• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.12
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• pp.37-42
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• 1999

In this paper, some of main processes for the next generation integrated circuits, such as Cu damascene process using CMP, electron beam lithography, $SiO_2$ CVD and RIE, Ti/Cu-CVD were carried cut and then, two level Cu interconnects were accomplished. In the results of CMP unit processes, a 4,635 ${\AA}$/min of removal rate, a selectivity of Cu : $SiO_2$ of 150:1, a uniformity of 4.0% are obtained under process conditions of a head pressure of 4 PSI, table and head speed of 25rpm, a oscillation distance of 40 mm, and a slurry flow rate of 40 ml/min. Also 0.18 ${\mu}m\;SiO_2$ via-line patterns are fabricated using 1000 ${\mu}C/cm^2$ dose, 6 minute and 30 second development time and 1 minute and 30 second etching time. And finally sub-0.2 ${\mu}$ twolevel metal interconnects using the developed processes were fabricated and the problems of multilevel interconnects are discussed.

• The Korean Journal of Ceramics
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• v.6 no.1
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• pp.27-31
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• 2000

A series experiments were performed to evaluate mechanical behavior of non-oxide boride type ceramics formed on the AISI 1040 plain carbon steel. Boronizing was performed in a slurry salt bath consisting of borax, boric acid, and ferro-silicon at $950^{\circ}C$ for 2-6h. The AISI 1040 steel used as substrate material was containing 0.4%C, 0.13%Si, 0.65%Mn, 0.02%P, 0.014%S. The presence of non-oxide boride type ceramics $Fe_2B $ and FeB formed on the surface of steel was confirmed by metallographic technique and X-ray diffraction (XRD) analysis. The hardness of borides measured via Vickers indenter with a load of 2N reached a microhardness of up to 1800 DPN. The hardness of unborided steel was 185 DPN. The fracture toughness of borides measured by means of Vickers indenter with a load of 10N was about 2.30 MPa.$m^{1/2}$. The thickness of boride layers ranged from 72$\mu\textrm{m}$ to 145$\mu\textrm{m}$. Boride layers have a columnar morphology.

• Journal of the Korea Concrete Institute
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• v.21 no.5
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• pp.557-563
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• 2009

This study is on the properties of inorganic porous calcium silicate material made from silica powder through the autoclaving curing, the results of this study should be utilized fundamental data for the development of noise reduction porous solid material using siliceous byproduct generated by various manufacture process. For the manufacture of autoclave curing specimen, various calcareous materials used and siliceous materials used silica powder. In this study, properties in density and compressive strength according to the change of W/B and C/S ratio, microscopy for the shape of pore, SEM and XRD for the examination of hydrate after autoclave curing are carried out respectively. The test results shown that the more slurry density decrease, the more W/B increase at the fresh state, this tendency shown similar to in hardened state. Among the specimens of C/S ratio, the compressive strength of C/S ratio of 0.85 gave the highest the compressive strength. In the results of XRD, tobermorite generated by autoclaving curing was created all of specimens regardless of C/S ratio. To ascertain pore structure, we compared with existing porous calcium silicate product(ALC, organic sound absorbing porous material). The results of microscope observation, pore structure of specimen of this study was similar to that of existing inorganic sound absorbing foam concrete. therefore, we could conformed a possibility of sound absorbing porous solid material on the basis of the results.

• Journal of the Korean Ceramic Society
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• v.48 no.2
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• pp.168-172
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• 2011

Alumina powder was added in a general porcelain (Backja) with clay, feldspar and quartz contents to promote the mullite ($3Al_2O_3{\cdot}2SiO_2$) generation in the porcelain. Low melting materials ($B_2O_3(450^{\circ}C)$, $MnO_3(940^{\circ}C)$, CuO($1080^{\circ}C$)) were doped at ~3 wt% to modify the sinterability of porcelain with a high alumina contents and promote the mullite generation. Green body was made by slip casting method with blended slurry and then, they were fired at $1280^{\circ}C$ for 1hr by a $2^{\circ}C/min$. Densifications of samples with high alumina contents (20~30 wt%) were impeded. As the doping contents of low melting materilas increased, the sinterability of samples was improved. The shrinkage rate and bulk density of samples were improved by doping with low melting materials. Mullite phase increased with increasing the low melting contents in the phase analyses. This means lots of alumina and quartz were transformed into mullite phase by low melting contents doping. In the results, high bending strength of samples with high alumina contents was accomplished by improving the densification and mullite generation in the porcelain.

• Journal of Energy Engineering
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• v.6 no.1
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• pp.96-103
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• 1997

Coal gasification experiments were performed to characterize the bench scaled unit of 0.5∼1.0 T/D entrained coal gasifier developed by KIER. Datong coal from China was selected for this study. The system was operated at the temperature range of 1300∼1550$^{\circ}C$, with 62.5% of coal water mixture on the basis of dry coal. Oxygen and slurry mixture were preheated prior to feeding into burner and the ratio of oxygen/coal was in the range of 0.8∼1.2. In the preparation of coal water mixture, 0.3 wt% of CWM1002 and 0.05 wt% of NaOH wire added to reduce viscosity as well as to enhance theological properties of slurry. The resultant gaseous products consist primarily of hydrogen, carbon monoxide, carbon dioxide, and minor amounts of methane. Formation of H$_2$and CO was increased, while CO$_2$was decreased as the reacting temperature being increased due to the char-CO$_2$reaction. Maximum production of H$_2$and CO occurred in the O$_2$/coal ratio of 0.9 at 1530$^{\circ}C$. Heating values of product gases were in the range of 1700∼2400 kcal/N㎥.

• Resources Recycling
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• v.15 no.3 s.71
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• pp.20-29
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• 2006

This study was carried out for to recover the purified crystalline gypsum from phosphogypsum by means of using it's crystallographical Properties. The dehydration of hydrated phosphogypsum to $\alpha$-hemihydrate is completed with the 2 hours treatment of it in $99^{\circ}C$ waterrs. The purified crystalline gypsum having the maximum size of $200{\mu}m$ was obtained by 325# wet screening after recrystallization of the $\alpha$-hemihydrate gypsum at the condition of $Na_2SO_4$ 10 wt%, slurry density 20%, $pH\;5{\sim}6,\;65^{\circ}C$ and 4hr. In this process, the yield of gypsum was 93.9% and its grade was 99%.

• Korean Journal of Materials Research
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• v.12 no.4
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• pp.269-273
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• 2002

The NASICON solid electrolyte films, $Na_{1+x}Zr_2Si_xP_{3-x}O_{12}$(1.5< x < 2.3), was prepared from ceramic slurry by modified doctor-blade process. The NASICON solid electrolyte and fabricated sensors, Pt-electrode/NASICON/Carbonate$(Na_2CO_3-K_2CO_3CaCO_3\; system)$ electrode, were investigated to measure phase, microstructure and e.m.f variation for sensing $CO_2$ concentration. The uniform grain size of $2-4{\mu}m$ and major phase of sodium zirconium silicon phosphate phase, $Na_{1+x}Zr_2Si_xP_{3-x}O_{12}$was identified with X-ray diffraction patterns and scanning electron microscopy, respectively. The Nernst's slope of 84 mV/decade for $CO_2$ concentration from 500 to 8000 ppm was obtained at operating temperature of $400^{\circ}C$.

• Korean Journal of Food Science and Technology
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• v.11 no.3
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• pp.192-199
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• 1979

With cells of Streptomyces spp K-45 isolated from soil, the immobilization of glucose isomerase by a series of treatments ; heat, carefully manipulated drying, extrusion with a thickening agent, and glutaraldehyde-induced crosslinking, was presented. This was aimed to obtain a mechanically stable form of whole cell containing glucose isomerase. The resulted pellet form had a good mechanical strength, compared with a commercial product, and showed 26 % of the activity recovery. The specific activity was 48.1 units per g of the dry material. The immobilized glucose isomerase generally showed properties similar to those of the soluble enzyme ; optimal pH at $7.5{\sim}9.0$, optimal temperature at $80{\sim}85^{\circ}C$, activation energy of 10.9 kcal/mole, and $K_m$ for glucose of 10.9M. The immobilized enzyme was very thermostable and pH stable.

• Corrosion Science and Technology
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• v.21 no.5
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• pp.418-421
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• 2022

Stir-accelerated corrosion test of a high chromium cast iron was attempted in 0.1 mol dm^-3 H₂SO₄ + 0.05 mol dm^-3 HCl + 10 wt% SiC solution for 48 h at room temperature or at 45 ℃. The high chromium cast iron was composed of 2.8 wt% C and 27 wt% Cr and balanced with Fe. The high chromium cast iron was positioned into a 500 mL beaker with stirring of the solution at 1050 rpm using a magnetic hot plate. The corrosion rate was increased by agitating the solution. In addition, the corroded depth of the high chromium cast iron surface was increased by agitating the solution. The surface morphology of the high chromium cast iron after the stir-accelerated corrosion test revealed that a dendritic austenite phase partially remained in the corroded region after agitating the solution, indicating that solution movement during agitating could accelerate the corrosion rate of the high chromium cast iron.

• Journal of the Mineralogical Society of Korea
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• v.20 no.1 s.51
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• pp.1-6
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• 2007

Hectorite was synthesized by a two-step hydrothermal process from $Mg(OH)_{2}$, water glass (${\sim}30\;wt%\;SiO_{2}$) and Li-compound at $90{\pm}5^{\circ}C$. The product shows excellent dispersion and swelling properties. The mixture of the starting materials was heated in a glass vessel for the first reaction with continuous stirring and the pH of the solution was adjusted to $6{\sim}8$, resulting in the formation of a precursor of hectorite. The excess salt components were washed out from the resulting slurry and then was matured in the glass vessel for the 2nd reaction. Li compound was added during the reaction. After a 10 h retention, the gel of hectorite was formed. The XRD pattern of the synthesized one was coincided with that of natural hectorite and SEM study revealed uniform grains 50 m in diameter. The d001 basal spacing of the product moved from 12 to $17.4\;{\AA}$ after glycolation treatment. The measured value of CEC and the swelling capacity was 90 cmol/kg and $60{\sim}70\;mL/2\;g$, respectively.