• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.194-197
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• 2004

This paper is to develop of 3D reverse engineering equipment. The existing equipment didn't use in the field popularly as it is too expensive. So in this study, we build the reverse engineering system of simple construction using a LM guide and a laser sensor. Therefore we measured product using this equipment, this result compared with the CAD date.

• Proceedings of the Korean Operations and Management Science Society Conference
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• 2001.10a
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• pp.298-301
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• 2001

In semiconductor manufacturing, wafer fabrication is the most complicated and important process, which is composed of several hundreds of process steps and several hundreds of machines involved. The productivity of the manufacturing mainly depends on how well they control balance of WIP flow to achieve maximal throughput under short manufacturing cycle time. In this paper mathematical formulation is suggested for the stepper scheduling, in which cycle time reduction and maximal production is achieved.

• Proceedings of the KIEE Conference
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• 2001.07b
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• pp.1194-1196
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• 2001

본 논문은 스테핑 모터의 구동 중에서 2상 여자모드와 마이크로 스테핑의 주기성이 동일함에 기초하여 32 스텝의 정현파 마이크의 스테핑을 실현하고 그 특성을 연구한 내용이다. 마이크로 스테핑은 스테핑 모터의 스텝각을 크게 세분화하여 구동함으로써 진동과 소음이 적고 부드럽게 구동하고자 하는 방법인데, 본 논문의 정현파 마이크로 스테핑은 종래의 마이크로 스테핑에 비하여 더욱 우수한 저진동 저소음 특성을 나타낸다.

• The Magazine of the IEIE
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• v.22 no.2
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• pp.37-50
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• 1995

This paper reviews NTT Laboratories' research and development of x-ray lithography during the last ten years since the application of synchrotron orbital radiation(SOR). First, the historical background of x-ray lithograhpy research, NTT's research programs on synchrotron x-ray lithography(SOR lithography), and the current status of NTT's SOR lithography system are overviewed. Then, the key elements of SOR lithography system are reviewed, including the electron storage ring, the x-ray stepper, and the x-ray mask. Finally the appilcation of SOR lithography technology to device fabrication is reported.

• ETRI Journal
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• v.11 no.4
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• pp.128-138
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• 1989

광을 이용한 축소투영 노광기술은 고 NA와 단파장화에 의하여 현재 $0.5\mum$의 패턴형성을 가능하게 하고 있으며, 향후 excimer laser를 이용한 stepper는 64M DRAM 제조를 위한 핵심 노광장비가 될 것이다. 본 논문에서는 광을 이용한 노광장비의 성능개선을 위하여 노광방식에 따라 장비를 분류하고 MTF, coherence 등 패턴형성에 있어서의 주요개념을 정리하였다. 그리고 광노광 장비의 성능변수인 해상도, 촛점심도, 노광영역 및 정렬에 영향을 미치는 요소를 분석한 후 그 성능에대한 개선방안을 도출하였다.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.340-344
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• 2004

This paper is the performance evaluation of reverse engineering system using simple mechanism. The existing equipment didn't use in the field popularly as it is too expensive. So we constructed the reverse engineering system of simple mechanism using the laser sensor, LM guide, micro step driver and control program. And we caught the Characteristics to measure some product. Finally we confirmed the precision to compare measured data and CAD date.

• Proceedings of the KIEE Conference
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• 1998.07a
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• pp.331-333
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• 1998

This paper deals with the analysis of the magnetic circuit of a claw pole type step motor. The air gap flux equation is derived using Thevenin equivalent circuit. On the base of the magnetic circuit analysis, both static torque and the dynamic torque characteristics are presented.

• Proceedings of the Optical Society of Korea Conference
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• 2008.07a
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• pp.133-134
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• 2008

• Proceedings of the Optical Society of Korea Conference
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• 2008.07a
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• pp.71-72
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• 2008

We review and report our analytical results in the technology front of optical industry in Japan as optical $recording^{1)}$, semiconductor $stepper^{2)}$, fiber communication, digital $camera^{4)}$ and $OCT^{5)}$ which are contributing to the improvement of people's higher quality of life and to the industrial economical growth from the aspects of the University, Industry and Government collaborations including international comparison to enhance the progress of sustainable global photonic innovation eco-systems. In the following part, some statistics of remarkable economical growth in east Asia and the global warming issue will be mentioned.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2013.05a
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• pp.531-533
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• 2013

In this paper, to study the IPMC (Ionic exchange Polymer Metal Composite) material consisting of a sulfonic acid ion and fluoride combination of carbon with Nafion film greatly affected the electro-active polymer (Electro Active Polymer) characteristics and the presence of water and cationshave properties. Use or electrical energy into mechanical energy, mechanical energy, electrical energy, and can be utilized to its characteristics, depending on the water and cations in water varies greatly. Configure the device simulations in order to study the electrical properties of these IPMC. Stepper Motor using MCU and simulator designed for the electrical characterization due to the movement and to the implementation of the mechanical movement of ocean currents. In this study, configuration the IPMC and simulation device to the area of the IPMC to the efficient use of energy currents, frequency, salinity concentration, through the efficient use of the IPMC due to the bend angle of the electrical analysis and research methods we propose.