Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Experimental Study of the Growth of the SiC Rod using Nd-Yag Laser Chemical Vapor Deposition

Nd-Yag 레이저 화학증착을 이용한 SiC 로드 성장에 관한 실험적 연구

  • Published : 2004.04.01
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Abstract

Laser chemical vapor deposition can be used as a new approach for a rapid prototyping technique. The purpose of the study is to fabricate several 3-dimensional objects that are relatively simple as well as to find the characteristics of SiC rod growth that is the first step in developing a new rapid prototyping technique with laser chemical vapor deposition. In the study, SiC rods were generated with varying precursor pressure for 5 minutes. Deposition rates with varying precursor pressure, shapes of rods, surface roughness and component organization were investigated, in particular. Finally, several simple objects like a branch or a propeller were successfully fabricated using laser chemical vapor deposition.

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References

  1. Zong, G.-S., 1991, 'Solid Freeform Fabrication Using Gas Phase Selective Area Laser Deposition,' Ph.D. Dissertation, The University of Texas at Austin
  2. Birmingham, R. B. 1995, 'Laser Based Solid Freeform Fabrication Techniques for the Direct Production of Ceramic and Metal/Ceramic Shapes,' Ph.D. Dissertation, The University of Texas at Austin
  3. Tompkins, J. V., 1997, 'Joining Ceramic Materials by Selective Area Laser Deposition,' Ph.D. Dissertation, The University of Texas at Austin
  4. Figueras,A., Garelik,S., Santiso, J., Rodriguez- Clemente, R., Armas, B., Combescure, C., Berjoan, R., Saurel, J. M. and Caplain, R., 1992, 'Growth and Properties of CVD-SiC Layers Using Tetramethylsilane,' Mater. Sci. Eng., Vol. B, No. B11, pp. 83-87
  5. Thissell, W. R., 1994, 'Processing and Control of Selective Area Laser Deposition from Methane and Hydrogen,' Ph.D. Dissertation, The University of Texas at Austin
  6. Veintemillas-Verdauger, S., Figueras, A., and Rodriguez-Clemente, R. J., 1993, 'A Thermodynamical Approach to Tetramethylsilane (TMS) Pyrolysis: Application to SiC Coatings obtained by MOCVD,' Journal of Crystal Growth, Vol. 128, pp. 349-353 https://doi.org/10.1016/0022-0248(93)90346-X
  7. Sibieude, F., Benezech, J., 1988, 'Chemical Vapor Deposition of Silicon Carbide: an X-ray Diffraction Study,' Journal of Materials Science, Vol. 231, No. 5, pp. 1632-1636 https://doi.org/10.1007/BF01115701
  8. Tompkins, J. V., Laabi, R., Birmingham, H. L. and Marcus, H. L., 1995, 'Advances in Selective Area Laser Deposition of Silicon Carbide,' Proceedings of the Solid Freeform Fabrication Symposium, pp. 412-421
  9. Lee, Young Lim, 2002, 'Study of Laser Chemical Vapor Deposition of Silicon Carbide from Tetramethylsilane,' Trans. of the KSME, Series B, Vol. 26, pp. 1226-1233 https://doi.org/10.3795/KSME-B.2002.26.9.1226