• Title/Summary/Keyword: Si(111)

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Dry etching properties of PZT thin films in $BCl_3/N_2$ plasma ($BCl_3/N_2$ 유도결합 플라즈마로 식각된 PZT 박막의 식각 특성)

  • Koo, Seong-Mo;Kim, Kyoung-Tae;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.183-186
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    • 2004
  • The dry etch behavior of PZT thin films was investigated in $BCl_3/N_2$ plasma. The experiments were carried out with measuring etch rates and selectivities of PZT to $SiO_2$ as a function of gas concentration and input rf power, chamber pressure. The maximum etch rate was 126 nm/min when 30% $N_2$ was added to $BCl_3$ chemistry. Also, as input rf power increases, the etch rate of PZT thin films was increased. Langmuir probe measurement showed the noticeable influence of $BCl_3/N_2$ mixing ratio on electron temperature and electron density as input rf power increased. The variation of Cl radical density as plasma parameters changed was examined by Optical Emission Spectroscopy (OES) analysis. According to X-ray diffraction (XRD) analysis, PZT thin films were damaged in plasma and an increase in (100), (200) and (111) phases showed the improvement in structure of the PZT thin films after the $O_2$ annealing process.

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The Effect of Substrate Surface Roughness on In-Situ Intrinsic Stress Behavior in Cu Thin Films (기판 표면 조도에 따른 구리박막의 실시간 고유응력 거동)

  • Cho, Moohyun;Hwang, Seulgi;Ryu, Sang;Kim, Youngman
    • Korean Journal of Metals and Materials
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    • v.47 no.8
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    • pp.466-473
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    • 2009
  • Our group previously observed the intrinsic stress evolution of Cu thin films during deposition by changing the deposition rate. Intrinsic stress of Cu thin films, which show Volmer-Weber growth, is reported to display three unique stress stages, initial compressive, broad tensile, and incremental compressive stress. The mechanisms of the initial compressive stress and incremental compressive stages remain subjects of debate, despite intensive research inquiries. The tensile stress stage may be related to volume contraction through grain growth and coalescence to reduce over-accumulate Cu adatoms on the film surface. The in-situ intrinsic stresses behavior in Cu thin films was investigated in the present study using a multi-beam curvature measurement system attached to a thermal evaporation device. The effect of substrate surface roughness was monitored by observed the in-situ intrinsic stress behavior in Cu thin films during deposition, using $100{\mu}m$ thick Si(111) wafer substrates with three different levels of surface roughness.

The effects of hydrogen treatment on the properties of Si-doped Ga0.45In0.55P/Ge structures for triple junction solar cells

  • Lee, Sang-Su;Yang, Chang-Jae;Ha, Seung-Gyu;Kim, Chang-Ju;Sin, Geon-Uk;O, Se-Ung;Park, Jin-Seop;Park, Won-Gyu;Choe, Won-Jun;Yun, Ui-Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.143-144
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    • 2010
  • 3-5족 화합물 반도체를 이용한 집광형 삼중 접합 태양전지는 40% 이상의 광변환 효율로 많은 주목을 받고 있다[1]. 삼중 접합 태양전지의 하부 셀은 기계적 강도가 높고 장파장을 흡수할 수 있는 Ge이 사용된다. Ge위에 성장될 III-V족 단결정막으로서 Ge과 격자상수가 일치하는 GaInP나 GaAs가 적합하고, 성장 중 V족 원소의 열확산으로 인해 Ge과 pn접합을 형성하게 된다. 이때 GaInP의 P의 경우 GaAs의 As보다 확산계수가 낮아 태양전지 변환효율향상에 유리한 얇은 접합 형성이 가능하고, 표면 에칭효과가 적기 때문에 GaInP를 단결정막으로 선택하여 p-type Ge기판 위 성장으로 단일접합 Ge구조 제작이 가능하다. 하지만 이종접합 구조 성장으로 인해 발생한 계면사이의 전위나 미세결함들이 결정막내부에 존재하게 되며 이러한 결함들은 광학소자 응용 시 비발광 센터로 작용할 뿐 아니라 소자의 누설전류를 증가시키는 원인으로 작용하여 태양전지 변환효율을 감소시키게 된다. 이에 결함감소를 통해 소자의 전기적 특성을 향상시키고자 수소 열처리나 플라즈마 공정을 통해 수소 원자를 박막내부로 확산시키고, 계면이나 박막 내 결함들과 결합시킴으로서 결함들의 비활성화를 유도하는 연구가 많이 진행되어 왔다 [2][3]. 하지만, 격자불일치를 갖는 GaInP/Ge 구조에 대한 수소 열처리 및 불순물 준위의 거동에 대한 연구는 많이 진행되어 있지 않다. 따라서 본 연구에서는 Ga0.45In0.55P/Ge구조에 수소 열처리 공정을 적용을 통하여 단결정막 내부 및 계면에서의 결함밀도를 제어하고 이를 통해 태양 전지의 변환효율을 향상시키고자 한다. <111> 방향으로 $6^{\circ}C$기울어진 p-type Ge(100) 기판 위에 유기금속화학증착법 (MOCVD)을 통해 Si이 도핑된 200 nm의 n-type GaInP층을 성장하여 Ge과 단일접합 n-p 구조를 제작하였다. 제작된 GaInP/Ge구조를 furnace에서 250도에서 90~150분간 시간변화를 주어 수소열처리 공정을 진행하였다. 저온 photoluminescence를 통해 GaInP층의 광학적 특성 변화를 관찰한 결과, 1.872 eV에서 free-exciton peak과 1.761 eV에서 Si 도펀트 saturation에 의해 발생된 D-A (Donor to Acceptor)천이로 판단되는 peak을 검출할 수 있었다. 수소 열처리 시간이 증가함에 따라 free-exciton peak 세기 증가와 반가폭 감소를 확인하였고, D-A peak이 사라지는 것을 관찰할 수 있었다. 이러한 결과는 수소 열처리에 따른 단결정막 내부의 수소원자들이 얕은 불순물(shallow impurity) 들로 작용하는 도펀트들이나, 깊은 준위결함(deep level defect)으로 작용하는 계면근처의 전위, 미세결함들과의 결합으로 결함 비활성화를 야기해 발광세기와 결정질 향상효과를 보인 것으로 판단된다. 본 발표에서는 상술한 결과를 바탕으로 한 수소 열처리를 통한 박막 및 계면에서의 결함준위의 거동에 대한 광분석 결과가 논의될 것이다.

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Issues on a Large-scale Enlargement of Urban Area and their Implications for a Management Plan (도시관리계획에 의한 대규모 도시지역 확장의 실태와 시사점)

  • Yoon, Jeong-Joong;Kim, Ryoon-Hee;Choi, Sang-Hee
    • Land and Housing Review
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    • v.1 no.1
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    • pp.103-111
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    • 2010
  • The purpose of the paper is to research issues and implications on a large-scale enlargement of urban area in city management plan. This study investigated laws and regulations in force and carried out case study for three cities such as Yangju-si, Gimpo-si, Whaseong-si. As a result of analysis, three points at issue were abstracted and improvement ideas for each of them were suggested as follows. First, to set up adequate size of urban area, it is necessary to consider resonable planning for population, spatial structure, zone of life and land use in city comprehensive plan and city management plan. Second, to decrease arguments about scope and bounds of urban area, it is important to make general and specific guidelines to set up them. Third, to manage new urban area and its surroundings efficiently, it is necessary to subdivide zoning of non-urban area strictly, to restraint individual location of factories or cattle sheds, to make a proper infrastructure plan in advance, to administer strongly the permission of development behavior and to control strictly consecutive and joining development in non-urban area.

Influence of Fine Aggregate Properties on Unhardened Geopolymer Concrete (잔골재 특성이 굳지 않은 지오폴리머 콘크리트에 미치는 영향)

  • Cho, Young-Hoon;An, Eung-Mo;Lee, Su-Jeong;Chon, Chul-Min;Kim, Dong-Jin
    • Journal of the Korean Recycled Construction Resources Institute
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    • v.4 no.2
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    • pp.101-111
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    • 2016
  • It is possible that aggregates add on to geopolymer based fly ash to mix mortar and concrete like cement. This is necessary to evaluate mineral composition, particle shape, surface, size distribution, density and absorption ratio for fine aggregates due to few detailed research to examine influence of fine aggregates properties on unhardened geopolymer concrete. In this research, used two different fine aggregates, Jumunjin sand(having quartz, mica, feldspar, pyroxene in mineral composition, more than 96% of total size between -0.60 and +0.30mm, angular shape and rough surface) and ISO sand(having almost all quartz in mineral composition, more than 51% size between -1.40 and +0.60mm, simultaneously varied size distribution, spherical shape and smooth surface). After an experimental result of the varied ratio of Si/Al=1.0-4.1 geopolymer paste, mix proportion respectively applied Si/Al=1.5 having the highest compressive strength to mortar and Si/Al=3.5 having the highest consistency to concrete. Geopolymer mortar by mixing with Jumunjin and ISO sand in varied range of 20-50wt.% showed flow size increase between 69.5 and 112.0mm, between 70.5 and 126.0mm respectively. Geopolymer concrete at an addition of 77wt.% of total aggregates ratio showed that average compressive strength was 32MPa and the consistency was favorable to molding. Since ISO sand observing varied size distribution, spherical shape, smooth surface, low absorption ratio resulted in advantageous properties on consistency of geopolymer, geopolymer concrete can be suitable for using the fine aggregates similar to ISO sand.

Validation on the Utilization of Small-scale Unmanned Aerial Systems(sUAS) for Topographic Volume Calculations (토공량 산정을 위한 소형무인항공시스템의 활용성 평가)

  • Lee, Yong-Chang
    • Journal of Cadastre & Land InformatiX
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    • v.47 no.1
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    • pp.111-126
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    • 2017
  • Small-scale UAS(Fusion technique of Unmanned Aerial Vehicles platform and Sensors, 'sUAS') opens various new applications in construction fields and so becoming progressively common due to the considerable potentials in terms of accuracy, costs and abilities. The purpose of this study is that the investigation of the validation on the utilization of sUAS for earth stockpile volume calculations on sites. For this, generate 3D models(DSM) with sUAS aerial images on an cone shaped soil stockpile approximately $270m{\times}300m{\times}20m$, which located at Baegot Life Park in Siheung-si, compared stockpile volume estimates produced by sUAS image analysis, against volume estimates obtained by GNSS Network-RTK ground surveying method which selected as the criteria of earth stockpile volume. The result through comparison and examination show(demonstrate) that there was under 2% difference between the volume calculated with the GNSS Network RTK data and the sUAV data, especially sUAS imaged-based volume estimate of a stockpile can be greatly simplified, done quickly, and very cost effective over conventional terrestrial survey methods. Therefore, with consideration of various plan to assess the height of vegetation, sUAS image-based application expected very useful both volume estimate and 3D geospatial information extraction in small and medium-sized sites.

Crystal Structure of a Methanol Sorption Complex of Dehydrated Partially Cobalt(Ⅱ)-Exchanged Zeolite A (부분적으로 Co(Ⅱ) 이온으로 치환한 제올라이트 A를 탈수한 후 메탄올을 흡착한 결정구조)

  • Jang, Se Bok;Han, Yeong Uk;Kim, Yang
    • Journal of the Korean Chemical Society
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    • v.38 no.5
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    • pp.339-344
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    • 1994
  • The crystal structure of a methanol sorption complex of dehydrated partially Co(II)-exchanged zeolite A, $Co_4Na_4-A{\cdot}6.5CH_3OH$ (a = 12.169(1) $\AA)$, has been determined by single-crystal X-ray diffraction techniques in the cubic space group Pm$\bar3$m at $21(1)^{\circ}C. $Co_4Na_4$-A was dehydrated at $360^{\circ}C\;and\;2{\times}10^{-6}$ torr for 2 days, followed by exposure to about 104 torr of methanol vapor at $22(1)^{\circ}C$ for 1 hr. The structure was refined to final error indices, $R_1$ = 0.061 and $R_2$ = 0.060 with 147 reflections, for which I > $3\sigma(I).$ In this structure, four $Co^{2+}$ ions and 1.5 $Na^+$ ions per unit cell lie at 6-ring positions: the $Na^+$ ions are recessed 0.44 $\AA$ into the sodalite unit and the Co(II) ions extend ca. 0.55 $\AA$ into the large cavity. 2.5 $Na^+$ ions lie in an 8-oxygen ring plane. The 6.5 methanol molecules are sorbed per unit cell. The 6.5 methanol oxygens, all in the large cavity, associate with the 4 $Co^{2+}$ ions and 2.5 $Na^+$ ions.

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AHP-based Decision Model for Safety Improvement Projects for Hazardous Section of Urban Roadways (AHP 의사결정 기법을 통한 도시부 위험도로 구조개선 사업의 교통사고 저감대책 선호도 분석 -부산광역시를 중심으로-)

  • Um, Jung-An;Lee, Si-Bok;Lim, Chang-Sik
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.32 no.2D
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    • pp.111-119
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    • 2012
  • In this study, the effect of safety improvement project was analyzed, and a decision making model for traffic accident reduction measures was suggested. The results of this study are as follow; First the overall number of traffic accidents and casualties were reduced, especially reduced the number of unauthorized crossing and centerline encroachments was remarkable. Second, the priorities of traffic accident reduction measures. through hazards roadway section improvement projects were determined. As, higher level evaluation items of AHP hierachy structure include civil facilities and transportation facilities. The civil facilities has 6 lower level evaluation items and transportation facilities has 4 items. The results of this study, It was revealed that traffic experts prefer civil facilities more than transportation facilities and the top 2 items of the each data (or index) took over 50%. In addition, one of the last evaluation contents through the verification, the top 3 items of civil facilities took 55.38%. The project according to the improvement projects for hazards roadway reduced traffic accidents and casualties as well as saving the cost. So these results should be available for basic information for the countermeasure about reducing the traffic accidents by local governments.

A Study on Characteristics of an Integrated Urea-SCR Catalytic Filter System for Simultaneous Reduction of Soot and NOX Emissions in ECU Common-rail Diesel Engines (ECU 커먼레일 디젤기관에 있어서 매연 및 NOX 배출물 동시 저감용 일체형 요소-SCR 촉매필터 시스템의 특성에 관한 연구)

  • Bae, Myung-Whan
    • Transactions of the Korean Society of Automotive Engineers
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    • v.22 no.4
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    • pp.111-120
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    • 2014
  • The aim of this study is to develop an integrated urea-SCR catalytic filter system for reducing soot and $NO_X$ emissions simultaneously in diesel engines. In this study, the characteristics of exhaust emissions relative to reactive activation temperature under four kinds of engine loads are experimentally investigated by using a four-cycle, four-cylinder, direct injection type, water-cooled turbo intercooler ECU common-rail diesel engine with the integrated urea-SCR $MnO_2-V_2O_5-WO_3/TiO_2/SiC$ catalytic filter system operating at three kinds of engine speeds. The urea-SCR reactor is used to reduce $NO_X$ emissions, and the catalytic filter system is used to reduce soot emissions. The reactive activation temperature is very important for reacting a reducing agent with exhaust emissions. The reactive activation temperatures in this experiment is applied to 523, 573 and 623 K. The fuel is sprayed by the pilot and main injections at the variable injection timing between BTDC $15^{\circ}$ and ATDC $1^{\circ}$ according to experimental conditions. It is found that the $NO_X$ conversion rate is the highest as 83.9% at the reactive activation temperature of 523 K in all experimental conditions of engine speed and load, and the soot emissions shown by the average reduction rate of approximately 93.3% are almost decreased below 0.6% in all experimental conditions regardless of reactive activation temperatures. Also, the THC and CO emissions by oxidation reaction of Mn, V and Ti are shown in the average reduction rates of 70.3% and 38% regardless of all experimental conditions.

Experimental Study on the Explosion and Fire Risks of Mobile Phone Batteries (휴대폰 배터리의 폭발 및 화재 위험성에 관한 실험적 연구)

  • Lee, Ho-Sung;Kim, Si-Kuk
    • Fire Science and Engineering
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    • v.30 no.4
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    • pp.111-120
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    • 2016
  • This is an experimental study to analyze the explosion and fire hazards of mobile phone batteries. Using the lithium-ion batteries currently used on smart phone as the experiment samples, the experiments were conducted by overcharging, internal and external short circuit, and thermal shock with the potential of explosion and fire caused by careless use or abnormal conditions. The experiment results showed that, in the case of overcharging and external short circuit, there was no explosion and fire hazard in the normal operation of the protection circuit module (PCM), but there were big risks when the PCM faulted conditions were assumed. In the case of the experiments by internal short circuit and thermal shock, such risks varied depending on a battery charge state. In other words, it could be verified that there were low risks of explosion and fire in a full discharge state, but there were high risks in a full charge state. These experiment results suggest that to minimize the explosion and fire hazards of mobile phone batteries, an alarm device is necessary when the PCM fault occurs. In addition, a solid battery case should be made and safety equipment, such as a cooling device to avoid high temperature, is needed.