• 제목/요약/키워드: SI technique

검색결과 1,431건 처리시간 0.027초

Rapid Thermal Annealing at the Temperature of 650℃ Ag Films on SiO2 Deposited STS Substrates

  • Kim, Moojin;Kim, Kyoung-Bo
    • Applied Science and Convergence Technology
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    • 제26권6호
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    • pp.208-213
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    • 2017
  • Flexible opto-electronic devices are developed on the insulating layer deposited stainless steel (STS) substrates. The silicon dioxide ($SiO_2$) material as the diffusion barrier of Fe and Cr atoms in addition to the electrical insulation between the electronic device and STS is processed using the plasma enhanced chemical vapor deposition method. Noble silver (Ag) films of approximately 100 nm thickness have been formed on $SiO_2$ deposited STS substrates by E-beam evaporation technique. The films then were annealed at $650^{\circ}C$ for 20 min using the rapid thermal annealing (RTA) technique. It was investigated the variation of the surface morphology due to the interaction between Ag films and $SiO_2$ layers after the RTA treatment. The results showed the movement of Si atoms in silver film from $SiO_2$. In addition, the structural investigation of Ag annealed at $650^{\circ}C$ indicated that the Ag film has the material property of p-type semiconductor and the bandgap of approximately 1 eV. Also, the films annealed at $650^{\circ}C$ showed reflection with sinusoidal oscillations due to optical interference of multiple reflections originated from films and substrate surfaces. Such changes can be attributed to both formation of $SiO_2$ on Ag film surface and agglomeration of silver film between particles due to annealing.

Line-Focus-Beam 초음파 현미경을 이용한 금속복합재료의 피로손상에 관한 연구 (Evaluation of Fatigue Damage of Metal Matrix Composite by LFB Acoustic Microscopy)

  • 이준현
    • 비파괴검사학회지
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    • 제13권2호
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    • pp.40-47
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    • 1993
  • 분말 야금법에 의해 제조된 SiC휘스커 강화 2124알루미늄 복합재료(SiCw/2124 Al)에 피로하중이 작용할 경우 복합재료의 계면에 있어서의 전위의 집적현상으로 인해 피로손상에 매우 민감하다. 그러나 이와같은 계면에 있어서의 전위의 집적현상으로 발생하는 피로미소균열의 검출 및 그 특성 평가에 대해서는 종래의 초음파 기술로서는 많은 문제점이 지적되고 있다. 본 논문은 SiC 휘스커 강화 알루미늄 복합재료에 있어서의 초기 피로손상을 평가하기 위하여 최근 새로운 비파괴 기법인 선집속 빔초음파 현미경의 적용 가능성에 대하여 연구하였다. 이를 위해 SiCw/2124 Al 복합재료 시험편에 대해 하중제어하에서 누설표면파와 누설유사표면파의 속도를 V(z)곡선으로 부터 FFT해석으로 구해 그 특성에 대하여 검토하였다. 또 주파수 5MHz에 대한 종래의 표면파 기법에 의하여 얻어진 결과와 고주파 초음파 현미경에 의하여 구해진 결과를 비교 검토 하였다.

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$Al_2O_3-SiC$ 나노복합체의 방전 플라즈마 소결 특성 및 기계적 물성 (Sintering behavior and mechanical properties of the $Al_2O_3-SiC$ nano-com-posite using a spark plasma sintering technique)

  • 채재홍;김경훈;심광보
    • 한국결정성장학회지
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    • 제13권6호
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    • pp.309-314
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    • 2003
  • 방전 플라즈마 소결법을 적용하여 $Al_2O_3$-SiC 나노 복합체를 150$0^{\circ}C$ 이하의 온도에서 완전치밀화를 이루었다. 제조된 $Al_2O_3$-SiC 복합체는 이상 결정립 성장 없이 매우 균질한 미세구조를 형성하고 있는데, 첨가된 SiC 입자는 주로 결정립 내 및 결정립계에 존재하면서 $Al_2O_3$기지상에서 결정립 성장을 억제하는데 매우 유호하였음을 확인 할 수 있다. 한편, SiC 입자의 첨가는 크랙 회절 및 브릿징 등에 의해서 유도된 재료 강도 및 인성 강화 기구에 의해서 $Al_2O_3$-SiC 복합체의 기계적 물성을 크게 향상시켰다.

하이브리드 증착 시스템에 의해 합성된 나노복합체 Ti-Al-Si-N 박막의 미세구조와 기계적 특성 (Microstructural and Mechanical Characterization of Nanocomposite Ti-Al-Si-N Films Prepared by a Hybrid Deposition System)

  • 박인욱;최성룡;김광호
    • 한국표면공학회지
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    • 제36권2호
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    • pp.109-115
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    • 2003
  • Quaternary Ti-Al-Si-N films were deposited on WC-Co substrates by a hybrid deposition system of arc ion plating (AIP) method for Ti-Al source and DC magnetron sputtering technique for Si incorporation. The synthesized Ti-Al-Si-N films were revealed to be composites of solid-solution (Ti, Al, Si)N crystallites and amorphous Si3N4 by instrumental analyses. The Si addition in Ti-Al-N films affected the refinement and uniform distribution of crystallites by percolation phenomenon of amorphous silicon nitride, similarly to Si effect in TiN film. As the Si content increased up to about 9 at.%, the hardness of Ti-Al-N film steeply increased from 30 GPa to about 50 GPa. The highest microhardness value (~50 GPa) was obtained from the Ti-Al-Si-N film haying the Si content of 9 at.%, the microstructure of which was characterized by a nanocomposite of nc-(Ti,Al,Si) N/a$-Si_3$$N_4$.

폴리머 Precursor를 이용한 in-situ 나노 복합체의 제조 : I. 질화규소 표면에서의 $SiO_2$ 피막형성에 따른 폴리머의 흡착거동 (Fabrication of in-situ Formed Namo-Composite Using Polymer Precursor : I. Adsorption Behavior of Polymer Followed $SiO_2$ Surface formation onto Silicon Nitride Surface)

  • 정연길;백운규
    • 한국세라믹학회지
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    • 제37권3호
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    • pp.280-287
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    • 2000
  • Adsorption behavior and amount of phenolic resin followed silica (SiO2) formation onto silicon nitride(Si3N4) surface were investigated using electrokinetic sonic amplitude (ESA) technique and with UV spectrometer, to fabricate Si3N4/SiC nano-composite based on reaction between SiO2 formed and phenolic resin absorbed onto Si3N4 particle. The amount of SiO2 formed and carbon from phenolic resin absorbed onto Si3N4 surface were calculated quantitatively to adjust the reaction between SiO2 and phenolic resin, resulting in no residual SiO2 and carbon. As a result, pre-heated tempeature for optimized reaction was below 25$0^{\circ}C$, in which there was no residual SiO2 and carbon.

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비파괴적 방법에 의한 입자 강화 복합재료의 부피분율 평가: 초음파법 (Nondestructive Determination of Reinforcement Volume Fractions in Particulate Composites : Ultrasonic Method)

  • 정현조
    • 비파괴검사학회지
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    • 제18권2호
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    • pp.103-111
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    • 1998
  • 입자 보강 복합재료의 부피분율을 평가하기 위한 초음파 비파괴 방법을 제시하였다. 제안된 방법은 복합재의 미시구조를 설명할 수 있는 이론 모델과 초음파의 속도 측정을 필요로 한다. 측정한 속도를 이론예측값과 같게 두면 미지의 입자 부피분율이 계산된다. Mori-Tanaka 방법에 기초한 탄성계수 해석 모델이 소개되어 있다. 이러한 접근 방법을 SiC 입자 보강 Al 기지 ($SiC_p/Al$) 복합재에 적용하였다. 이 방법으로 보강재의 부피분율을 비교적 정확하게 결정할 수 있었다. 또한 금속간 화합물이 부피분율 평가에 미치는 영향을 논하였다. 이 방법은 입자 보강 금속기지 복합재의 생산현장에서 복합재의 품질 평가를 위하여 적용될 수 있다.

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가시화를 이용한 가솔린 엔진의 실린더 벽면에서의 연료액막 거동 분석 (Investigation of the Liquid Fuel Film Behavior on the Cylinder Liner in an SI Engine)

  • 조훈;황승환;이종화;민경덕
    • 대한기계학회논문집B
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    • 제27권10호
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    • pp.1370-1376
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    • 2003
  • The investigation of liquid fuel film on the cylinder liner is an essential to understand the engine-out hydrocarbon emissions formation in SI engines. In this research, two-dimensional visualization was carried out to investigate the liquid fuel film on the quartz liner in the optical engine. For this, the optical engine with hydraulic system was designed based on the commercial SI engine. The visualization was based on the laser-induced fluorescence with total reflection technique. Using a quartz liner and a special lens, only the liquid fuel film on the liner was visualized. With using this technique, the distribution of the fuel film on the cylinder liner was measured for different engine conditions and injection timing in the optical engine.

실험계획법에 의한 $Na_2O-Al_2O_3-SiO_2$계 유리의 조성과 물성관계 (Relation between Composition and Properties of $Na_2O-Al_2O_3-SiO_2$Glasses Determined from Experimental Design)

  • 강은태
    • 한국세라믹학회지
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    • 제36권10호
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    • pp.1022-1034
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    • 1999
  • A relation between composition and properties of Na2O-Al2O3-SiO2 glasses was investigated with application of the extreme vertical design. Properties investigated in this study include glass transition temperature density refractive index thermal expansion electrical conductivity bending strength and hardness, Most of the quadratic models fitted on property data were statistically significant. The properties estimated from the fitted equation agreed well with the measured properties. The estimated properties were compared with those reported by other investigators. Additional composition except for those of extreme vertices were needed to yield a slightly better result for the simple system such as a temary system. In addition an optimal composition on each property could be calculated by using optimization technique on result obtained from the fitted quadratic models.

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나노스크래치와 KOH 에칭 기술을 병용한 Si (100) 패턴제작 (Pattern Fabrication on Si (100) Surface by Using Both Nanoscratch and KOH Etching Technique)

  • 윤성원;이정우;강충길
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2003년도 춘계학술대회논문집
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    • pp.448-451
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    • 2003
  • This study describes a new maskless nano-fabrication technique of Si (100) using the combination of nanometer-scale mechanical forming by nano-indenter XP and KOH wet etching. First the surface of a Si (100) specimen was machined by using the nano-machining system, which utilizes the mechanism of the nano-indenter XP. Next, the specimen was etched by KOH solution. After the etching process, the convex structure or deeper hole is made because of masking or promotion effect of the affected layer generated by nano-machining. On the basis of this interesting fact, some sample structures were fabricated.

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Nd-Yag 레이저 화학증착을 이용한 SiC 로드 성장에 관한 실험적 연구 (Experimental Study of the Growth of the SiC Rod using Nd-Yag Laser Chemical Vapor Deposition)

  • 이영림;유재은
    • 대한기계학회논문집A
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    • 제28권4호
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    • pp.481-488
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    • 2004
  • Laser chemical vapor deposition can be used as a new approach for a rapid prototyping technique. The purpose of the study is to fabricate several 3-dimensional objects that are relatively simple as well as to find the characteristics of SiC rod growth that is the first step in developing a new rapid prototyping technique with laser chemical vapor deposition. In the study, SiC rods were generated with varying precursor pressure for 5 minutes. Deposition rates with varying precursor pressure, shapes of rods, surface roughness and component organization were investigated, in particular. Finally, several simple objects like a branch or a propeller were successfully fabricated using laser chemical vapor deposition.