• Journal of the Korean Crystal Growth and Crystal Technology
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• v.13 no.1
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• pp.36-40
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• 2003

The diamond-like nanocomposite (DLN) thin films were deposited on Si substrates using $CH_4/(C_2H_5O)_4Si/H_2$/Ar gas mixtures as source gases by the plasma enhanced chemical vapor deposition (PECVD). The chemical structure and microstructure of grown films were investigated and their tribological properties were evaluated by a ball-on-plate type tribometer. The deposited DLN films mainly consisted of diamond-like a-C:H and quartz-like a-Si:O networks. The DLN films had a good agreement with tribological coating applications due to their extremely low friction coefficients and low wear rates.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.9 no.7
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• pp.1491-1496
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• 2005

We fabricated the $Pb_{0.72}La_{0.28}TiO_3$ (PLT(28)) thin film successfully by using the sol-gel method and characterized it to evaluate its potential for being utilized as the capacitor dielectrics of ULSI DRAMs. In our sol-gel process, the acetates were used as the starting materials. Through the TGA-DTA analysis, we established the excellent fabrication conditions of the sol-gel method for the PLT(28) thin film. We obtained the dense and crack-free PLT(28) thin film of $100\%$ perovskite phase by drying at $350^{\circ}C$ after each coating and final annealing at $650^{\circ}C$. Electrical properties of PLT(28) thin film were measured through formation on the $Pt/Ti/SiO_2/Si$ substrate and its dielectric constant and leakage current density were measured as 936 and $1.1{\mu}A/cm^2$, respectively.

• Journal of the Korean Chemical Society
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• v.50 no.3
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• pp.243-246
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• 2006

The LiCoO2 thin films were prepared on the Pt/Ti/SiO2/Si substrate by spin coating using citrate sol. The citrate sol was spin-coated on substrate and dried at 380oC for 15 min. to evaporate the solvents and remove the organic materials. The as-deposited films were annealed at 750oC for 10 min. in air for crystallization. The X-ray diffraction patterns for the film have been indexed hexagonal system with space group R3m. The active area of LiCoO2 films for electrochemical test was about 11cm2. A Li foil and 1M LiClO4 in propylene carbonate(PC) and ethylene carbonate(EC) (1:1)were used as an anode and an electrolyte, respectively. The galvanostatic charge-discharge test was carried out at constant current density ranging from 5 A/cm2 in the voltage window between 4.2 and 3.0 V. The first discharge capacity of the film is 0.35Ah/cm2-m. The cycling behavior of the LiCoO2 film is also reported.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• v.9 no.2
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• pp.865-868
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• 2005

We fabricated the $Pb_{0.72}La_{0.28}TiO_3 (PLT(28))$ thin film successfully by using the sol-gel method and characterized it to evaluate its potential for being utilized as the capacitor dielectrics of ULSI DRAMs. In our sol-gel process, the acetates were used as the starting materials. Through the TGA-DTA analysis, we established the excellent fabrication conditions of the sol-gel method for the PLT(28) thin film. We obtained the dense and crack-free PLT(28) thin film of 100% perovskite phase by drying at 350$^{\circ}C$ after each coating and final annealing at 650$^{\circ}C$. Electrical properties of PLT(28) thin film were measured through formation on the Pt/Ti/SiO$_2$/Si substrate and its dielectric constant and leakage current density were measured as 936 and 1.1${\mu}$A/cm$^2$, respectively

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.11a
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• pp.36.2-36.2
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• 2009

Low dielectric materials have been great attention in the semiconductor industry to develop high performance interlayer dielectrics with low k for Cu interconnect technology. In our study, the dielectric properties of SiOC /SiO2 thin film derived from polyphenylcarbosilane were investigated as a potential interlayer dielectrics for Cu interconnect technology. Polyphenylcarbosilane was synthesized from thermal rearrangement of polymethylphenylsilane around $350^{\circ}C{\sim}430^{\circ}C$. Characterization of synthesized polyphenylcarbosilane was performed with 29Si, 13C, 1H NMR, FT-IR, TG, XRD, GPC and GC analysis. From FT-IR data, the band at 1035 cm-1 is very strong and assigned to CH2 bending vibration in Si-CH2-Si group, indicating the formation of the polyphenylcarbosilane. Number average of molecular weight (Mn) of the polyphenylcarbosilane synthesized at $400^{\circ}C$ for 6hwas 2, 500 and is easily soluble in organic solvent. SiOC/SiO2 thin film was fabricated on ton-type silicon wafer by spin coating using 30wt % polyphenylcarbosilane incyclohexane. Curing of the film was performed in the air up to $400^{\circ}C$ for 2h. The thickness of the film is ranged from $1{\mu}m$ to $1.7{\mu}m$. The dielectric constant was determined from the capacitance data obtained from metal/polyphenylcarbosilane/conductive Si MIM capacitors and show a dielectric constant as low as 2.5 without added porosity. The SiOC /SiO2 thin film derived from polyphenylcarbosilane shows promising application as an interlayer dielectrics for Cu interconnect technology.

• Korean Chemical Engineering Research
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• v.60 no.3
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• pp.439-445
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• 2022

In this study, Silicon and petroleum pitch were coated on the surface of Si/C fiber manufactured using electrospinning to improve the electrochemical performances. SiO₂/PAN fiber was prepared by electrospinning with TEOS and PAN at various ratios dissolved in DMF. The characteristics of carbonization, reduction, and pitch coating processes were investigated for the optimal process of the pitch coated Si/C fiber anode composite. Anode composite prepared with TEOS/PAN = 4/6 (CR-46) after carbonization and reduction process has a capacity of 657 mAh/g. To improve capacity and stability, Si powder and PFO pitch were coated at the surface of CR-46. When the pitch composition was fixed at 10 wt%, it was found that the capacity increased as the weight ratio of silicon increased, but the stability decreased. The pitch coated Si/C fiber composite with 10 wt% silicon has high capacity of 982.4 mAh/g and capacity retention of 86.1%. In the test to evaluate rate performance, the rate capability was 80.2% (5C/0.1C).

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.10
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• pp.665-670
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• 2016

Prevailing dissemination of machine tools and cutting technology have caused drastic developments of high speed dry machining with work materials of high hardness, and demands on the high-hardness-materials with high efficiency have become increasingly important in terms of productivity, cost reduction, as well as environment-friendly issue. Addition of Si to TiAlN has been known to form nano-composite coating with higher hardness of over 30 GPa and oxidation temperature over $1,000^{\circ}C$. However, it is not easy to add Si to TiAlN by using conventional PVD technologies. Therefore, Ti-Al-Si-N have been prepared by hybrid process of PVD with multiple target sources or PVD combined with PECVD of Si source gas. In this study, a single composite target of Ti-Al-Si was prepared by powder metallurgy of MA (mechanical alloying) and SPS (spark plasma sintering). Properties of he resulting alloying targets were examined. They revealed a microstructure with micro-sized grain of about $1{\sim}5{\mu}m$, and all the elements were distributed homogeneously in the alloying target. Hardness of the Ti-Al-Si-N target was about 1,127 Hv. Thin films of Ti-Al-Si-N were prepared by unbalanced magnetron sputtering method by using the home-made Ti-Al-Si alloying target. Composition of the resulting thin film of Ti-Al-Si-N was almost the same with that of the target. The thin film of Ti-Al-Si-N showed a hardness of 35 GPa and friction coefficient of 0.66.

• Korean Journal of Materials Research
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• v.24 no.9
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• pp.474-480
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• 2014

Process conditions for the impregnation of polycarbosilane preceramic polymer into SiC-based composites were investigated. Two kinds of preceramic polymer (PCP) was impregnated into SiC-fiber fabrics with different solvents of n-hexane and divinylbenzene (DVB). Both microstructural observations and mechanical tests were conducted to evaluate the impregnation. The matrix phases were particulated in the case of hexane solvents. Apparent relative density of the matrix was about 78.8%. The density of matrix was increased to about 96.1-98.8% when the DVB was used; however, brittle fracture was observed during a bending test. The modulus of toughness was less than $0.74J/m^3$. The fabric impregnated with a mixed PCP-dissolved solution showed intermediate characteristics with relative high density of filling (apparent density of ~96.1%) as well as proper bending behavior. The modulus of toughness was increased to about $5.31J/m^3$. The composites developed by changing the precursor and solvent suggested the possibility of fabricating SiCf/SiC composites without a fiber to matrix interphase coating.

• Journal of the Korean Ceramic Society
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• v.47 no.5
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• pp.381-386
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• 2010

Some basic properties of inorganic coatings hardened by the room temperature reaction with alkalies were examined. The coating paste was prepared from the powders in the system $Al_2O_3-SiO_2$-CaO using blast furnace slag, fly ash and amorphous ceramic fiber after mixing with a solution of sodium hydroxide and water glass. The mineralogical and morphological examinations were performed for the coatings prepared at room temperature and after heating to $1200^{\circ}C$ respectively. The binding force of the coating hardened at room temperature was caused by the formation of fairly dense matrix mainly composed of oyelite-containing amorphous phase formed by the reaction between blast furnace slag and alkali solution. At the temperature, fly ash and ceramic fiber was not reacted but imbedded in the binding phase, giving the fluidity to the paste and reinforcing the coating respectively. During heating up to $1200^{\circ}C$, instead of a break in the coating, anorthite and gehlenite was crystallized out by the reaction among the binding phase and unreacted components in ternary system. The crystallization of these minerals revealed to be a reason that the coating maintains dense morphology after heating. The maintenance of binding force after heat treatment is seemed to be also caused by the formation of welldispersed fiber-like mineral phase which is originated from the shape of the amorphous ceramic fiber used as a raw materials.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1997.10a
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• pp.183-190
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• 1997

The wear behaviors of $Al_2O_3-40%TiO_2$ deposited on casting aluminum alloy(ASTM A356) by plasma spray against SiC ball have been investigated experimentally. Friction and wear tests are carried out at room temperature. The friction coefficient of $Al_2O_3-40%TiO_2$ coating is lower than that of pure $Al_2O_3$ coating(APS). It is found that low friction correspond to low wear and high friction to high wear in the experimental result. The thickness of $Al_2O_3-40%TiO_2$ coatings indicated the existence of the optimal coating thickness. It is found that a voids and porosities of coating surface result in the crack generated. As the tensile stresses in coating increased with the increased friction coefficient. The columnar grain of coating will be fractured to achieve the critical stress. It is found that the cohesive of splats and the porosity of surface play a role in wear characteristics. It is suggested that the mismatch of thermal expansion of substrate and coating play an important role in wear performance. Tensile and compressire under thermo-mechanical stress may be occurred by the mismatch between thermal expansion of substrate and coating. This crack propagation above interface is observed in SEM.