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http://dx.doi.org/10.3795/KSME-A.2004.28.4.481

Experimental Study of the Growth of the SiC Rod using Nd-Yag Laser Chemical Vapor Deposition  

Lim, Young (공주대학교 기계공학부)
Ryu, Jae-Eun (공주대학교 대학원)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.28, no.4, 2004 , pp. 481-488 More about this Journal
Abstract
Laser chemical vapor deposition can be used as a new approach for a rapid prototyping technique. The purpose of the study is to fabricate several 3-dimensional objects that are relatively simple as well as to find the characteristics of SiC rod growth that is the first step in developing a new rapid prototyping technique with laser chemical vapor deposition. In the study, SiC rods were generated with varying precursor pressure for 5 minutes. Deposition rates with varying precursor pressure, shapes of rods, surface roughness and component organization were investigated, in particular. Finally, several simple objects like a branch or a propeller were successfully fabricated using laser chemical vapor deposition.
Keywords
Laser Chemical Vapor Deposition; Silicon Carbide; Nd-Yag Laser; Rapid Prototyping;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
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