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Characteristics of diamond-like nanocomposite films grown by plasma enhanced chemical vapor deposition  

양원재 (한양대학교 세라믹공정연구센터)
오근호 (한양대학교 세라믹공정연구센터)
Publication Information
Journal of the Korean Crystal Growth and Crystal Technology / v.13, no.1, 2003 , pp. 36-40 More about this Journal
Abstract
The diamond-like nanocomposite (DLN) thin films were deposited on Si substrates using $CH_4/(C_2H_5O)_4Si/H_2$/Ar gas mixtures as source gases by the plasma enhanced chemical vapor deposition (PECVD). The chemical structure and microstructure of grown films were investigated and their tribological properties were evaluated by a ball-on-plate type tribometer. The deposited DLN films mainly consisted of diamond-like a-C:H and quartz-like a-Si:O networks. The DLN films had a good agreement with tribological coating applications due to their extremely low friction coefficients and low wear rates.
Keywords
Diamond-like nanocomposite; PECVD; Chemical structure; Friction coefficient;
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  • Reference
1 Raman Spectrum of Graphite /
[ F. Tuinstra;J.L. Koenig ] / J. Chem. Phys.   DOI
2 Tribological Characteristics of DLC Films and Euplex Plasma Nitriding/DLC Coating Treatments /
[ E.I. Meletis;A. Erdemir;G.R. Fenske ] / Surf. Coat. Technol.   DOI   ScienceOn
3 Thermal Stability of Diamond-like Carbon Films with Added Silicon /
[ W.-J. Wu;M.-H. Hon ] / Surf. Coat. Technol.   DOI
4 Diamond-like carbon /
[ J. Robertson ] / Pure & Appl. Chem.   DOI   ScienceOn
5 Use of Raman Scattering to investigate Disorder and Crystallite Formation in As-deposited and Annealed Carbon Films /
[ R.O. Dillon;J.A. Woollam ] / Phys. Rev.
6 Modeling Studies of Amorphous Carbon /
[ D. Beeman;J. Silverman;R.Lynds;M.R. Anderson ] / Phys. Rev.
7 Thermal Annealing Study of Carbon Films Formed by the Plasma Decomposition of Hydrocarbons /
[ M.P. Nadler;T.M. Donovan;A.K. Green ] / Thin Soild Films   DOI
8 Electrical and Atomic Structure of Amorphous Carbon /
[ J. Robertson;E.P. O'Reilly ] / Phys. Rev.
9 Mechanical Properties of Ti-containing and W-containing Diamond-like Carbon Coatings /
[ W.J. Meng;B.A. Gillispie ] / J. Appl. Phys.   DOI   ScienceOn
10 Characterization of Ion-beam-deposited Diamond-like Carbon Films /
[ V. Palshin;E.I. Meletis;.S. Ves;S. Logothetidis ] / Thin Soild Films   DOI
11 Effects of Substrate Temprature on Chemical Structure of Amorphous Carbon Films /
[ N.H. Cho;D.K. Veirs;J.W. Ager Ⅲ;M.D. Rubin;C.B. Hopper;D.B. Bogy ] / J. Appl. Phys.   DOI
12 Mechanical Properties of a-C : H/SiOx Nanocmposite Thin Films Prepared by Ion-assisted Plasma-enhanced Chemical Vapor Deposition /
[ J.H. Lee;D.S. Kim;Y.H. Lee;B. Farouk ] / Thin Soild Films   DOI
13 Amorphous Nitrogenated Carbon Films: Structural Modifications Induced by Thermal Annealing /
[ F.L. Freire;C.A. Achete;G. Mariotto;R. Canteri ] / J. Vac. Sci. Tehcnol.
14 Influence of Silicon on the Physical Properties of Diamond-like Films /
[ F. Demichelis;C.F. Pirri;A. Tagliaferro ] / Mater. Sci. Eng.
15 Tribological Properties of Diamond-like Nanocomposite Coatings at High Temperature /
[ C. Venkattaman;C. Brodbeck;R. Lei ] / Suft. Coat. Technol.   DOI   ScienceOn
16 Diamond-like Nanocomposited (DLN) /
[ V.F. Dorfman ] / Thin Soild Films   DOI