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Separation and Recovery of F-gases  

Nam, Seung-Eun (Resources Separation and Recovery Research Group, Korea Research Institute of Chemical Technology)
Park, Ahrumi (Resources Separation and Recovery Research Group, Korea Research Institute of Chemical Technology)
Park, You-In (Resources Separation and Recovery Research Group, Korea Research Institute of Chemical Technology)
Publication Information
Membrane Journal / v.23, no.3, 2013 , pp. 189-203 More about this Journal
Abstract
F-gases, gases containing fluorine such as perfluorocarbons (PFCs), sulfurhexafluoride ($SF_6$), nitrogen trifluoride ($NF_3$) are known to have green house effects. Although the net emission rates of gases containing fluorine are much lower than those of $CO_2$, their contribution to global warming cannot be ignored because of their extremely high global warming potential (GWP). F-gases mainly have been used for a variaty of applications in the semiconductor/LCD processes and in the electric power distribution industry of the national key industry. One of practical solutions of controlling the emission rates of F-gases is to reuse by separation and recovery of F-gases of low concentration from the gases mixtures with nitrogen or air. This work investigates some methods for F-gases recovery and separation around the membrane-based process.
Keywords
F-gases; perfluorocarbons (PFCs); sulfurhexafluoride ($SF_6$); nitrogen trifluoride ($NF_3$); gas separation; gas recovery; membrane process;
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