• 전기화학회지
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• 제9권2호
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• pp.84-88
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• 2006

본 연구에서는 주사탐침현미경을 이용한 Si 표면의 국부 산화피막 형성에 있어서, 탐침이 움직이면서 생기는 $SiO_2$의 일차원적인 선의 높이가 탐침 전위, deflection setpoint, 탐침 속도에 의해 어떻게 영향을 받는지 고찰해 보았다. -3 V 보다 작은 탐침 전위에서는 국부 산화피막 형성이 관찰되지 않았으며 -3 V 보다 큰 탐침 전위에서는, 탐침 속도가 $1{\mu}m/s$일 때, 1 V씩 증가함에 따라 0.47nm의 비율로 선의 높이가 높아졌다. Deflection setpoint는 탐침이 가하는 기계적인 힘의 표지가 되는데, $12\sim18nN$ 정도의 힘이 가해지지 않으면 국부 산화피막 형성이 관찰되지 않았다. 그 이상의 힘이 가해져야 국부 산화피막 형성이 관찰되는데 이때 선의 높이는 기계적인 힘과 무관하였다. 탐침 속도가 빨라짐에 따라 선의 높이는 낮아졌으나, 탐침 전위가 -5V인 경우, 0.7nm 이하로 낮아지지는 않았다.

• 한국생산제조학회지
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• 제21권5호
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• pp.708-713
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• 2012

The indented geometry for rockwell hardness indenter has been configured by using Confocal Laser Scanning Microscopy (CLSM). For this purpose, the CLSM can be well suited to construct the three-dimensional indented volume from the indented surface by rockwell hardness tester. Furthermore, the height data of HEI(height encoded image) by CLSM must be acquired at first and converted to indented surface later. And the indented surface patterns enable us to predict the indenter shape and volume. This volume can be used to study the rockwell hardness model as a volume parameter. As a result, the technique performed in this study by combining the CLSM with compensation technique is an excellent one to obtain the geometries of indented surfaces over a wide range of surface resolution in a micro scale. And it can be used for micro volume calculation.

• 한국정밀공학회지
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• 제23권7호
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• pp.138-145
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• 2006

A nanopatterning technique was proposed and demonstrated for low cost and mass productive process using the scanning probe lithography (SPL) and soft lithography. The nanometer scale structure is fabricated by the localized generation of oxide patterning on the H-passivated (100) silicon wafer, and soft lithography was performed to replicate of nanometer scale structures. Both height and width of the silicon oxidation is linear with the applied voltagein SPL, but the growth of width is more sensitive than that of height. The structure below 100 nm was fabricated using HF treatment. To overcome the structure height limitation, aqueous KOH orientation-dependent etching was performed on the H-passivated (100) silicon wafer. Soft lithography is also performed for the master replication process. Elastomeric stamp is fabricated by the replica molding technique with ultrasonic vibration. We showed that the elastomeric stamp with the depth of 60 nm and the width of 428 nm was acquired using the original master by SPL process.

• 한국레이저가공학회지
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• 제1권1호
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• pp.24-29
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• 1998

A new wide laser beam optical system for the laser materials processing has been developed with a polygonal mirror. It consists of polygonal mirror and cooling part that prevents the surface of rotating polygonal mirror from damage by heat. The polygonal minors have been designed and made as 24 and 30 facets in pyramid type. This system provides a uniform linear laser heat source with the surface scanning width from 15 to 50mm according to the scanning height To examine the wide laser beam, He-Ne laser is used. Also, Acryl is used to confirm the laser beam pattern by bum-pattern print To analyze the energy distribution of the wide laser ben empirical values and theoretical values are compared and discussed. To improve the efficiency of the wide laser beam optical system, methods are suggested by the optical theories. For larger area processing like turbine blade, drawing blade, cold roller and guide plate, optimal overlapping locations have been calculated and analyzed by geometric and optical theories.

• 한국정보통신학회논문지
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• 제13권11호
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• pp.2260-2266
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• 2009

본 논문에서는 플랜지된 평행평판도파관으로 급전된 슬릿과 이에 평행하고 근접하는 도체 스트립과의 전자기적인 결합문제를 단순화된 근접주사현미 경의 관점에서 연구하였다. 슬릿의 등가어드미턴스, 슬릿근처 도파관 내부 및 외부의 무효전력, TEM파 전압반사계수의 크기 및 위상 등의 변화결과로부터 플랜지된 평행평판도파관의 특성을 조사하였다. 제안된 구조의 근접주사현미경으로서의 성능을 다양한 구조적인 파라미터들(도파관 높이, 슬릿의 폭, 스트립의 폭, 슬릿과 스트립 간격, 슬릿 폭과 도파관 높이의 비)이 TEM파 전압반사계수의 크기와 위상에 미치는 영향을 관찰하여 점검하였다. 슬릿으로부터 스트립의 변위에 따른 전압반사계수의 변화결과로부터 도파관의 높이가 작을 때 보다 높은 주사해상도를 얻을 수 있음과 반사계수의 크기 변화에 비해 위상변화가 훨씬 민감함을 확인하였다.

• 한국측량학회:학술대회논문집
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• 한국측량학회 2010년 춘계학술발표회 논문집
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• pp.207-208
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• 2010

In this paper, we carried out calibration of laser scanning MMS(Mobile Mapping System) using Lynx Mobile Mapper, a new MMS developed at Optech Incorporated. Laser scanning MMS could be defined as an integration of several subsystems. Subsystems are composed of laser scanner, gps receiver and antenna, INS(Inertial Navigation System), DMI(Distance Measurement Instrument). These are obtained 3D spatial information by direct-georeferencing technology. To obtain 3D spatial information, calibration of laser scanning MMS is required prior to operation system, it is similar to airborme lidar system. 145 checkpoints were used to accuracy estimation. The accuracy results are about 5cm(RMSE) for calibration in all directions(east, north, ellipsoidal height).

• 대한원격탐사학회:학술대회논문집
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• 대한원격탐사학회 2004년도 Proceedings of ISRS 2004
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• pp.633-636
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• 2004

Airborne laser scanning thechnology has been studied in many applications, DSM(Digital Surface Model) development, building extraction, 3D virtual city modeling. In this paper, we will evaluate the possibility of airborne laser scanning technology for transportation application, especially for recognizing moving vehicles on road. First, we initially segment the region of roads from all LiDAR DATA using the GIS map and intensity image. Secondly, the segmented region is divided into the roads and vehicles using the height threshold value of local based window. Finally, the vehicles will be classified into the several types of vehicles by MDC(Minimum Distance Classification) method using the vehicle's geometry information, height, length, width, etc

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.1060-1063
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• 2001

The mechanical etching technique has recently been developed to a powder blasting technique for various materials, capable of producing micro structures larger than 100$\mu$m. This paper describes the performance of powder blasting technique in micro-pocketing of stainless steel and the effect of the number of nozzle scanning and the nozzle height on the depth and width of pockets. Experimental results showed that increasing the no. of nozzle scanning and decreasing the nozzle height resulted in the increase of depth and width in pockets. Increase of width results from wear of mask film.

• 한국정밀공학회지
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• 제19권1호
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• pp.219-226
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• 2002

The mechanical etching technique has recently been developed to a powder blasting technique for various materials, capable of producing micro structures larger than 100$\mu$ m. This paper describes the performance of powder blasting technique in micro-pocketing of stainless steel and the effect of the number of nozzle scanning and the nozzle height on the depth and width of pockets. Experimental results showed that increasing the no. of nozzle scanning and decreasing the nozzle height resulted in the increase of depth and width in pockets. Increase of width results from wear of mask film.

• 한국도로학회:학술대회논문집
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• 한국도로학회 2006년도 학술발표회 논문집
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• pp.429-438
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• 2006