존재하며, 더 강한 수소결합 세기를 갖는다. 전체 수산기 중에서 비 수소결합 된 수산기가 차지하는 비율이 7 nm 규산염 나노입자 보다 14 nm 규산염 나노입자에서 더 높으며, 이는 수소 원자간의 상대적 거리(proximity)가 14 nm 임자에서 더 긴 것을 지시한다. 본 연구결과를 통하여 현재까지 알려지지 않은 규산염 나노입자의 입자의기에 의한 다양한 원자 구조의 변화를 규명하였다.

폴리아민 나노 복합체를 이용한 고분자-실리카 복합체 입자 합성 (Synthesis of Polymer-Silica Hybrid Particle by Using Polyamine Nano Complex)

  • 김동영;서준희;이병진;강경구;이창수
    • 청정기술
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    • 제27권2호
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    • pp.115-123
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    • 2021
  • 본 연구는 무기 실리카 껍질(shell)과 유기 고분자 코어(core)로 구성된 매우 균일한 유-무기 복합체 입자 제조의 방법에 관한 것이다. 먼저, 미세유체 기술을 이용하여 균일한 크기를 지니는 유기 고분자 코어 입자를 제조하였다. 코어 입자의 제조 과정에서 코어 입자의 제조 과정에서 광 경화성 유기 물질이 포함된 분산상과 연속상의 유속을 독립적으로 제어함으로써 균일한 액적을 형성하였다. 액적이 형성됨과 동시에, 미세유체 채널의 말단에서 자외선 조사에 의해 액적이 광중합 되어 코어 입자로 형성된다. 더불어, 폴리알릴아민 하이드로클로라이드(polyallylamine hydrochloride, PAH)와 인산 이온(phosphate ion)으로 구성된 나노 복합체는 최적화된 pH 조건에서 수소결합과 정전기적 인력 같은 강력한 상호작용을 통해 코어 입자에 코팅된다. 폴리아민 나노 복합체에 존재하는 PAH 주쇄의 아민 그룹들은 규산(silicic acid)의 축합(condensation) 반응을 촉매하여, 코어 입자 표면의 실리카 나노입자 성장을 시킬 수 있었다. 따라서, 본 방법을 통해 유기 코어에 무기 실리카 나노입자로 코팅된 유-무기 복합체 입자를 제조할 수 있었다. 최종적으로, 본 연구에서 제시한 방법은 보다 온화하며 환경친화적인 조건 하에서 단시간 내에 유-무기 복합체 입자를 합성할 수 있으며, 다양한 모양과 크기를 갖는 코어 입자에 적용되어 넓게 활용될 수 있다.

Ultrathin Titania Coating for High-temperature Stable $SiO_2$/Pt Nanocatalysts

  • Reddy, A. Satyanarayana;Kim, S.;Jeong, H.Y.;Jin, S.;Qadir, K.;Jung, K.;Jung, C.H.;Yun, J.Y.;Cheon, J.Y.;Joo, S.H.;Terasaki, O.;Park, Jeong-Young
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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    • pp.217-217
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    • 2011
  • Recently, demand for thermally stable metal nanoparticles suitable for chemical reactions at high temperatures has increased to the point to require a solution to nanoparticle coalescence. Thermal stability of metal nanoparticles can be achieved by adopting core-shell models and encapsulating supported metal nanoparticles with mesoporous oxides [1,2]. However, to understand the role of metal-support interactions on catalytic activity and for surface analysis of complex structures, we developed a novel catalyst design by coating an ultra-thin layer of titania on Pt supported silica ($SiO_2/Pt@TiO_2$). This structure provides higher metal dispersion (~52% Pt/silica), high thermal stability (~600$^{\circ}C$) and maximization of the interaction between Pt and titania. The high thermal stability of $SiO_2/Pt@TiO_2$ enabled the investigation of CO oxidation studies at high temperatures, including ignition behavior, which is otherwise not possible on bare Pt nanoparticles due to sintering [3]. It was found that this hybrid catalyst exhibited a lower activation energy for CO oxidation because of the metal-support interaction. The concept of an ultra-thin active metal oxide coating on supported nanoparticles opens-up new avenues for synthesis of various hybrid nanocatalysts with combinations of different metals and oxides to investigate important model reactions at high-temperatures and in industrial reactions.

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Sol-gel 법을 이용한 코어-쉘 실리카-형광체의 제조 및 특성평가 (Synthesis and Characterization of Core-Shell Silica-Phosphor Nanoparticles via Sol-Gel Process)

  • 신원호;김세윤;정형모
    • 한국분말재료학회지
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    • 제25권1호
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    • pp.12-18
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    • 2018
  • Cost-effective functional phosphor nanoparticles are prepared by introducing low-cost $SiO_2$ spheres to rare-earth phosphor ($YVO_4:Eu^{3+}$, $YVO_4:Er^{3+}$, and $YVO_4:Nd^{3+}$) shells using a sol-gel synthetic method. These functional nanoparticles are characterized by X-ray diffraction, X-ray photoelectron spectroscopy, transmission electron microscopy, and general photoluminescence spectra. The $SiO_2$ sphere occupying the interior of the conventional phosphor is advantageous in significantly reducing the cost of expensive rare-earth phosphor nanoparticles. The sol-gel process facilitates the core-shell structure formation; the rare-earth shell phosphor has strong interactions with chelating agents on the surfaces of $SiO_2$ nanoparticles and thus forms layers of several nanometers in thickness. The photoluminescence wavelength is simply tuned by replacing the active materials of $Eu^{3+}$, $Er^{3+}$, and $Nd^{3+}$. Moreover, the photoluminescent properties of the core-shell nanoparticles can be optimized by manipulating the specific contents of active materials in the phosphors. Our simple approach substitutes low-cost $SiO_2$ for expensive rare-earth-based phosphor materials to realize cost-effective phosphor nanoparticles for various applications.

Alterations in Growth and Morphology of Ganoderma lucidum and Volvariella volvaceae in Response to Nanoparticle Supplementation

  • Singh, Swarnjeet;Kuca, Kamil;Kalia, Anu
    • Mycobiology
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    • 제48권5호
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    • pp.383-391
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    • 2020
  • Use of nanoparticles (NPs) in several commercial products has led to emergence of novel contaminants of air, soil and water bodies. The NPs may exhibit greater ecotoxicity due to nano-scale dependent properties over their bulk counterparts. The present investigation explores the effect of in vitro supplementation of TiO2, silica and silver NPs on radial growth and ultrastructural changes in the hyphae and spores of two mushroom genera, Ganoderma lucidum and Volvariella volvaceae. A concentration dependent decrease in radial growth on NP amended potato dextrose agar medium was recorded. However, in comparison to control, there was decrease in radial diameter on supplementation with TiO2 NPs while an increase was recorded for silica and silver NPs amendments as compared to their bulk salts at same concentrations after 48 h of incubation. Optical microscopy studies showed decrease in the number of spores while increase in spore diameter and thinning of hyphal diameter on NPs supplementation. Scanning electron microscopy analysis of fungal growth showed presence of deflated and oblong spores in two fruiting strains of Ganoderma while Volvariella exhibited decreased sporulation. Further, hyphal thinning and branching was recorded in response to NP amendments in both the test mushrooms. Enhancement of protein content was observed on NP compared to bulk supplementation for all cultures, concentrations and hours of incubation except for TiO2 NPs. Likewise, bulk and NP supplementations (at 100 mg L-1) resulted in enhanced laccase activity with occurrence of laccase specific protein bands on SDS-PAGE analysis.

하이퍼써미아 응용을 위한 하이브리드 에어로젤 내 분산된 마그네타이트 나노입자 (Magnetite Nanoparticles Dispersed in Hybrid Aerogel for Hyperthermia Application)

  • 이은희;좌용호;김창열
    • 한국재료학회지
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    • 제22권7호
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    • pp.362-367
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    • 2012
  • Magnetite nanoparticles(NPs) have been the subject of much interest by researchers owing to their potential use as magnetic carriers in drug targeting and as a tumor treatment in cases of hyperthermia. However, magnetite nanoparticles with 10 nm in diameter easily aggregate and thus create large secondary particles. To disperse magnetite nanoparticles, this study proposes the infiltration of magnetite nanoparticles into hybrid silica aerogels. The feasible dispersion of magnetite is necessary to target tumor cells and to treat hyperthermia. Magnetite NPs have been synthesized by coprecipitation, hydrothermal and thermal decomposition methods. In particular, monodisperse magnetite NPs are known to be produced by the thermal decomposition of iron oleate. In this study, we thermally decomposed iron acetylacetonate in the presence of oleic acid, oleylamine and 1,2 hexadecanediol. We also attempted to disperse magnetite NPs within a mesoporous aerogels. Methyltriethoxysilicate(MTEOS)-based hybrid silica aerogels were synthesized by a supercritical drying method. To incorporate the magnetite nanoparticles into the hybrid aerogels, we devised two methods: adding the synthesized aerogel into a magnetite precursor solution followed by nucleation and crystal growth within the pores of the aerogels, and the infiltration of magnetite nanoparticles synthesized beforehand into aerogel matrices by immersing the aerogels in a magnetite nanoparticle colloid solution. An analysis using a vibrating sample magnetometer showed that approximately 20% of the magnetite nanoparticles were well dispersed in the aerogels. The composite samples showed that heating under an inductive magnetic field to a temperature of $45^{\circ}C$ is possible.

Nano-Encapsulation of Plant Growth-Promoting Rhizobacteria and Their Metabolites Using Alginate-Silica Nanoparticles and Carbon Nanotube Improves UCB1 Pistachio Micropropagation

  • Pour, Mojde Moradi;Saberi-Riseh, Roohallah;Mohammadinejad, Reza;Hosseini, Ahmad
    • Journal of Microbiology and Biotechnology
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    • 제29권7호
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    • pp.1096-1103
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    • 2019
  • UCB-1 is the commercial rootstock of pistachio. Reproduction of this rootstock by tissue culture is limited by low levels of proliferation rate. Therefore, any compound that improves the proliferation rate and the quality of the shoots can be used in the process of commercial reproduction of this rootstock. Use of plant growth-promoting bacteria is one of the best ideas. Given the beneficial effects of nanoparticles in enhancement of the growth in plant tissue cultures, the aim of the present study was to investigate the effects of nanoencapsulation of plant growth-promoting rhizobacteria (using silica nanoparticles and carbon nanotubes) and their metabolites in improving UCB1 pistachio micropropagation. The experiment was conducted in a completely randomized design with three replications. Before planting, treatments on the DKW medium were added. The results showed that the use of Pseudomonas fluorescens VUPF5 and Bacillus subtilis VRU1 nanocapsules significantly enhanced the root length and proliferation. The nanoformulation of the VUPF5 metabolite led to the highest root length (6.26 cm) and the largest shoot (3.34 cm). Inoculation of explants with the formulation of the metabolites (both bacterial strains) significantly elevated the average shoot length and the fresh weight of plant compared to the control. The explants were dried completely using both bacterial strains directly and with capsule coating after the three days.

Ionic liquid coated magnetic core/shell CoFe2O4@SiO2 nanoparticles for the separation/analysis of trace gold in water sample

  • Zeng, Yanxia;Zhu, Xiashi;Xie, Jiliang;Chen, Li
    • Advances in nano research
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    • 제10권3호
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    • pp.295-312
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    • 2021
  • A new ionic liquid functionalized magnetic silica nanoparticle was synthesized and characterized and tested as an adsorbent. The adsorbent was used for magnetic solid phase extraction on ICP-MS method. Simultaneous determination of precious metal Au has been addressed. The method is simple and fast and has been applied to standard water and surface water analysis. A new method for separation/analysis of trace precious metal Au by Magnetron Solid Phase Extraction (MSPE) combined with ICP-MS. The element to be tested is rapidly adsorbed on CoFe2O4@SiO2@[BMIM]PF6 composite nano-adsorbent and eluted with thiourea. The method has a preconcentration factor of 9.5-fold. This method has been successfully applied to the determination of gold in actual water samples. Hydrophobic Ionic Liquids (ILs) 1-butyl-3-methylimidazole hexafluorophosphate ([BMIM]PF6) coated CoFe2O4@SiO2 nanoparticles with core-shell structure to prepare magnetic solid phase extraction agent (CoFe2O4@SiO2@ILs) and establish a new method of MSPE coupled with inductively coupled plasma mass spectrometry for separation/analysis of trace gold. The results showed that trace gold was adsorbed rapidly by CoFe2O4@SiO2@[BMIM]PF6 and eluanted by thiourea. Under the optimal conditions, preconcentration factor of the proposed method was 9.5-fold. The linear range, detection limit, correlation coefficient (R) and relative standard deviation (RSD) were found to be 0.01~1000.00 ng·mL-1, 0.001 ng·mL-1, 0.9990 and 3.4% (n = 11, c = 4.5 ng·mL-1). The CoFe2O4@SiO2 nanoparticles could be used repeatedly for 8 times. This proposed method has been successfully applied to the determination of trace gold in water samples.

Large-scale Synthesis of Uniform-sized Nanoparticles for Multifunctional Medical Applications

  • Hyeon, Taeg-Hwan
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.1-1
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    • 2011
  • We developed a new generalized synthetic procedure, called as "heat-up process," to produce uniform-sized nanocrystals of many transition metals and oxides without a size selection process. We were able to synthesize uniform magnetite nanocrystals as much as 1 kilogram-scale from the thermolysis of Fe-oleate complex. Clever combination of different nanoscale materials will lead to the development of multifunctional nano-biomedical platforms for simultaneous targeted delivery, fast diagnosis, and efficient therapy. In this presentation, I would like to present some of our group's recent results on the designed fabrication of multifunctional nanostructured materials based on uniform-sized magnetite nanoparticles and their medical applications. Uniform ultrasmall iron oxide nanoparticles of <3 nm were synthesized by thermal decomposition of iron-oleate complex in the presence of oleyl alcohol. These ultrasmall iron oxide nanoparticles exhibited good T1 contrast effect. In in vivo T1 weighted blood pool magnetic resonance imaging (MRI), iron oxide nanoparticles showed longer circulation time than commercial gadolinium complex, enabling high resolution imaging. We used 80 nm-sized ferrimagnetic iron oxide nanocrystals for T2 MRI contrast agent for tracking transplanted pancreatic islet cells and single-cell MR imaging. We reported on the fabrication of monodisperse magnetite nanoparticles immobilized with uniform pore-sized mesoporous silica spheres for simultaneous MRI, fluorescence imaging, and drug delivery. We synthesized hollow magnetite nanocapsules and used them for both the MRI contrast agent and magnetic guided drug delivery vehicle.

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