• 제목/요약/키워드: SI technique

검색결과 1,431건 처리시간 0.036초

Synthesis of Cu-coated Ni-based Bulk Metallic Glass Powders by Gas Atomization and Spray Drying Process

  • Kim, Byoung-Kee;Kim, Yong-Jin;Kim, Jin-Chun
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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    • pp.936-936
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    • 2006
  • Bulk amorphous materials have been intensively studied to apply for various advanced industry fields due to their high mechanical, chemical and electrical properties. These materials have been produced by several techniques such as mechanical alloying, melt spinning and gas atomization, etc. Among them, the atomization is the most potential technique for commercialization due to high cooling rate during solidification of the melt and mass productivity. However, the amorphous powders still have some limitations because of their low ductility and toughness. Therefore, intensive efforts have to be carried out to increase the ductility and toughness. In this study, the Ni-based amorphous powder was produced by the gas atomization process. And in order to increase the ductile toughness, ductile Cu phase was coated on the Ni amorphous powder by spray drying process. The characteristics of the as-synthesis powders have been examined and briefly mentioned. The master alloy with $Ni_{57}Zr_{20}Ti_{16}Si_2Sn_3$ was prepared by vacuum induction melting furnace with graphite crucible and mold. The atomization was conducted at $1450^{\circ}C$ under the vacuum of $10^{-2}$ torr. The gas pressure during atomization was varied from 35 to 50 bars. After making the Ni amorphous powders, the spray drying was processed to produce the Cu -coated Ni amorphous composite powder. The amorphous powder and Cu nitrate solution were mixed together with a small amount of binder and then it was sprayed at temperature of $130^{\circ}C$ and rotating speed of 15,000 R.P.M.

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나노 반도체 소자를 위한 펄스 플라즈마 식각 기술 (Application of Pulsed Plasmas for Nanoscale Etching of Semiconductor Devices : A Review)

  • 양경채;박성우;신태호;염근영
    • 한국표면공학회지
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    • 제48권6호
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    • pp.360-370
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    • 2015
  • As the size of the semiconductor devices shrinks to nanometer scale, the importance of plasma etching process to the fabrication of nanometer scale semiconductor devices is increasing further and further. But for the nanoscale devices, conventional plasma etching technique is extremely difficult to meet the requirement of the device fabrication, therefore, other etching techniques such as use of multi frequency plasma, source/bias/gas pulsing, etc. are investigated to meet the etching target. Until today, various pulsing techniques including pulsed plasma source and/or pulse-biased plasma etching have been tested on various materials. In this review, the experimental/theoretical studies of pulsed plasmas during the nanoscale plasma etching on etch profile, etch selectivity, uniformity, etc. have been summarized. Especially, the researches of pulsed plasma on the etching of silicon, $SiO_2$, and magnetic materials in the semiconductor industry for further device scaling have been discussed. Those results demonstrated the importance of pulse plasma on the pattern control for achieving the best performance. Although some of the pulsing mechanism is not well established, it is believed that this review will give a certain understanding on the pulsed plasma techniques.

기판 바이어스 DC 전원의 종류와 반응가스 분압비가 3성분계 B-C-N 코팅막의 합성과 마찰 특성에 미치는 영향 (Effects of DC Substrate Bias Power Sources and Reactant Gas Ratio on Synthesis and Tribological Properties of Ternary B-C-N Coatings)

  • 정다운;김두인;김광호
    • 한국표면공학회지
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    • 제44권2호
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    • pp.60-67
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    • 2011
  • Ternary B-C-N coatings were deposited on Si(100) wafer substrate from $B_4C$ target by RF magnetron sputtering technique in $Ar+N_2+CH_4$ gas mixture. In this work, the effect of reactant gas ratio, $CH_4/(N_2+CH_4)$ on the composition, kinds and amounts of bonding states comprising B-C-N coatings were investigated using two different bias power sources of continuous and unipolar DCs. In addition, the tribological properties of coatings were studied with the composition and bonding state of coating. It was found that the substrate bias power had an effect on chemical composition, and all of the obtained coatings were nearly amorphous. Main bonding states of coatings were revealed from FTIR analyses to be h-BN, C-C, C-N, and B-C. The amount of C-C bonging mainly increased with increase of the reactant gas ratio. From our studies, both C-C and h-BN bonding states improved the tribological properties but B-C one was found to be harmful on those. The best coating from tribological points of view was found to be $BC_{1.9}N_{2.3}$ composition.

20mol% Gd-doped 소결체 CeO$_2$ 전해질의 전기적 특성분석 (Characterization for Electrical Properties of Sintered 20mol% Gd-doped CeO$_2$ Electrolyte)

  • 김선재;국일현
    • 한국세라믹학회지
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    • 제35권1호
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    • pp.97-105
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    • 1998
  • 20mol% Gd-doped CeO2 ultrafine powders as a promising electrolyte for the low temperature solid ox-ide fuel cells were synthesized with particle sizes of 15-20 nm using glycine nitrate process(GNP) fol-lowed by sintering their pellets at 150$0^{\circ}C$ for various times in air and then the electrical properties of the sintered pellets were investigated. The sintering behaviors and electrical properties for the sintered 20 sintered mol% Gd-doped CeO2 pellets were analyzed using dilatometer and SEM and AC two-terminal impedance technique respectively. As the heating temperature increased the synthesized powder had the sintering behaviors to show the start of the significant shrink at temperature of about $700^{\circ}C$ and to show the end of the shrink at the temperature of about 147$0^{\circ}C$. When the pellets were sintered with the vaious times at 150$0^{\circ}C$ the temperatuer which the shrink had been already completed the grain sizes in the sintered 20 mol% Gd-doped GeO2 pellets increased with the increase of the sintering time but their electrical resis-tivities showed the minimum value at the sintering time of 10h. It is due that the pellet sintered for 10h had the minimum activation energy fior the electtrical conduction. Thus it is thought that the decrease of the activation energy with the increase of the sintering time to 10h is induced by the enhanced mi-crostructure like the decrease of pore amount and the grain growth and its increase with the sintering times more than 10h is induced by the increase of the amounts of the impurities such as Mg. Al and Si from the sintering atmosphere.

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굴착사면 변화에 따른 복개 터널구조물의 역학적 거동에 관한 수치해석적 연구 (A Study on the Behavior of Cut and Cover Tunnel according to the Excavation Plane by Numerical Analysis)

  • 배규진;이석원;이규필;박시현
    • 한국터널지하공간학회 논문집
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    • 제4권1호
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    • pp.79-90
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    • 2002
  • 현재 복개 터널 라이닝의 설계는 설계상의 간편성으로 인해 복개 터널의 라이닝에 대한 구조해석적 기법인 Rigid Frame Analysis가 널리 사용되고 있으나, 이는 되메움 지반과 터널 라이닝 사이의 상호작용(Interaction) 메카니즘을 적절히 반영하지 못하게 될 뿐만 아니라, 굴착 사면의 경사, 굴착폭 및 지표면의 경사 등에 의한 영향을 고려하지 못하는 문제점이 있다. 따라서 본 연구에서는 복개 터널구조물의 합리적이고 경제적인 설계를 위한 기본연구로써, 좁은 되메움 공간에서의 토압경감과 콘크리트 라이닝과 성토체의 상호작용을 고려하기 위하여 지반공학적 모델링 기법을 이용한 수치해석을 실시하였다. 또한 복개 터널구조물의 역학적 거동 영향인자로써 굴착사면의 경사 및 콘크리트 라이닝과 굴착사면의 이격거리 등을 고려하였으며, 각 영향인자가 복개 터널구조물의 역학적 거동에 영향을 미치는 정도를 분석하였다.

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Preparation and Characterization of Solid Dispersions of Itraconazole by using Aerosol Solvent Extraction System for Improvement in Drug Solubility and Bioavailability

  • Lee, Si-Beum;Nam, Kyung-Wan;Kim, Min-Soo;Jun, Seoung-Wook;Park, Jeong-Sook;Woo, Jong-Soo;Hwang, Sung-Joo
    • Archives of Pharmacal Research
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    • 제28권7호
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    • pp.866-874
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    • 2005
  • The objective of this study was to elucidate the feasibility to improve the solubility and bioavailability of poorly water-soluble itraconazole via solid dispersions by using supercritical fluid (SCF). Solid dispersions of itraconazole with hydrophilic polymer, HPMC 2910, were prepared by the aerosol solvent extraction system (ASES) under different process conditions of temperature/pressure. The particle size of solid dispersions ranged from 100 to 500 nm. The equilibrium solubility increased with decrease (15 to 10 MPa) in pressure and increase (40 to $60^{\circ}C$) in temperature. The solid dispersions prepared at $60^{\circ}C$/15 MPa showed a slight increase in equilibrium solubility (approximately 27-fold increase) when compared to pure itraconazole, while those prepared at $60^{\circ}C$/10MPa showed approximately 610-fold increase and no endothermic peaks corresponding to pure itraconazole were observed, indicating that itraconazole might be molecularly dispersed in HPMC 2910 in the amorphous form. The amorphous state of itraconazole was confirmed by DSC/XRD data. The pharmacokinetic parameters of the ASES-processed solid dispersions, such as $T_{max},\;C_{max},\;and\;AUC_{0-24h}$ were almost similar to $Sporanox_{\circledR}$ capsule which shows high bioavailability. Hence, it was concluded that the ASES process could be a promising technique to reduce particle size and/or prepare amorphous solid dispersion of drugs in order to improve the solubility and bioavailability of poorly water-soluble drugs.

극초단파 레이저 강화 유리 기판의 기계적 특성평가(1) (Evaluation of Mechanical Properties of Glass Substrate Strengthened by Ulatrashort Laser Pulse(1))

  • 문필용;윤덕기;이강택;윤병헌;조성학;류봉기
    • 한국재료학회지
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    • 제15권12호
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    • pp.796-801
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    • 2005
  • In order to reduce the weight of glass in architecture, automobile, bottles, displays, a new technique that can strengthen glass was developed using various method. Generally, the strength achieved of glass-ceramics is higher as is 1.he fracture toughness by the formation of a crystalline phase inside glass. In this study, $70SiO_2-20Na_2O-10CaO-10TiO_2$ glasses were irradiated to strengthen by heterogeneous phase using femto-second laser pulse. Laser pulse irradiation of samples was analyzed by DTA, TMA, XRD, nano-indenter and SEM. Samples irradiated by laser had lower value$(3\~4\times10^{-3}Pa)$ of nano indentation which related with mother glass$(8\times10-3Pa)$ than values. Microcracks were occurred around laser irradiation area when femtosecond laser with the repetition rate of 1kHz was used as the light source to induced heterogeneous phase.

제주도 동부 해안대수층의 수리특성 산정과 지하수위 예측 (Estimation of Hydraulic Characteristics and Prediction of Groundwater Level in the Eastern Coastal Aquifer of Jeju Island)

  • 조시범;전병칠;박은규;최광준;송성호;김기표
    • 한국환경과학회지
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    • 제23권4호
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    • pp.661-672
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    • 2014
  • Due to tidal force, it is very difficult to estimate the hydraulic parameters of high permeable aquifer near coastal area in Jeju Island. Therefore, to eliminate the impact of tidal force from groundwater level and estimate the hydraulic properties, tidal response technique has been mainly studied. In this study we have extracted 38 tidal constituents from groundwater level and harmonic constants including frequency, amplitude, and phase of each constituent using T_TIDE subroutine which is used to estimate oceanic tidal constituents, and then we have estimated hydraulic diffusivity associated with amplitude attenuation factor(that is the ratio of groundwater level amplitude to sea level amplitude for each tidal constituent) and phase lag(that is phase difference between groundwater level and sea level for each constituent). Also using harmonic constants for each constituent, we made the sinusoidal wave and then we constructed the synthesized wave which linearly combined sinusoidal wave. Finally, we could get residuals(net groundwater level) which was excluded most of tidal influences by eliminating synthesized wave from raw groundwater level. As a result of comparing statistics for synthesized level and net groundwater level, we found that the statistics for net groundwater level was more insignificant than those of synthesized wave. Moreover, in case of coastal aquifer which the impact of tidal force is even more than those of other environmental factors such as rainfall and groundwater yield, it is possible to predict groundwater level using synthesized wave and regression analysis of residuals.

Use of resorbable mesh and fibrin glue for restoration in comminuted fracture of anterior maxillary wall

  • Yang, Jae-Hyuk;Chang, Suk Choo;Shin, Jin Yong;Roh, Si-Gyun;Lee, Nae-Ho
    • 대한두개안면성형외과학회지
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    • 제19권3호
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    • pp.175-180
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    • 2018
  • Background: The facial bone has a complex structure compared to other bones, and various types of fractures can occur due to its characteristics. Among them, in comminuted fractures of anterior maxillary wall, multiple depressed and impacted bony segments cannot be reduced easily when performing internal fixation using plates and screws or wires, and inadequate restoration leads to a range of complications. This paper introduces an alternative technique using a resorbable mesh with fibrin glue to restore comminuted fractures of anterior maxillary wall. Methods: Thirteen patients were diagnosed with comminuted fractures of anterior maxillary wall between March 2017 and February 2018 in the authors' hospital. All patients with comminuted fractures of anterior maxillary wall underwent restoration using resorbable mesh with fibrin glue. The patients' demographics, causes of facial trauma, mean operation time, length of hospital stay, follow-up period, and complications were recorded. Results: No major complications and only one hypoesthesia of the skin area was noted. Three months after surgery, the hypoesthesia recovered completely. After surgery (mean, 3.9 months; range, 2-12 months), computed tomography showed that the bone fragments in all patients were fixed successfully in their anatomical places. Conclusion: In comminuted fractures of anterior maxillary wall, the use of a resorbable mesh with fibrin glue can be an advantageous and effective method for a successful restoration without complications.

$Cl_2$/Ar 분위기에서 GST 박막의 ICP 에칭 (Inductively Coupled Plasma Etching of GST Thin Films in $Cl_2$/Ar Chemistry)

  • 유금표;박은진;김만수;이승환;권광호;민남기
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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    • pp.1438-1439
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    • 2006
  • $Ge_{2}Sb_{2}Te_5$(GST) thin film at present is a promising candidate for a phase change random access memory (PCRAM) based on the difference in resistivity between the crystalline and amorphous phase. PCRAM is an easy to manufacture, low cost storage technology with a high storage density. Therefore today several major chip in manufacturers are investigating this data storage technique. Recently, A. Pirovano et al. showed that PCRAM can be safely scaled down to the 65 nm technology node. G. T Jeonget al. suggested that physical limit of PRAM scaling will be around 10 nm node. Etching process of GST thin ra films below 100 nm range becomes more challenging. However, not much information is available in this area. In this work, we report on a parametric study of ICP etching of GST thin films in $Cl_2$/Ar chemistry. The etching characteristics of $Ge_{2}Sb_{2}Te_5$ thin films were investigated using an inductively coupled plasma (ICP) of $Cl_2$/Ar gas mixture. The etch rate of the GST films increased with increasing $Cl_2$ flow rate, source and bias powers, and pressure. The selectivity of GST over the $SiO_2$ films was higher than 10:1. X-ray photoelectron spectroscopy(XPS) was performed to examine the chemical species present in the etched surface of GST thin films. XPS results showed that the etch rate-determining element among the Ge, Sb, and Te was Te in the $Cl_2$/Ar plasma.

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