References
- Geppert, L., 'semiconductor lithography for the next millennium,' IEEE Spectrum, Vol. 33, pp. 33-38 1996 https://doi.org/10.1109/6.486632
- Mizuno, H., Sugihara, O., Kaino, T., Okamoto, N. and Hosino, M., 'Low-loss polymeric optical waveguides with large cores fabricated by hot embossing,' Optics Letters, Vol. 28, pp. 2378-2380, 2003 https://doi.org/10.1364/OL.28.002378
- Choi, S. J., Yoo, P. J., Baek, S. J., Kim, T. W. and Lee, H. H., 'An Ultraviolet-Curable Mold for Sub-100-nm,' J. Am. Chem. Soc., Vol. 126, pp. 7744-7745, 2004 https://doi.org/10.1021/ja048972k
- Garcia, R., Calleja, M. and Rohrer, H., 'Patterning of silicon surfaces with noncontact atomic force microscopy Field-induced formation of nanometer-size water bridges,' J. Appl. Phys., Vol. 86, pp. 1898-1903, 1999 https://doi.org/10.1063/1.370985
- Calleja, M. and Garcia, R., 'Nano-oxidation of silicon surfaces by noncontact atomic-force microscopy : Size dependence on voltage and pulse duration,' Appl. Phys. Lett., Vol. 76, pp. 3427-3429, 2000 https://doi.org/10.1063/1.126856
- Snow, E. S., Jernigan, G. G. and Campbell, P. M., 'The kinetics and mechanism of scanned probe oxidation of Si,' Appl. Phys. Lett., Vol. 76, pp. 1782-1784, 2000 https://doi.org/10.1063/1.126166
- Tsau, L., Wang, D. and Wang, K. L., 'Nanometer scale patterning of silicon (100) surfaces by an atomic force microscope operating in air,' Appl. Phys. Lett., Vol. 64, pp. 2133-2135, 1994 https://doi.org/10.1063/1.111707
- Chien, F. S. S., Chang, J. W., Lin, S. W., Chou, Y. C., Chen, T. T. and Gwo, S., 'Nanometer-scale conversion of Si3N4 to SiOx,' Appl. Phys. Lett., Vol. 76, pp. 360-362, 2000 https://doi.org/10.1063/1.125754
- Madou, M. J., 'Fundamentals of microfabrication,' CRC press, pp. 183-258, 2002
- Xia, M. and Whitesides, G. M., 'Soft lithography,' Annu. Rev. Mater. Sci., Vol. 28, pp. 153-184, 1998 https://doi.org/10.1146/annurev.matsci.28.1.153
- Narasimhan, J. and Papautsky, I., 'Polymer embossing tools for rapid prototyping of plastic microfluidic devices,' J. Micromech, Microeng., Vol. 14, pp. 96-103, 2004 https://doi.org/10.1088/0960-1317/14/1/013