Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2006.07c
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- Pages.1438-1439
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- 2006
Inductively Coupled Plasma Etching of GST Thin Films in $Cl_2$ /Ar Chemistry
$Cl_2$ /Ar 분위기에서 GST 박막의 ICP 에칭
- Yoo, Kum-Pyo (Department of Control and Instrumentation Engineering, Korea University) ;
- Park, Eun-Jin (Department of Biomicrosystem Technology, Korea University) ;
- Kim, Man-Su (Department of Control and Instrumentation Engineering, Korea University) ;
- Yi, Seung-Hwan (Department of Mechanical Engineering, Chungju University) ;
- Kwon, Kwang-Ho (Department of Control and Instrumentation Engineering, Korea University) ;
- Min, Nam-Ki (Department of Control and Instrumentation Engineering, Korea University)
- 유금표 (고려대학교 제어계측공학과) ;
- 박은진 (고려대학교 바이오마이크로시스템협동과정) ;
- 김만수 (고려대학교 제어계측공학과) ;
- 이승환 (충주대학교 기계공학과) ;
- 권광호 (고려대학교 제어계측공학과) ;
- 민남기 (고려대학교 제어계측공학과)
- Published : 2006.07.12
Abstract
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