• 제목/요약/키워드: Silent Discharge

검색결과 102건 처리시간 0.03초

고주파전압인가에 따른 무성방전형 오존발생기의 특성 (The Characteristics of Silent Discharge Type Ozonizer by Applying Radio Frequency Voltage)

  • 이창호;전병준;박원주;이광식;우성훈;박용권;윤영대;김영훈
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 하계학술대회 논문집 C
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    • pp.1885-1887
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    • 2003
  • 본 연구에서는 공업용으로 널리 사용되고 있는 오존발생법의 하나인 무성방전법을 응용한 고주파 전압인가에 따른 오존발생기를 설계 제작하여 오존생성의 중요한 인자중 하나인 주파수변화에 따른 오존생성특성을 연구하였다.

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Evaluation of Ozone Concentration for the Oxide Thin Film Growth

  • 박노봉;임중관;박용필;이희갑
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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    • pp.579-582
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    • 2003
  • Ozone is usually generated from oxygen gas using a silent discharge apparatus and its concentration is less then 10 mol%. Ozone is condensed by the adsorption method, which is widely used for the growth of oxidation thin films such as superconductor. Highly condensed ozone is analyzed by three methods; ultraviolet absorption, thermal decomposition and Q-mass analyzing methods. Thermal decomposition method is most effective in the highly condensed ozone region and its method is superior to Q-mass analyzer for determining ozone concentration because of the simplicity of the method.

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전극과 유전체장벽간의 접착물질의 물성변화가 오존발생특성에 미치는 영향 (Effects of Properties of Binder between Electrode and Dielectric Barrier on Ozone Generation Characteristics)

  • 박승록;김진규;김형표
    • 조명전기설비학회논문지
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    • 제16권6호
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    • pp.119-125
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    • 2002
  • 무성방전형 오존발생장치에서 고농도의 오존을 발생시키기 위해서는 방전공간의 온도를 낮게 유지시켜주는 것이 중요하다. 이때, 방전공간에서 발생된 열을 외부로 전달하기 위한 유전체장벽과 전극간의 접착물질과 접착방법은 전기적, 열적 관점에서 볼 때 방전에 큰 영향을 미치게 된다. 따라서 접착물질과 접착방법은 오존발생에 중요한 변수가 될 수 있다. 본 연구는 접착물질과 방법이 오존발생에 미치는 영향을 조사한 실험적인 결과이다. 접착물질의 종류로는 방열재료로 사용되는 실리콘 화합물질, 전기적인 도전성을 가지는 수지를 사용하였으며 이들의 물성변화를 위해 첨가물질로 차콜(charcoal)을 사용하였다. 결과적으로 접착물질(실리콘 화합물)이 사용되었을 때가 사용하지 않았을 때보다 같은 전압에서 많은 오존발생량을 보여주었다. 또한 접착물질이 사용되었을 때는 순수한 실리콘 화합물이 사용된 경우가 도전성을 가지는 접착물질이 사용되었을 때보다 많은 오존발생량을 보여주었다.

Ti-Si-Al형 세라믹 촉매 방전관의 오존 발생 특성 연구 (A Study of Ozone Generation Characteristic using Ceramic Catalyst Tube of Ti-Si-Al)

  • 조국희;김영배;이동훈
    • 조명전기설비학회논문지
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    • 제16권6호
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    • pp.130-136
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    • 2002
  • 본 논문은 비유전율이 100 이상으로 제작된 Ti-Si-Al형 세라믹 촉매 방전관에 전원 전압 4 ~6[kV], 구동 주파수0.6~1.0[kHz]를 방전관 전극에 인가하여 오존 농도와 수율을 측정한 것이다. 측정 결과 구동 주파수 600[Hz], 유량 2[1/min], 동작 압력 1.6[atm], 방전관 주위 온도 20[$^{\circ}C$]에서 산소 원료의 경우, 오존 발생 농도는 50~60[g/㎥]이었고, 오존 발생 수율은 180(g/kWh)로 나타났다. 그리고 반응기 내부 온도 또는 유입 가스 온도가 낮을수록 오존 수율은 상승하였다.

저온 플라즈마를 이용한 피부치료기 개발에 관한 연구 (Development of the Skin Treatment Unit using Low Temperature Plasma)

  • 송광현;고윤석;이우철
    • 한국전자통신학회논문지
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    • 제9권12호
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    • pp.1427-1434
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    • 2014
  • 의료기기중 체외에서 인체로 물리적 에너지를 가하거나 그 의료기기의 에너지를 이용하여 인체의 화학적 변화를 이용하여 치료를 하는 것은 고도의 신뢰성과 안정성이 요구된다. 특히 인체의 모든 부분 중 가장 외부로 노출되어있는 피부에 대한 치료는 매우 중요 하다고 할 것이다. 이러한 관점에서 보았을 때 피부 치료 시 발생 할 수 있는 모든 위험 요소를 줄이고 치료의 효과를 극대화 할 수 있는 장비의 개발은 높은 치료 효과와 안전성 확보를 위하여 반드시 필요하다고 할 것이다.

SPM을 이용한 반도체 포토레지스트 제거 공정 대체를 위한 DIW-$O_3$ 방식 세정기술 개발 (Development of the DIW-$O_3$ Cleaning Technology Substituted for the Semiconductor Photoresist Strip Process using the SPM)

  • 손영수;함상용
    • 연구논문집
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    • 통권33호
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    • pp.99-109
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    • 2003
  • Recently the utilization of the ozone dissolved de-ionized water(DIW-$O_3$) in semiconductor wet cleaning process and photoresist stripping process to replace the conventional sulfuric acid and hydro peroxide mixture(SPM) method has been studied. In this paper, we propose the water-electrode type ozone generator which has the characteristics of the high concentration and purity to produce the high concentration DIW-$O_3$ for the photoresist strip process in the semiconductor fabrication. The proposed ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. Through this study, we obtained the results of the 10.3 wt% of ozone gas concentration at the oxygen gas of 0.5 [liter/min.] and the DIW-$O_3$ concentration of 79.5 ppm.. Through the photoresist stripping test using the produced DIW-$O_3$, we confirmed that the photoresist coated on the silicon wafer was removed effectively in the 12 minutes.

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견마로봇의 전력제어 및 최적 운용에 대한 연구 (Study on Power Control and Optimal Management for Dog-Horse Robot)

  • 강태하;허진욱;김준;강신천
    • 한국군사과학기술학회지
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    • 제13권3호
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    • pp.343-348
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    • 2010
  • Recently, unmanned electric vehicles are increasingly interested among all of the world since they can provide low exhaust gas, high efficiency and high mobility. To exploit their silent maneuver and high mobility, unmanned electric vehicles have been developed since early 1980's for military. However, it is not easy to design and control a power system satisfying operating duration and mobility performance requirements based on various mission profiles for military use under the conditions of limited space and weight. Moreover it is also necessary to prevent over-charge, over-discharge and voltage unbalance between cells of battery to secure high voltage battery which is serially connected with muti-cells. In this paper, we presents power control and optimal management method for the dog-horse robot which adopts a electric power system and suggests a guide-line to manage and control to secure high voltage battery.

반도체 웨이퍼의 오존 수(水) 세정을 위한 고농도 오존발생장치 특성 연구 (A Study on the Characteristics of the High Concentration Ozone Generator for the Semiconductor Wafer Cleaning with the Ozone Dissolved De-ionized Water)

  • 손영수;함상용;문세호
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제52권12호
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    • pp.579-585
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    • 2003
  • Recently the utilization of the ozone dissolved de-ionized water(DI-O3 water) in semiconductor wet cleaning process to replace the conventional RCA methods has been studied. In this paper, we propose the water-electrode type ozone generator which has the ozone gas characteristics of the high concentration and high purity to produce the high concentration DI-O3 water for the silicon wafer surface cleaning process. The ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. We investigate the performance of the proposed ozone generator which has the design goal of the concentration of 7[wt%] and ozone generation quantity of 6[g/hr] at flow rate of 1[$\ell$/min). The experiment results show that the water electrode type ozone generator has the characteristics of 8.48[wt%] of concentration, 8.08[g/hr] of generation quantity and 76.2[g/kWh] of yield and it's possible to use the proposed ozone generator for the DI-O3 water cleaning process of silicon wafer surface.

결장뉴 전기활동도에 대한 Ouabain과 Vanadate의 작용 (Effects of Ouabain and Vanadate on the Spontaneous Contractions and Electrical Activity in Guinea-pig Taenia Coli)

  • 박종규;김기환;서인석
    • The Korean Journal of Physiology
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    • 제22권2호
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    • pp.189-206
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    • 1988
  • The effects of ouabain on the contractile and electrical activities were investigated in the isolated preparations of guinea-pig taenia coli, and compared with those of vanadate. Spontaneous contractions were recorded with force transducer, and electrical activites were measured by use of suction electrode, or single sucrose-gap technique. The contractions were induced by the electrical stimulation for 5 seconds every 1 minute with alternating current (60 Hz, 3.0 V/cm) through the platinum electrodes located in parallel with the long axis of the preparation. All experiments were performed in tris-buffered Tyrode solution which was aerated with $100%{\;}O_2$ and kept at $35^{\circ}C$. The results obtained were as follows: 1) Responses of spontaneous contractions to ouabain were concentration-dependent; $10^{-7}M$ ouabain caused a rise of basal tone. Above the concentration of $10^{-6}M$ ouabain, an initial increase followed by a decrease in tension was observed. 2) A continuous spike discharge was induced by the administration of $10^{-7}M$ ouabain. Above $10^{-6}M$ ouabain, a transient initial increase followed by a decrease in spike frequency and amplitude was produced, and finally membrane potential was sustained at a certain level without a spike discharge. 3) The characteristic response to $10^{-7}M$ ouabain was not blocked by the pretreatment with $10^{-7}M$ atropine. 4) The electrically induced contractions were completely suppressed at the concentration of $2{\times}10^{-7}M$ ouabain. These contractions were blocked more rapidly in paralled with the increase in ouabain concentration. 5) Effects of vanadate on the spontaneous activities were quite different from those of ouabain; $10^{-6}M$ vanadate increased the amplitude of contractions and $10^{-5}M$ vanadate increased slightly both amplitude and frequency of spontaneous contractions. $10^{-4}M$ vanadate showed irregular phasic contractions superimposed on the increased basal tone. 6) $10^{-5}M$ vanadate depolarized the membrane potential and shortened the interval between the bursts of spike discharge, whereas $10^{-4}M$ vanadate induced continuous spike discharge with membrane depolarization. 7) Vanadate caused a characteristic inhibitory response to the contractions induced by electrical stimulation; An initial rapid inhibition of tension development and then gradual recovery to a certain level. From the above results, the following conclusions could be made: 1) The rise of basal tone at $10^{-7}M$ ouabain is due to continuous spike discharge without a silent period. The continuous spike discharge is likely to be associated with a slight membrane depolarization caused by the blockage of Na pump. 2) The biphasic response induced by above $10^{-6}M$ ouabain seems to occur by the different mechanisms. The initial increase in tension is associated with depolarization along with an increase in spike frquency, whereas the subsequent relaxation occurs through a non-electrical mechanism. 3) The characteristic response to $10^{-7}M$ ouabain is resulted not from the action on intrinsic nerve terminal, but from its direct action on the membrane of smooth muscle cells. 4) The phasic contractions superimposed on the increased basal tone at the concentration of $10^{-4}M$ vanadate is resulted from the continuous spike discharge with membrane depolarization, of which mechanism remains unknown. 5) The inhibitory action of ouabain on the electrically induced contractions suggests that the increasein intracellular Na in some way inhibits the electrically induced $Ca^{2+}$ influx. The mechanism of vanadate action on the induced contractions remains unknown.

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단기간의 체중감량을 통한 뇌경색 환자의 고혈압 치험 1례 (A Case report of Hypertension Controlled with Weight-loss in Stroke Patient)

  • 엄태민;오정민;최고은;허종원;김윤식;설인찬;유호룡
    • 대한중풍순환신경학회지
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    • 제15권1호
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    • pp.97-105
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    • 2014
  • Although hypertension doesn't kill itself, its complications can be deadly: increased risk of heart attack and stroke. So hypertension is often called the silent killer, and this is why controlled hypertension is so important. A 51 year-old female stroke patient was diagnosed with hypertension 10 years ago. Since then, though western medication have been used to control her hypertension, it was ineffective. As we know, obesity can cause high blood pressure, so we try weight-loss as alternative way to her hypertension drug. After discharge from hospital, she reduce her weight by 10kg and more by diet only. And her blood pressure became decreased steadily. As maintaining her decreased weight, her blood pressure is now relatively stable without taking any medication. In this case, we recognised that weight-loss by diet could be effective instead of taking hypertension drug for obesity patient who has high blood pressure.

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