• Bulletin of the Korean Chemical Society
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• 제30권12호
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• pp.3137-3140
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• 2009

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.3168-3172
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• 2007

As the minimum feature size decreases, control of contamination by nanoparticles is getting more attention in semiconductor process. Cleaning technology which removes nanoparticles is essential to increase yield. A reference wafer on which particles with known size and number are deposited is needed to evaluate the cleaning process. We simulated particle trajectories in the chamber by using FLUENT and designed a particle deposition system which consists of scanning mobility particle sizer (SMPS) and deposition chamber. Charged monodisperse particles are generated using SMPS and deposited on the wafer by electrostatic force. The experimental results agreed with the simulation results well in terms of particle number and deposition area according to particle size, flow rate and deposition voltage.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2004년도 춘계학술대회 발표 논문집
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• pp.207-212
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• 2004

4 ～ 20 nm 범위의 입자들이 갖는 전기적 특성을 이용하기 위하여 이들 입자를 300mm 웨이퍼 위에 균일하게 증착시키는 기술을 개발하고자 하였다. 이를 위하여 나노 임자의 증착 장비 개발에 필요한 증착 장비내 유동장 해석 및 온도 구배장 해석을 수행하였다. 증착 장비 입구의유량이 3 1pm, 4 nm인 경우, 입자의 확산력만을 고려하였을 때, 대부분의 입자들은 웨이퍼 표면이 아닌 벽면으로의 부착이 98% 정도 일어났다. 그러나 입자의 열영동 및 전기영동을 고려한 경우, 100% 웨이퍼 표면에 증착되는 것을 알 수 있었다. 따라서 입자의 확산력 이외의 외력(열영동, 전기영동)을 이용하면 웨이퍼 표면에의 증착 효율을 상승시킬 수 있을 것으로 판단된다.

• 반도체디스플레이기술학회지
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• 제12권3호
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• pp.1-6
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• 2013

In many technical fields including electronics and display manufacturing processes, properties of coating liquids could be greatly enhanced by adding nanopowders and it requires efficient mixing techniques to achieve uniform dispersion of nanoparticles in liquids. This paper presents the three-dimensional CFD simulations on the flowfields of a highly viscous liquid in the large scale industrial mixer of impeller type. The effects of several important design and operation parameters such as impeller geometry, rotational speed, and degree of liquid viscosity are investigated to appreciate the mixing performance by examining the computational results for flow pattern of rotationally stirred liquid of high viscosity in the mixer.

• 반도체디스플레이기술학회지
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• 제20권4호
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• pp.1-5
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• 2021

Field-effect transistors based on solution-processed metal oxide semiconductors has attracted huge attention due to their intrinsic characteristics of optical and electrical characteristics with benefits of simple and low-cost process. Especially, spray-pyrolysis has shown excellent device performance which compatible to vacuum-processed Field-effect transistors. However, the high annealing temperature for crystallization of MOS and narrow range of precursors has impeded the progress of the technology. Here, we demonstrated the nc-ZnO/ZnO films performed by spray-pyrolysis with incorporating ZnO nanoparticles into typical ZnO precursor. The films exhibit preserving morphological properties of poly-crystalline ZnO and enhanced electrical characteristics with potential for low-temperature processability. The influence of nanoparticles within the film was also researched for realizing ZnO films providing good quality of performance.

• Advances in nano research
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• 제16권4호
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• pp.325-340
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• 2024

There are several novel uses for dispersing many nanoparticles into a conventional fluid, including dynamic sealing, damping, heat dissipation, microfluidics, and more. Therefore, melting heat and mass transfer characteristics of a 3-D MHD Hybrid Nanofluid flow over a rotating disc with presenting dufour and soret effects are assessed numerically in this study. In this instance, we investigated both ferric sulfate and molybdenum disulfide as nanoparticles suspended within base fluid water. The governing partial differential equations are transformed into linked higher-order non-linear ordinary differential equations by the local similarity transformation. The collection of these deduced equations is then resolved using a Chebyshev spectral collocation-based algorithm built into the Mathematica software. To demonstrate how different instances of hybrid/ nanofluid are impacted by changes in temperature, velocity, and the distribution of nanoparticle concentration, examples of graphical and numerical data are given. For many values of the material parameters, the computational findings are shown. Simulations conducted for different physical parameters in the model show that adding hybrid nanoparticle to the fluid mixture increases heat transfer in comparison to simple nanofluids. It has been identified that hybrid nanoparticles, as opposed to single-type nanoparticles, need to be taken into consideration to create an effective thermal system. Furthermore, porosity lowers the velocities of simple and hybrid nanofluids in both cases. Additionally, results show that the drag force from skin friction causes the nanoparticle fluid to travel more slowly than the hybrid nanoparticle fluid. The findings also demonstrate that suction factors like magnetic and porosity parameters, as well as nanoparticles, raise the skin friction coefficient. Furthermore, It indicates that the outcomes from different flow scenarios correlate and are in strong agreement with the findings from the published literature. Bar chart depictions are altered by changes in flow rates. Moreover, the results confirm doctors' views to prescribe hybrid nanoparticle and particle nanoparticle contents for achalasia patients and also those who suffer from esophageal stricture and tumors. The results of this study can also be applied to the energy generated by the melting disc surface, which has a variety of industrial uses. These include, but are not limited to, the preparation of semiconductor materials, the solidification of magma, the melting of permafrost, and the refreezing of frozen land.

• 한국분말재료학회지
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• 제19권3호
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• pp.177-181
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• 2012

Copper composite materials have attracted wide attention for energy applications. Especially $CuInS_2$ has a desirable direct band gap of 1.5 eV, which is well matched with the solar spectrum. $CuInS_2$ nanoparticles could make it possible to develop color-tunable $CuInS_2$ nanoparticle emitter in the near-infrared region (NIR) for energy application and bio imaging sensors. In this paper, $CuInS_2$ nanoparticles were successfully synthesized by thermo-decomposition methods. Surface modification of $CuInS_2$ nanoparticles were carried out with various semiconductor materials (CdS, ZnS) for enhanced optical properties. Surface modification and silica coating of hydrophobic nanoparticles could be dispersed in polar solvent for potential applications. Their optical properties were characterized by UV-vis spectroscopy and photoluminescence spectroscopy (PL). The structures of silica coated $CuInS_2$ were observed by transmission electron microscopy (TEM).

• 융복합기술연구소 논문집
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• 제3권1호
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• pp.51-54
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• 2013

Cadmium telluride(CdTe) nanowires were successfully synthesized from individual nanoparticles via self-assembly and the evolutionary process was investigated. The oxidation of tellurium ions on CdTe nanoparticles resulted in the organization of individual nanoparticle into twisted-nanoribbons. The nanoparticles self-assembled to twisted ribbons under light while nanoparticles under dark transformed to straight nanowires made of several layers of individual nanoparticles. The images of nanoribbons were analysed based on transmission electron microscopy and scanning electron microscopy. The photoluminescence was blue-shifted from 555 to 545nm.

• JSTS:Journal of Semiconductor Technology and Science
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• 제6권2호
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• pp.101-105
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• 2006

Nanoscale floating-gate characteristic of colloidal Au nanoparticles electrostatically assembled on the oxidized surface of Si nanowires have been investigated. The Si nanowire split-gate transistor structure was fabricated by electron beam lithography and subsequent reactive ion etching. Colloidal Au nanoparticles with ${\sim}5$ nm diameters were selectively deposited onto the Si nanowire surface by 2 min electrophoresis. It was found that electric fields applied to the self-aligned split side gates allowed charge to be transferred on the Au nanoparticles. It was observed that the depletion mode cutoff voltage, induced by the self-aligned side gates, was shifted by more than 1 V after Au nanoparticle electrophoresis. This may be due to the semi-one dimensional nature of the narrow Si nanowire transport channel, having much enhanced sensitivity to charges on the surface.

• 한국전자통신학회논문지
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• 제4권4호
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• pp.301-305
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• 2009

Pt 나노입자의 합성과 이를 이용한 hybrid Pt-$SiO_2$ 나노입자의 합성을 성공적으로 수행하였으며, self-assembled Pt nanoparticles monolayer를 charge trapping layer로 활용하는 metal-oxide-semiconductor(MOS) type memory의 한 예로 non-volatile memory(NVM)의 응용을 보임으로써 나노입자의 활용 가능성을 보이고, 또한, hybrid Pt-$SiO_2$ 나노입자 박막 층의 제어를 통한 MOS type memory device에의 보다 더 넓은 활용 가능성을 보이고자 하였다.