• Title/Summary/Keyword: Semiconductor $CO_2$ gas sensor

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Analysis Method of Volatile Sulfur Compounds Utilizing Separation Column and Metal Oxide Semiconductor Gas Sensor

  • Han-Soo Kim;Inho Kim;Eun Duck Park;Sang-Do Han
    • Journal of Sensor Science and Technology
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    • v.33 no.3
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    • pp.125-133
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    • 2024
  • Gas chromatography (GC) separation technology and metal oxide semiconductor (MOS) gas sensors have been integrated for the effective analysis of volatile sulfur compounds (VSCs) such as H2S, CH3SH, (CH3)2S, and (CH3)2S2. The separation and detection characteristics of the GC/MOS system using diluted standard gases were investigated for the qualitative and quantitative analysis of VSCs. The typical concentrations of the standard gases were 0.1, 0.5, 1.0, 5.0, and 10.0 ppm. The GC/MOS system successfully separated H2S, CH3SH, (CH3)2S, and (CH3)2S2 using a celite-filled column. The reproducibility of the retention time measurements was at a 3% relative standard deviation level, and the correlation coefficient (R2) for the VSC concentration was greater than 0.99. In addition, the chromatograms of single and mixed gases were almost identical.

On the $SnO_2$ Semiconductor Gas Sensor ($SnO_2$ 소결체 반도체 Gas Sensor에 관한 연구)

  • 박순자;이재열
    • Journal of the Korean Ceramic Society
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    • v.20 no.2
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    • pp.93-98
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    • 1983
  • The sensitivity characteristics of $SnO_2$-based gas sensor prepared by sintering method have been studied at the presence of CO and Propane gas. Samples mixed with 1wt% $La_2O_3$ and 1wt% $PdCl_2$ showed highest sensitivity to CO and propane gas at 250$^{\circ}$C but the addition of $CeO_2$ did not enhance the sensitivity. For slectivity for gas a $SnO_2-La_2O_3$ (1wt%) sample without $PdCl_2$ showed better results. A sample sintered sintered at 115$0^{\circ}C$ has shown the optimum condition in sensitivity and electroding

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Xylene Sensor Using Cr-doped Cr-Co3O4 Nanoparticles Prepared by Flame Spray Pyrolysis (화염 분무 열분해법으로 합성된 Cr-Co3O4 나노입자 자일렌 가스센서)

  • Jeong, Seong-Yong;Jo, Young-Moo;Kang, Yun Chan;Lee, Jong-Heun
    • Journal of Sensor Science and Technology
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    • v.29 no.2
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    • pp.112-117
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    • 2020
  • Xylene is a hazardous volatile organic compound that should be precisely measured to monitor indoor air quality. However, the selective and sensitive detection of ppm-level xylene using oxide-semiconductor gas sensors remains a challenge. In this study, pure and Cr-doped Co3O4 nanoparticles (NPs) were prepared using flame spray pyrolysis, and their gas-sensing characteristics to 5-ppm xylene at 250 ℃ were investigated. The 4 at% Cr-doped Co3O4 NPs exhibited a high gas response to 5-ppm xylene (resistance ratio to gas and air = 39.1) and negligible cross-responses to other representative and ubiquitous indoor pollutants such as ethanol, benzene, formaldehyde, carbon monoxide, and ammonia. In this paper, the enhancement of the gas response and selectivity of Co3O4 NPs to xylene by Cr doping was discussed in relation to the catalytic promotion of the gas-sensing reaction. This sensor can be used to monitor indoor xylene.

Highly Sensitive and Selective Trimethylamine Sensor Using Yolk-shell Structured Mo-doped Co3O4 Spheres

  • Kim, Tae-Hyung;Kim, Ki Beom;Lee, Jong-Heun
    • Journal of Sensor Science and Technology
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    • v.28 no.5
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    • pp.271-276
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    • 2019
  • Pure and 0.5, 1, 2, 5, and 10 at% of Mo-doped $Co_3O_4$ yolk-shell spheres were synthesized by ultrasonic spray pyrolysis of droplets containing Co nitrate, ammonium molybdate, and sucrose and their gas sensing characteristics to 5 ppm trimethylamine (TMA), ethanol, p-xylene, toluene, ammonia, carbon monoxide, and benzene were measured at $225-325^{\circ}C$. The sensor using pure $Co_3O_4$ yolk-shell spheres showed the highest response to p-xylene and very low response to TMA at $250^{\circ}C$, while the doping of Mo into $Co_3O_4$ tended to increase the overall responses of gas sensors. In particular, the sensor using 5 at% Mo-doped $Co_3O_4$ yolk-shell spheres exhibited the high response to TMA with low cross-responses to other interfering gases. The high response and selectivity of Mo-doped $Co_3O_4$ yolk-shell spheres to TMA are attributed to the electronic sensitization by higher valent Mo doping and acid-base interaction between TMA and Mo components.

Fabrication of Optical Sheet for LED Lighting with Integrated Environment Monitoring Sensors (환경모니터링 센서가 집적된 LED 조명용 광학시트 제작)

  • Choi, Yong Joon;Lee, Young Tae
    • Journal of the Semiconductor & Display Technology
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    • v.12 no.3
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    • pp.35-39
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    • 2013
  • In this paper, we developed an optical sheet for LED lighting with integrated $CO_2$ gas and temperature sensor which can monitor at the indoor environment. The optical sheet for LED lighting is fabricated through PMMA(Polymethyl methacrylate) injection process using mold. This research enables to fabricate the reflective sheet, light-guide plate and the prism sheet in a optical sheet. The fabricated sheet demonstrates higher intensity of optical efficiency compared with single-sided sheets. The $CO_2$ sensor was fabricated using NDIR(NON-Dispersive Infrared) method and it has $0.0235mV/V{\cdot}PPM$ sensitivity. The temperature sensor was fabricated using RTD(Resistance temperature detector) method and it has $0.563{\Omega}/^{\circ}C $sensitivity.

Identification of Gas Mixture with the MEMS Sensor Arrays by a Pattern Recognition

  • Bum-Joon Kim;Jung-Sik Kim
    • Korean Journal of Materials Research
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    • v.34 no.5
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    • pp.235-241
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    • 2024
  • Gas identification techniques using pattern recognition methods were developed from four micro-electronic gas sensors for noxious gas mixture analysis. The target gases for the air quality monitoring inside vehicles were two exhaust gases, carbon monoxide (CO) and nitrogen oxides (NOx), and two odor gases, ammonia (NH3) and formaldehyde (HCHO). Four MEMS gas sensors with sensing materials of Pd-SnO2 for CO, In2O3 for NOX, Ru-WO3 for NH3, and hybridized SnO2-ZnO material for HCHO were fabricated. In six binary mixed gas systems with oxidizing and reducing gases, the gas sensing behaviors and the sensor responses of these methods were examined for the discrimination of gas species. The gas sensitivity data was extracted and their patterns were determined using principal component analysis (PCA) techniques. The PCA plot results showed good separation among the mixed gas systems, suggesting that the gas mixture tests for noxious gases and their mixtures could be well classified and discriminated changes.

Encapsulation of Semiconductor Gas Sensors with Gas Barrier Films for USN Application

  • Lee, Hyung-Kun;Yang, Woo Seok;Choi, Nak-Jin;Moon, Seung Eon
    • ETRI Journal
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    • v.34 no.5
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    • pp.713-718
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    • 2012
  • Sensor nodes in ubiquitous sensor networks require autonomous replacement of deteriorated gas sensors with reserved sensors, which has led us to develop an encapsulation technique to avoid poisoning the reserved sensors and an autonomous activation technique to replace a deteriorated sensor with a reserved sensor. Encapsulations of $In_2O_3$ nanoparticles with poly(ethylene-co-vinyl alcohol) (EVOH) or polyvinylidene difluoride (PVDF) as gas barrier layers are reported. The EVOH or PVDF films are used for an encapsulation of $In_2O_3$ as a sensing material and are effective in blocking $In_2O_3$ from contacting formaldehyde (HCHO) gas. The activation process of $In_2O_3$ by removing the EVOH through heating is effective. However, the thermal decomposition of the PVDF affects the property of the $In_2O_3$ in terms of the gas reactivity. The response of the sensor to HCHO gas after removing the EVOH is 26%, which is not significantly different with the response of 28% in a reference sample that was not treated at all. We believe that the selection of gas barrier materials for the encapsulation and activation of $In_2O_3$ should be considered because of the ill effect the byproduct of thermal decomposition has on the sensing materials and other thermal properties of the barrier materials.

Catalytic combustion type hydrogen micro gas sensor using thin film heater and nano crystalline SnO2 (나노 결정 SnO2와 백금 박막히터를 이용한 접촉연소식 마이크로 가스센서의 감응특성 연구)

  • Han, Sang-Do;Hong, Dae-Ung;Han, Chi-Hwan;Chun, Il-Soo
    • Journal of Sensor Science and Technology
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    • v.17 no.3
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    • pp.178-182
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    • 2008
  • Planar type micro catalytic combustible gas sensor was developed by using nano crystalline $SnO_2$ Pt thin film as micro heater was deposited by thermal evaporation method on the alumina substrate. The thickness of the Pt heater was around 160 nm. The sensor showed high reliability with prominent selectivity against various gases(Co, $C_3H_8,\;CH_4$) at low operating temperature($156^{\circ}C$). The sensor with nano crystalline $SnO_2$ showed higher sensitivity than that without nano crystalline $SnO_2$. This can be explained by more active adsorption and oxidation of hydrogen by nano crystalline $SnO_2$ particles. The present planar-type catalytic combustible hydrogen sensor with nano crystalline $SnO_2$ is a good candidate for detection of hydrogen leaks.

A development of neural-network based gas recognition system using sensor array (센서 어레이를 이용한 신경망 기반의 가스 인식 시스템 개발)

  • 김영진;정종혁;강상욱;조영창
    • Proceedings of the Korea Society for Industrial Systems Conference
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    • 2002.06a
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    • pp.356-360
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    • 2002
  • Polluting the air with such pollutants as CO, H₂S and SO₂, industrial development huts increased the danger of gas toxication. Futhermore, as the: living standard goes higher, the consumption of explosive hydrocarbonic gases such as butane(C₄H/sub 10/) or propane(C₃H/sub 8/) has been soaring, which results in the danger of a gas explosion. As measures to cope with such dangers, the development of highly sensitive gas sensors, gas detectors adopting gas-sensing technologies, and gas recognition systems are urgently required. The objective of the present research is to develop a gas recognition system that is capable of identifying specific types of selected gases by formulating a semiconductor-typed gas sensor array, which not only improves the selectivity of semiconductor-typed gas sensors but also minimizes the erect of drifts on a single sensor signal, and applying the input pattern data of gases detected by the array to a neural network.

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Fabrication and Evaluation of the SnO2 Based Gas Sensor for CO and NOx Detection (SnO2를 이용한 CO 및 NOx 가스 감지 센서 제작 및 특성 연구)

  • Kim, Man Jae;Lee, Yu-Jin;Ahn, Hyo-Jin;Lee, Sang Hoon
    • Transactions of the Korean Society of Automotive Engineers
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    • v.23 no.5
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    • pp.515-523
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    • 2015
  • In this paper, we fabricated and evaluated the gas sensor for the detection of CO gas and $NO_X$ gas among the vehicle exhaust emission gasses. The $SnO_2$ (tin dioxide) layer is used as the detection material, and the thin-film type and the nano-fiber type layers are deposited with various thicknesses using sputtering method and electro spinning method, respectively. The experiments are performed in the chamber where the gas concentration is controlled with mass flow controller. The fabricated devices are applied to the CO and $NO_X$ gas, where the device with the thinner $SnO_2$ layer shows better sensitivity. The nano-fiber has the larger surface area, and the shorter response time and recovery time are obtained. From the experimental results, both types of gas sensors successfully detect CO and $NO_X$ gases, which can be applied to measure those gases from the vehicle emissions.