• Korean Journal of Materials Research
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• v.15 no.3
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• pp.161-165
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• 2005

We investigated selective dry etching of GaAs over AlGaAs and InGaP in high density planar inductively coupled $BCl_3/SF_6$ plasmas. The process parameters were ICP source power (0-500 W), RE chuck power (0-30W) and gas composition $(60-100\%\;BCl_3\;in\;BCl_3/SF_6)$. The process results were characterized in terms of etch rate, selectivities of GaAs over AlGaAs and InGaP, surface morphology, surface roughness and residues after etching. $BCl_3/SF_6$ selective etching of GaAs showed quite good results in this study. Selectivities of GaAs $(GaAs:AlGaAs\~36:1,\;GaAs:InGaP\~45:1)$ were superior at $18BCl_3/2SF_6$, 20 W RF chuck power, 300 W ICP source power and 7.5 mTorr. Addition of $(5-15\%)SF_6\;to\;BCl_3$ produced relatively high selectivities of GaAs over AlGaAs and InGaP during etching due to decrease of etch rates of AlGaAs and InGaP (boiling points of etch products: $AlF_3\~1300^{\circ}C,\;InF_3>1200^{\circ}C$ at atmosphere) at the condition. SEM and AFM data showed slightly sloped sidewall and somewhat rough surface$(RMS\~9nm)$. XPS study on the surface of processed GaAs proved a very clean surface after dry etching. It shows that planar inductively coupled $BCl_3/SF_6$ plasmas could be a good candidate for selective dry etching of GaAs over AlGaAs and InGaP.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.15 no.5
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• pp.14-19
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• 2001

This paper describes the influence of conducting particle in the coaxial cylindrical electrodes under alternating voltage condition investigated using breakdown electric field and electro magnetics simulation method. Simulated particle-location in GIS chamber were the particle on electrode, the particle on enclosure and free moving particle. As results, it was founded that in case of breakdown electric field of the GIS chamber, breakdown electric field of particle on electrode was the lowest, that of free moving particle was middle and that of particle on enclosure was the highest. And in case of the electric field analysis with particle locations, electric field of particle on electrode was the highest, that of lifted particle was middle and that of particle on enclosure was the lowest. This results can offer a practical reference on the insulation design of domestic GIS.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.1536-1537
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• 2011

The high-voltage circuit breaker plays an important role in the electrical system because there has been a need for suitable switching devices capable of initiating and interrupting the flow of the electric fault current. It continues as the contacts recede from each other and as the newly created gap is bridged by a plasma. The arc plasma happens inside the insulation nozzle of SF6 self-blast interrupter which is newly developed as the next-generation switching principle. The ablation of PTFE nozzle is caused by this high temperature medium, the PTFE vapor from the nozzle surfaces flows toward the outlets and the pressure chamber. The vapor makes the pressure of the chamber increased by heat and mass transfer from the arcing zone. Because the rate of ablation depends on the magnitude of applied current, it decreases when the current goes to zero. The compressed gas inside the chamber flows reversely toward the arc plasma during this moment. According to this principle, the arc can be cooled down and the fault current can be interrupted successfully. In this study, we calculate arc plasmas and thermal-flow characteristics caused by fault current interruption inside a SF6 self-blast interrupter, and to investigate the effect of PTFE ablation on the whole arcing history.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2009.10a
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• pp.297-300
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• 2009

본 연구는 Knife형 전극을 사용하여 $SF_6$와 $N_2/O_2$의 혼합체적률이 각각 100:0, 80:20, 60:40인 혼합가스에서의 캡 변화에 따른 연면방전 특성을 연구할 목적으로 교류고전압 인가 시 압력 (P), 전극간거리 (d) 및 사용된 가스의 변화에 따른 절연파괴특성을 연구 하였다. 본 연구를 통해 챔버 내의 P와 d가 증가할수록 연면절연파괴전압은 상승하다가 일정한 압력 이상에서는 포화하는 경향을 보였고, $N_2:O_2$의 혼합체적률이 100:0인 경우는 $SF_6$의 37%, 80:20은 47%, 60:40은 46%로 나타났다. $N_2:O_2$ 혼합가스 중에서 체적혼합비율이 80:20인 경우가 연면절연내력이 가장 좋게 나타났다.

• Proceedings of the KIEE Conference
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• 2005.11a
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• pp.96-99
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• 2005

In this study, we build system and techniques of evaluating the interruption performance of the GCB with experimental method. We constructed a simplified synthetic test circuit of which ability is up to 245kV, 50kA BTF test. And We composed a model test circuit breaker with puffer assisted self blasting type GCB. With this circuit breaker, we carried out the experiment of no load and SLF90. During the tests, we measured the several factors such as stroke, pressure, arc temperature, the voltage and current near the current zero and dI/dt, dV/dt. Arc conductivity before 200ns before current zero which is one of the indexes of the thermal recovery of a GCB was measured. With these kinds of measurement, we could estimate the performance of a GCB fundamentally. Futhermore these results were used to adjust the arc modeling with CFD(computational fluid dynamics) and we could increase the plausibility of the analytical method.

• Proceedings of the KIEE Conference
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• 1999.11b
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• pp.21-23
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• 1999

In this paper, the analysis of the electric field in the chamber of high voltage $SF_6$ GCB(Gas Circuit Breaker) is presented by using C-1 FEM. For this purpose, pre-processing program and post-processing program were developed for axisymmetirc 3 dimensional analysis and the electric field in cylindric chamber was analyzed. Important problem is that electric analysis must be considered coronal due to break-down of $SF_6$ when it is cutted off. To solve this problem, a procedure is needed to verify that the solution of Poisson's equation for scalar potential satisfy charge continuos condition because of using first order element os not satisfy the electric continuous condition, C-1 FEM is introduce to obtain electirc potential and electric field at the same time. Analysis of the distribution of electric field on model was done. It is confirmed that the developed program in this paper applicable to design and to analyze of characteristics in total program as electric characteristics analysis routine.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.22 no.5
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• pp.47-52
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• 2008

In this paper partial discharge were simulated by conducted particle, a fine protrusion, surface discharge, which could be easy accumulated charge and concentrated electric field in the model GIS. In this times this paper measured and analyzed the radiated electromagnetic waves by using spectrum analyzer and antenna ($30{\sim}2,000[MHz]$ for measurement of EMI EMC in accordance with occurrence and propagation of partial discharge. In the basis of this results, a novel UHF(Ultra High Frequency) spherical sensor is presented. The measured impedance bandwidth of the proposed antenna is from 0.3[GHz] to 1.7[GHz]. Form results of this study, this antenna will be playing an important role for the sensor for insulation diagnosis system by UHF method of real site GIS and power equipment using $SF_6$ gas.

• Proceedings of the SAREK Conference
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• 2007.11a
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• pp.99-104
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• 2007

Tracer gas technique is widely used to measure the ventilation rates and/or ventilation effectiveness of building spaces. However, the conventional method using a single tracer gas can measure only outdoor air change rates in a single zone. This paper deals with the multi-gas tracer technique to measure air exchange rates between rooms. Interzonal air movements are important to characterize overall ventilation performance of complicated multi-zone buildings. Experiments are conducted in a simple two-room model with known airflow rates using tracer gases of SF6 and R134a. The concentration decays of two tracer gases are measured after simultaneous injections in each room. The governing equations are derived from the continuity and the mass balance of each room. The data reduction procedure are developed to obtain the inter-room airflow rates using the governing matrix inversion, and various data manipulation methods are tested, such as data shift, interpolation, smoothing, and etc, to improve the estimate and interpretation of the results.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.60 no.8
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• pp.1560-1565
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• 2011

The environmental pollution caused by green-house gases such as $CO_2$ and $SF_6$ has been becoming the main issue of industrial society. Many developed countries are making efforts to minimize the amount of $CO_2$ emission come from the operation of high voltage electrical apparatuses. As a part of these efforts, 180 countries signed the Kyoto Protocol in 1997 to cut back on their green-house gas emissions. Nowadays, the study on the development of dry air insulated switchgear (DAIS) which is known as an eco-friendly electrical apparatus is in progress. A DAIS is advantageous for minimizing the effect of impurities and enhancing the dielectric characteristics over an air insulated switchgear (AIS) by applying constant pressure to an enclosed cubicle. Therefore, a study on the electrical insulation performance of dry air as a gaseous insulation medium is conducted in this paper to substitute a gas insulated switchgear (GIS) for DAIS. As results, it is verified that the AC dielectric characteristics of dry air are similar to those of air and the lightning impulse dielectric characteristics of dry air are superior to those of air at 1bar pressure condition. However, dry air is of inferior dielectric characteristics to $SF_6$ at 4bar pressure condition. Finally, it is suggested that the internal pressure of DAIS should be over 4bar pressure to develop a high voltage switchgear which has similar electrical performance to a conventional GIS. Also, the empirical formulae on calculating the maximum electric field intensity at sparkover of dry air are deduced by experiments according to pressures. It is expected that these results are helpful to design and develop a high voltage electrical apparatus.

• Membrane Journal
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• v.23 no.3
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• pp.189-203
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• 2013

F-gases, gases containing fluorine such as perfluorocarbons (PFCs), sulfurhexafluoride ($SF_6$), nitrogen trifluoride ($NF_3$) are known to have green house effects. Although the net emission rates of gases containing fluorine are much lower than those of $CO_2$, their contribution to global warming cannot be ignored because of their extremely high global warming potential (GWP). F-gases mainly have been used for a variaty of applications in the semiconductor/LCD processes and in the electric power distribution industry of the national key industry. One of practical solutions of controlling the emission rates of F-gases is to reuse by separation and recovery of F-gases of low concentration from the gases mixtures with nitrogen or air. This work investigates some methods for F-gases recovery and separation around the membrane-based process.