• Geomechanics and Engineering
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• 제34권2호
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• pp.125-138
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• 2023

To improve the understanding of infiltration characteristic of modified slurry and the support efficiency of filter cake in silty sand strata, the slurry infiltration (SI) and filter cake formation (FCF) were investigated in a laboratory apparatus. The water discharge and the excess pore pressure at different depths of silty sand strata were measured during SI. The relationship between permeability coefficient/thickness ratio of filter cake (k_c/ΔL) and effective slurry pressure conversion rate of filter cake (η) were analyzed. Moreover, the SI and FCF process as well as the modification mechanism of CMC (carboxymethyl cellulose) were clarified. The experimental results indicate the formation of only external filter cake in the silty sand strata. The slurry particles obtain thicker water membrane after being modified by CMC, which blocks partial water path in filter cake and decreases the water discharge significantly. The silty sand excavated from tunnel face also contributes to the water discharge reduction. The k_c of the external filter cake ranges from 3.83×10^-8 cm/s to 7.44×10^-8 cm/s. The η of the external filter cake is over 96%, which decreases with increasing k_c/ΔL. A silty sand content within 10% is suggested during construction to ensure the uniformity of the filter cake.

• 한국세라믹학회지
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• 제48권4호
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• pp.312-315
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• 2011

The effect of slurry composition and wafer flatness on a material removal rate (MRR) and resulting surface roughness which are evaluation parameters to determine the CMP characteristics of the on-axis 6H-SiC substrate were systematically investigated. 2-inch SiC wafers were fabricated from the ingot grown by a conventional physical vapor transport (PVT) method were used for this study. The SiC substrate after the CMP process using slurry added oxidizers into slurry consisted of KOH-based colloidal silica and nano-size diamond particle exhibited the significant MRR value and a fine surface without any surface damages. SiC wafers with high bow value after the CMP process exhibited large variation in surface roughness value compared to wafer with low bow value. The CMPprocessed SiC wafer having a low bow value of 1im was observed to result in the Root-mean-square height (RMS) value of 2.747 A and the mean height (Ra) value of 2.147 A.

• 한국산학기술학회논문지
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• 제13권5호
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• pp.2002-2008
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• 2012

최근 들어 전자제품 소형화로 인한 방열의 중요성이 대두되고 있는 가운데 다양한 소재의 히트싱크가 사용되고 있다. 본 연구에서는 태양광에너지 소재산업에서 발생하는 슬러리로부터 SiC를 성공적으로 분리하여 다공성 세라믹 히트싱크를 개발하였고 알루미늄 히트싱크, 순수 SiC 히트싱크와 방열성능 비교실험을 통해 다공성 재생 SiC 세라믹 히트싱크의 방열성능을 검증하였다. 실험 결과, 다공성 재생 SiC는 알루미늄 히트싱크 대비 방열성능이 우수함을 확인하였는데 이는 미세기공으로 인한 전열면적 증가에 기인한다. 또한, 수치해석을 사용하여 미세기공이 방열성능에 미치는 영향을 대류열전달계수 증가로 정량화하였다.

• 한국세라믹학회지
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• 제40권2호
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• pp.167-171
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• 2003

기계적 방법으로 합성된 CeO$_2$분말을 연마입자로 하여 STI용 CMP 슬러리를 제조하였다. 연마입자는 정전기적 방법과 입체적 방법으로 수계에서 안정화시킬 수 있었으며, 장기 안정성을 위해서는 입체적 방법에 의한 안정화가 유효하였다. 50$0^{\circ}C$와 $700^{\circ}C$에서 합성된 CeO$_2$를 이용하여 CMP 슬러리를 제조하고, SiO$_2$와 Si$_3$N$_4$가 블랭킷 형태로 증착된 웨이퍼를 연마한 결과 연마능률과 선택비는 연마입자의 합성조건과 분산 안정성, 슬러리의 pH 등에 의해 영향을 받았다.

• 한국건축시공학회지
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• 제17권2호
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• pp.167-174
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• 2017

고비율의 고로슬래그를 사용한 슬러리 충전 고성능 섬유보강 시멘트 복합체(SI-HPFRCC)의 역학적 성능을 평가하였다. SI-HPFRCC 실험체 제작을 위해 hooked-end 형의 강섬유를 6.4% 사용하였다. 재령에 따른 압축강도 및 압축인성과 휨강도 및 휨인성 실험을 통해 SI-HPFRCC의 역학적 성능을 평가하였다. 또한 섬유보강 효과를 평가하기 위해 SI-HPFRCC 실험체 제작에 사용된 슬러리 매트릭스의 압축강도 및 휨강도를 측정하였다. 실험결과 SI-HPFRCC의 휨거동이 재령에 따라 취성이 증가함을 확인하였다. 압축거동의 경우에도 재령에 따른 취성 증가를 볼 수 있었으나 그 정도는 미미하였다. 강도측면에서 볼 때 SI-HPFRCC는 슬러리 매트릭스에 비해 약 140~190%의 압축강도 증가와 440~500%의 휨강도 증가를 보였다.

• 한국세라믹학회지
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• 제46권5호
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• pp.534-539
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• 2009

Reaction Bonded Silicon Carbide(RBSC) has been used for engineering ceramics due to low-temperature fabrication and near-net shape products with excellent structural properties such as thermal shock resistance, corrosion resistance and mechanical strength. Recently, attempts have been made to develop hot gas filter with gradient pore structure by RBSC to overcome weakness of commercial clay-bonded SiC filter such as low fracture toughness and low reliability. In this study a fabrication process of porous RBSC with multi-layer pore structure with gradient pore size was developed. The support layer of the RBSC with multi-layer pore structure was fabricated by conventional Si infiltration process. The intermediate and filter layers consisted of phenolic resin and fine SiC powder were prepared by dip-coating of the support RBSC in slurry of SiC and phenol resin. The temperature of $1550^{\circ}C$ to make Si left in RBSC support layer infiltrate into dip-coated layer to produce SiC by reacting with pyro-carbon from phenol resin.

• 한국주조공학회지
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• 제13권6호
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• pp.524-531
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• 1993

Dispersion behaviors of SiC particles and microstructures in Al-2%Si/SiCp composite prepared by Rheo-compocasting were studied with change of fabrication conditions(slurry temperature, agitation time) and additions of Mg($0{\sim}3wt.%$). Also, the microhardness change of matrix, interface and total in composites were examined with additions of Mg($0{\sim}3wt.%$). The dispersion of particles in the composites became relatively homogeneous with increase of Mg additions, agitation time and decrease of slurry temperature. Rate of occupied area by particle in matrix was increased as increase of Mg additions due to improvement of wettability between SiC particle and matrix. A favorable composites were obtained by melting under Ar atmospheric SiCp injection and bottom pouring system. According to the analysis of X-ray diffraction, $Mg_2Si$, $Al_4C_3$, $SiO_2$ and MgO, etc, intermetallic compounds were formed by chemical interreaction at interface of matrix and particles. The microhardness of interface is higher than that of matrix due to more strengthening of above intermetallic compounds. It was considered that the total hardness of the composites is improved by dispersing of SiCp and addition of Mg.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.166-171
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• 2007

The characterization of monolithic SiC and SiCf/SiC composite materials fabricated by NITE and RS processes was investigated in conjunction with the detailed analysis of their microstructure and density. The NITE-SiC based materials were fabricated, using a SiC powder with average size of 30 nm. RS- SiCf/SiC composites were fabricated with a complex slurry of C and SiC powder. In the RS process, the average size of starting SiC particle and the blending ratio of C/SiC powder were $0.4\;{\mu}m$ and 0.4, respectively. The reinforcing materials for /SiC composites were BN-SiC coated Hi-Nicalon SiC fiber, unidirectional or plain woven Tyranno SA SiC fiber. The characterization of all materials was examined by the means of SEM, EDS and three point bending test. The density of NITE-SiCf/SiC composite increased with increasing the pressure holding time. RS-SiCf/SiC composites represented a great decrease of flexural strength at the temperature of $1000\;^{\circ}C.$

• 한국결정성장학회:학술대회논문집
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• 한국결정성장학회 1997년도 Proceedings of the 12th KACG Technical Meeting and the 4th Korea-Japan EMGS (Electronic Materials Growth Symposium)
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• pp.19-22
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• 1997

The surface modificaion of alumina by $Al_2$O$_3$/SiC nanocomposite coating was studied in terms of processing and microstructure. A powder slurry of 5 vol% SiC composition was dipcoated onto presintered alumina bodies and pressurelessly sintered at 1$700^{\circ}C$ for 2 h in $N_2$. The used of organic binder and plasticizer in the slurry preparation, and the control of the density of presintered alumina body were found to be necessary to avoid cracking and warping during processing. The nanocomposite coating well bonded to the alumina body with thickness about 110 ${\mu}{\textrm}{m}$. The average grain size of coating (2 ${\mu}{\textrm}{m}$) was much finer than that of alumina body (13 ${\mu}{\textrm}{m}$). Fracture surface observations revealed mostly transgranular fracture for the coating, whereas intergranular fracture for the alumina body. Some pores (about 6%) were observed in the coating layer, although the alumina body showed fully dense microstructure.

• 자원리싸이클링
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• 제12권3호
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• pp.25-30
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• 2003

본 연구의 목적은 실리콘웨이퍼의 절단공정에서 발생한 폐슬러리와 폐망간전지에서 발생하는 흑연봉을 각각 규소 및 탄소의 출발물질로 사용하여 가스터빈 부품, 열교환기 등에 사용되는 탄화규소(SiC)를 합성하는 연구를 수행하였다. 실리콘웨이퍼의 절단공정에서 발생하는 폐슬러리로부터 비중차이에 의한 선별과 자력선별 등에 의해 정제된 규소와 탄화규소를 얻을 수 있었으며, 폐망간전지를 해체하여 얻은 탄소봉으로부터 수세와 분쇄를 통하여 탄소분말을 얻을 수 있었다. 탄화규소의 합성은 규소와 당량비의 탄소분발을 혼합하여 1$600^{\circ}C$이상의 온도에서 아르곤 분위기와 진공분위기 하에서 2시간 유지시켰을 때 이루어졌으며, 이때 합성된 탄화규소의 순도는 99% 이상이었다.