• Korean Journal of Materials Research
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• v.26 no.9
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• pp.455-459
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• 2016

The deposition process for the gap-filling of sub-micrometer trenches using DMDMOS, $(CH_3)_2Si(OCH_3)_2$, and $C_xH_yO_z$ by flowable chemical vapor deposition (F-CVD) is presented. We obtained low-k films that possess superior gap-filling properties on trench patterns without voids or delamination. The newly developed technique for the gap-filling of submicrometer features will have a great impact on IMD and STI for the next generation of microelectronic devices. Moreover, this bottom up gap-fill mode is expected to be universal in other chemical vapor deposition systems.

• Transactions on Electrical and Electronic Materials
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• v.8 no.1
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• pp.1-4
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• 2007

This paper discusses two approaches for pre-polishing optimization of oxide chemical mechanical planarization (CMP) that can be used as alternatives to the commonly applied dummy structure insertion in shallow trench isolation (STI) and replacement gate (RG) technologies: reverse nitride masking (RNM) and oxide etchback (OEB). Wafers have been produced using each optimization technique and CMP tests have been performed. Dishing, erosion and global planarity have been investigated with the help of conductive atomic force microscopy (C-AFM). The results demonstrate the effectiveness of both techniques which yield excellent planarity without dummy structure related performance degradation due to capacitive coupling.

• The KSFM Journal of Fluid Machinery
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• v.17 no.6
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• pp.69-73
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• 2014

To predict flow fields and chemical agent dispersion in urban area, wind tunnel experiments was performed. The agent was adopted MS (methyl salicylate) because the real chemical agent is unsafe. The exact concentration of methyl salicylate was generated by the commercial gas generator (STI-2500) and three different obstacle shapes were applied (i.e., rectangular, cylinder and pyramid). The concentration was measured with the qualified ion mobility sensor and gas chromatography. The data necessary for virtual test method of the real chemical agent were obtained.

• Proceedings of the Korean Society for Bioinformatics Conference
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• 2004.11a
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• pp.203-209
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• 2004

Molecular docking using Lamarckian genetic algorithm of AutoDock 3.0 (AD3) was employed to understand in retrospect the selectivity of phenylaminopyrimidine (PAP) derivatives against the kinase domain c-Abl, implicated in chronic myelogenous leukemia (CML). The energetics of protein-ligand complex was scored using AD3 to identify active drug conformations while Ligplot and ligand protein contact (LPC) programs were used to probe schematic molecular recognition of the bound inhibitor to the protein. Results signify correlation between model and crystal structures of STI-571 compound or Imatinib (IM), a PAP derivative and now clinically proven for its efficacy in CML. A prospect active form Abl inhibitor scaffold from matlystatin class of compounds will be published elsewhere.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.04a
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• pp.551-556
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• 2008

Possibility of the remote eavesdropping through window glass is investigated using a laser sensor. Various thicknesses and types of glass windows are excited by maximum length sequency (MLS) signal and the vibration sound is detected by a laser doppler vibrometer. Intelligibility of the detected sound is evaluated using the speech transmission index (STI), which is based on the modulation transfer function (MTF). In order to identify the disturbing effect, different level of disturbing wave is generated by an outside speaker and a window shaker attached on the glass window. On the different thickness of glass windows, decrease effect of the speech intelligibility is analysed.

• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.5
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• pp.522-529
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• 2013

In this paper, simple but very effective techniques to suppress subthreshold hump effect for high-voltage (HV) complementary metal-oxide-semiconductor (CMOS) technology are presented. Two methods are proposed to suppress subthreshold hump effect using a simple layout modification approach. First, the uniform gate oxide method is based on the concept of an H-shaped gate layout design. Second, the gate work function control method is accomplished by local ion implantation. For our experiments, $0.18{\mu}m$ 20 V class HV CMOS technology is applied for HV MOSFETs fabrication. From the measurements, both proposed methods are very effective for elimination of the inverse narrow width effect (INWE) as well as the subthreshold hump.

• STI Policy Review
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• v.4 no.2
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• pp.1-18
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• 2013

As the value and role of intellectual property increases in our knowledge-based economy, countries around the world have exerted various efforts to secure, utilize, and protect their intellectual property. The present study diagnoses the level of IP infrastructure of major OECD countries and analyzes their characteristics and impact. According to the diagnosis, the US, Switzerland, and Germany form a leading group followed by the mid-level countries of Korea, Ireland, Australia, and France, with Spain and Italy in the bottom group. In contrast to Korea's competitiveness in S&T and R&D infrastructures, its competitiveness in IP infrastructure is lower than the OECD average. This is thought to be due to Korea's IP infrastructure being hastily formed under the influence of international pressures rather than having been gradually built up by internal needs. A TFP analysis of the impact of IP infrastructure on economic growth shows IP infrastructure positively influences economic growth. Though this analysis is limited due to inability to secure sufficient data and indicators, it is a useful guide for understanding the nature and key characteristics of IP infrastructure.

• STI Policy Review
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• v.1 no.3
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• pp.53-68
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• 2010

This paper empirically evaluates the effects of regional and industrial R&D on the performances of individual firms in two separated stages: (1) the stage of technological outcome from R&D and (2) the stage of economic outcome from technological outcome. Technological spillovers are separated from negative congestion effects through the stage-specific estimation. The firm-level Korean Innovation Survey data merit in coping with the endogeneity problem inherent in the estimation of spillovers. The estimation results show that: (1) there exist significant R&D spillovers both in regional and industrial dimensions, (2) the hypothesized technological spillovers and economic congestion effects are both in effect, and (3) firms with smaller individual R&D investments show greater spillovers.

• STI Policy Review
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• v.4 no.2
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• pp.136-158
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• 2013

This study identifies the structural determinants of the social acceptance of genetically modified (GM) foods across European countries. Toward this end, we suggest an integrated theoretical model to explain the social acceptance of GM foods by including both perception factors (perceived benefit, perceived risk, feelings, trust, and knowledge) and value factors (ethical concerns, science optimism, religiosity, and ideology). This model is then tested by analyzing survey data collected from 18,634 Europeans in 32 countries. The results indicate that first, not only perception factors but also value factors significantly contribute to explaining the acceptance of GM foods. Second, perceived benefits, perceived risk, feelings, and ethical concerns tend to be the four biggest determinants for acceptance. Third, this two-factor model could be generalized even with variation across countries. Finally, ethical concerns and scientific optimism play a moderating role between predictors and outcomes in the acceptance of GM foods.

• Journal of the Ergonomics Society of Korea
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• v.11 no.1
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• pp.67-79
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• 1992

Cardiac systolic time intervals (STLs) and Heather index (HI) were used to access changes in left ventricular function of six male subjects exposed to postural changes,$0^{\circ}C$, ${\pm}2^{\circ}C$, ${\pm}45^{\circ}C$, ${\pm}90^{\circ}C$, Significant prolongation of the pre-ejection period (PEP) and PEP/ LVET ratio, shortening of the left ventricular ejection time (LVET), STI, HI and $1/PEP^{2}$were observed during exposure to both $+45^{\circ}C $ and $+90^{\circ}C $But the values measured during $-45^{\circ}C $ and$-90^{\circ}C $ were reversed. Changes in fluid shift, filling volume, preload, after load and sympathetic activities may account for the observed findings. Early response of cardiac foctions was recorded using impedance cardiography. This method is very simple but accurate. Thus it will be useful in this aerospace and work physiology. In conclusion, STIs appear to provide reliable noninvasive method for examining changes of cardiac function during exposure to postural changes.