• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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• pp.1001-1003
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• 1998

In this paper, $Ar^+$ ion laser etching process of single/poly crystalline silicon with $CCl_{2}F_{2}$ gas is studied for MEMS applications. To investigate the effects of process parameters, laser power, gas pressure, scanning speed were varied and multiple scanning was carried out to obtain high aspect ratio. In addition, scanning width was varied to observe the trench profile etched in repeating scanning cycle. From the etching of $2.6{\mu}m$ thick polycrystalline Si deposited on insulator, trench with flat bottom and vertical side wall was obtained and it is possible to apply this results for MEMS applications.

• 한국생산제조학회지
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• 제22권1호
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• pp.173-177
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• 2013

The purpose of this paper is to investigate the influences on mechanical properties of two-stroke cycle motor pistons manufactured by casting, conventional forging and powder forging, through the comparison of characteristics, merits and disadvantages of each forming technology. For each forming technology, the optimal process parameters were determined through the experiments for several conditions, and microstructure, hardness, tensile strength and elongation of pistons are compared and analyzed. In conventional forging process, material temperature was $460^{\circ}C$ and the die temperature was $210^{\circ}C$ for the Al 4032. The optimal condition was found as solution treatment under $520^{\circ}C$ for 5 hours, quenching with $23^{\circ}C$ water, and aging under $190^{\circ}C$ for 5 hours. In powder forging process, the proper composition of material was determined and optimal sintering conditions were examined. From the experiment, 1.5% of Si contents on the total weight, $580^{\circ}C$ of sintering temperature, and 25 minutes of sintering time were determined as the optimal process condition. For the optimal condition, the pistons had 76.4~78.3 [HRB] of hardness, and 500 [MPa] of tensile strength after T6 heat treatment.

• 한국자동차공학회논문집
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• 제4권4호
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• pp.58-71
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• 1996

A model which calculates the hydrocarbon emissions from spark ignition engines is presented The model contains the formation of HC emissions due to both crevices around piston ring top land and oil films on the cylinder wall. The model also considers in-cylinder oxidation and exhaust port oxidation of desorbed HC from crevices and oil films after combustion process. The HC emissions model utilizes the results of SI engine cycle simulation. The model predicts well the trends of HC emissions from the engines when varying engine parameters.

• 청정기술
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• 제28권3호
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• pp.203-209
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• 2022

본 연구에서는 태양광 폐모듈 해체과정에서 회수한 실리콘을 재활용하여 기계구조용 메커니컬 실을 제조하는 공정에 대해 전과정평가 방법에 의한 환경성평가를 수행하였다. 재활용 실리콘은 고순도 정제 후 탄소와 반응시켜 β-SiC 입자로 합성하고 압축 성형, 소결 및 열처리를 거쳐 제품을 생산한다. 현장 데이터 수집 및 환경부 LCI DB를 활용하여 각 단계별로 자원고갈, 산성화, 부영양화, 지구온난화, 오존층파괴, 광화학산화물 등 6개 영역의 환경영향을 산정하였다. 영향범주 별 환경영향은 지구온난화 45 kg CO₂, 광화학산화물 2.23 kg C₂H₄으로 크게 나타났으며 가중화 분석결과 광화학산화물, 자원고갈 및 지구온난화에 의한 환경영향이 98.7%로 높은 기여도를 차지하였다. 원료 실리콘과 탄소를 미분쇄 혼합하는 습식공정과 β-SiC 과립화 공정이 주요한 환경영향 유발요인이므로 건식공정으로 전환 및 대기 배출되는 용매는 회수하여 재이용하는 시스템으로 개선이 필요하다. 폐모듈 실리콘의 재활용에 의해 자원고갈의 영향은 53.9%, 지구온난화는 60.7% 감소하며 가중화 결과 전체적인 환경영향이 27% 감소하는 것으로 분석되어 폐모듈 재활용은 자원절약과 탄소중립 실현의 주요 수단이 될 수 있음을 LCA 분석으로 확인하였다.

• Korean Chemical Engineering Research
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• 제54권1호
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• pp.16-21
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• 2016

실리콘의 부피팽창과 낮은 전기전도도를 개선하기 위하여 Silicon/Carbon/CNT 복합체를 제조하였다. Silicon/Carbon/CNT 합성물은 SBA-15를 합성한 후, 마그네슘 열 환원 반응으로 Silicon/MgO를 제조하여 Phenolic resin과 CNT를 첨가하여 탄화하는 과정을 통해 합성하였다. 제조된 Silicon/Carbon/CNT 합성물은 XRD, SEM, BET, EDS를 통해 특성을 분석하였다. 본 연구에서는 충방전, 사이클, 순환전압전류, 임피던스 테스트를 통해 CNT 첨가량에 따른 전기화학적 효과를 조사하였다. $LiPF_6$ (EC:DMC:EMC=1 :1 :1 vol%) 전해액에서 Silicon/Carbon/CNT 음극활물질을 사용하여 제조한 코인셀은 CNT 함량이 7 wt% 일 때 1,718 mAh/g으로 높은 용량을 나타내었다. 코인셀의 사이클 성능은 CNT 첨가량이 증가할수록 개선되었다. 11 wt%의 CNT를 첨가한 Silicon/Carbon/CNT 음극은 두 번째 사이클 이후 83%의 높은 용량 보존율을 나타냄을 알 수 있었다.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2010년도 춘계학술대회 초록집
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• pp.113.2-113.2
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• 2010

세라믹 필터는 여러 종류의 분진제거 시스템에서 연소 배가스 정제를 위한 가장 적절한 소재로 알려져 있다. 현재까지 다양한 형태의 세라믹 필터가 개발되고 있는데, 캔들 타입(candle type), 튜브 타입(tubular type), 평판 타입(parallel flow type) 등이 그 예이다. 통상적으로 세라믹 캔들 필터는 가압유동층복합발전(PFBC, Pressurize Fluidized-Bed Combustion), 석탄가스화복합발전(IGCC, Integrated coal Gasification Combined Cycle), 석탄가스화연료전지복합발전(IGFC, Integrated coal Gasification Fuel cell Combined cycle)에서 고온 배가스 정제용으로 사용되고 있다. 일반적으로 IGCC나 CTL 합성가스 정제시스템의 경우에는 높은 고압(약 25기압)과 미세분진이 함유되어 있는 분위기에서 운전된다. 그러므로 이때 사용되는 초청정용 세라믹 집진필터는 고온, 고압 및 부식 환경에서 50 MPa 이상을 갖는 높은 강도와 내식성을 갖도록 개발되어야 하기 때문에 SiC(Silicon Carbide)가 가장 적절한 캔들 필터 소재로 적용되고 있다. 이에 따라 집진용 SiC 세라믹 캔들 필터를 개발하기 위해서는 고온에서 내산화성이 우수하고, 부피팽창에 의한 균열이 발생하지 않는 무기결합재의 선정 및 이를 통한 소재의 특성 최적화가 가장 중요한 부분이라 할 수 있다. 본 연구에서는 래밍성형 공정을 적용하여 1m급 탄화규소 세라믹 캔들 필터 시작품을 제조하였으며, 래밍성형 공정 이외에 정수압가압성형, 진공압출성형으로 제조되고 있는 세라믹 캔들 필터의 국내외 시장 및 그 전망을 분석하였다.

• 소성∙가공
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• 제26권5호
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• pp.306-313
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• 2017

This study investigated the microstructure, tensile strength, and high cycle fatigue properties of ADC12 aluminum alloys with different $Mg+Al_2Ca$ contents manufactured using die casting process. Microstructural observation identified the presence of ${\alpha}-Al$, eutectic Si, $Al_2Cu$, and Fe-intermetallic phases. The increase of $Mg+Al_2Ca$ content resulted in finer pore size and decreased pore distribution. Room temperature tensile strength tests were conducted at strain rate of $1{\times}10^{-3}/sec$. For 0.6%Mg ADC12, measured UTS, YS, and El were 305.2MPa, 157.0MPa, and 2.7%, respectively. For 0.8%Mg ADC12, measured UTS, YS, and El were 311.2 MPa, 159.4 MPa, and 2.4%, respectively. Therefore, 0.8% ADC12 alloy had higher strength and slightly decreased elongation compared to 0.6% Mg ADC12. High cycle fatigue tests revealed that 0.6% Mg ADC12 alloy had a fatigue limit of 150 MPa while 0.8% Mg ADC12 had a fatigue limit of 160MPa. It was confirmed that $Mg+Al_2Ca$ added ADC12 alloy achieved finer, spherical eutectic Si particles, and $Al_2Cu$ phases with greater mechanical and fatigue properties since size and distribution of pores and shrinkage cavities decreased as $Mg+Al_2Ca$ content increased.

• 한국수소및신에너지학회논문집
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• 제19권5호
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• pp.386-393
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• 2008

The Sulfur-iodine(SI) thermochemical cycle is one of the most promising methods for massive hydrogen production. For the purpose of continuous operation of SI cycle, phase separation characteristics into two liquid phases ($H_2SO_4$-rich phase and $HI_x$-rich phase) were directly investigated via Bunsen reaction. The experiments for Bunsen reaction were carried out in the temperature range, from 298 to 333 K, and in the $I_2/H_2O$ molar ratio of $0.109{\sim}0.297$ under a continuous flow of $SO_2$ gas. As the results, solubility of $SO_2$, decreased with increasing the temperature, had considerable influence on the global composition in the Bunsen reaction system. The amounts of impurity in each phase(HI and $I_2$ in $H_2SO_4$-rich phase and $H_2SO_4$ in $HI_x$-rich phase) were decreased with increasing $H_2SO_4$ molar ratio and temperature. To control the amounts of impurity in $HI_x$-rich phase, temperature is a factor more important than $I_2/H2_O$ molar ratio. On the other hand, the affinity between $HI_x$ and $H_2O$ was increased with increasing $I_2/H2_O$molar ratio.

• 전기학회논문지
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• 제59권8호
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• pp.1401-1405
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• 2010

We have successfully demonstrated of metal-insulator-semiconductor (MIS) capacitors with $HfO_2$/p-Si structures. The $HfO_2$ film was grown at $200^{\circ}C$ on H-terminated Si wafer by atomic layer deposition (ALD) system. TEMAHf and $H_2O$ were used as the hafnium and oxygen sources. A cycle of the deposition process consisted of 0.1 s of TEMAHf pulse, 10 s of $N_2$ purge, 0.1 s of $H_2O$ pulse, and 60 s of $N_2$ purge. The 5 nm thick $HfO_2$ layer prepared on Si substrate by ALD exhibited excellent electrical properties, including low leakage currents, no mobile charges, and a good interface with Si.

• 전기학회논문지
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• 제58권12호
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• pp.2420-2424
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• 2009

We have successfully demonstrated of metal-insulator-semiconductor (MIS) capacitors with $Al_2O_3/p-Si$ structures. The $Al_2O_3$ film was grown at $200^{\circ}C$ on H-terminated Si wafer by atomic layer deposition (ALD) system. Trimethylaluminum [$Al(CH_3)_3$, TMA] and $H_2O$ were used as the aluminum and oxygen sources. A cycle of the deposition process consisted of 0.1 s of TMA pulse, 10 s of $N_2$ purge, 0.1 s of $H_2O$ pulse, and 60 s of $N_2$ purge. The 5 nm thick $Al_2O_3$ layer prepared on Si substrate by ALD exhibited excellent electrical properties, including low leakage currents, no mobile charges, and a good interface with Si.