• 한국기계가공학회지
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• 제6권4호
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• pp.81-85
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• 2007

A safety valve is used for protecting the pressure vessel and facilities by discharging the operating fluid into the valve from the accident when the pressure is over the designated value. The fluid is sulfurous acid and nitric acid. etc. in the semi-conductor assembly line. Thus the valve elements material must be acid resistance. Teflon, which is used generally as inner parts of a valve, tends to easily sticks to sliding surface by thermal expansion under high temperature. Some studies are performed to change teflon to another material and shape to have a better fluidity under the condition. The analysis of the thermal expansion is conducted by commercial FEM software to improve the problems. Boundary conditions were temperature and load in this study. From the analysis, the thermal expansion of stainless steel is verified to be lower than that of teflon under high temperature. Thus coupled teflon/stainless steel-made valve is applied to assembly line without danger due to thermal expansion.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1998년도 춘계학술대회 논문집
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• pp.203-208
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• 1998

Materials of the Frame hole in fishing trackle reel is made up a number large and small holes. Thus, it is difficult to effective machining. Abrasive flow machining(AFM) is useful to polish a internal or external surface of the 3-dimensional shape parts, which are used in many fields such as aerospace, automative, semi-conductor, and medical component industries. The machining process is that two hydraulic cylinders, which are located face to face, enforce abrasive media to the passage between workpiece and tooling parts alternately, and then the abrasives include in the media pass the passage and polish the surface of workpiece. The media which is made of polymer and abrasives plays the role of the tool for deburring or polishing complex shap workpiece by its viscoelastic characteristics. In this study, the abrasive media for abrasive flow machining was made by mixing viscielastic polymer with alunina and silicon carbide abrasive. Also, we present AFM device design and preliminary results of an investigation in to some aspects of the AFM process performance in fishing trackle reel.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1998년도 추계학술대회 논문집
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• pp.192-197
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• 1998

Abrasive flow machining is useful to abrasive polish a internal or external surface of the free shape dimensional parts, which are used in many fields such as machine tool parts, semi-conductor, and medical component industries. The machining process is that two hydraulic cylinders, which are located surface to surface, are enforce media to the passage between workpiece and tooling part alternately, and then the abrasives included in the media pass the passage and polish the surface of workpiece. The media which is made of polymer and abrasive plays complex have workpiece by its viscoelastic characteristics. In this study, the media for AMF was made by mixing viscoelastic polymer with alumina and silicon carbide abrasive respectively. As a result, alumina include media is also the experiments of deburring the inside burr of in order to analyse the deburring machinability of abrasive flow machining according to various machining parameters which were media flow rate extrusion pressure, passage gap, media viscosity, abrasive content, and abrasive grain size.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1998년도 춘계학술대회 논문집
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• pp.143-147
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• 1998

As the accuracy of manufactured goods needed high-accuracy processing has made the efficiency of NC and measurment technology develop, the innovation of machine tools has influence the development of the semi-conductor and optical technology. We can mention that a traction role of the acceleration for the development like that depends on the development of the measurement technics - Stylus instrument method, STM, SEM, Laser interferometer method - which are used for measuring the movement accuracy of machine tools. The movement error factors in movement accuracy are expressed as yaw, roll, and pitch etc. Machining center has 21 movement error factors including of 3 axies joint errors because that has 3 axies and has been measured as the standard of the unloaded condition until now inspite of getting static, dynamic, and servo-gain errors in the case of expending the error range. Therefore, this study tries to measure position accuracy according to loading on the X-Y table of the machining center.

• 한국공작기계학회논문집
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• 제16권5호
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• pp.198-204
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• 2007

This study was carried out to develope a flow control system using to supply PR(photo-resist) in the semi-conductor manufacturing process. The features of this system are to be able to measure the high viscosity and micro-flow. To meet above study object some ideas was induced to design a new concept valve with new material, multi-cross wheel, and new sealing method etc.. As the evaluations on the developed micro-flowmeter it was enough satisfied to use at the IT industries such as photo-resist process.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2001년도 하계종합학술대회 논문집(2)
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• pp.181-184
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• 2001

A coplanar waveguide(CPW) on a dielectric substrate consists of a center strip conductor with semi-infinite ground planes on either side. This type of waveguide offers several advantages over microstrip line. It facilitates easy shunt as well as series mounting of active and passive devices. It eliminates the need for wraparound and via holes, and it has a low radiation loss. These, as well as several other advantages, make CPW ideally suited for microwave integrated circuit applications. However, very little information is available in the literature on models for CPW discontinuities. This lack of sufficient discontinuity models for CPW has limited the application of CPW in microwave circuit design. We presented for the characteristics of coplanar waveguide open end capacitance and series gap capacitance. Measurements by utilizing the resonance method were made and the experimental data confirmed the validity of theories. The relationships between the CPW capacitances and the physical dimensions were studied.

• 반도체디스플레이기술학회지
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• 제2권2호
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• pp.25-30
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• 2003

In the case of a vibration sensitive equipment, it require a vibration free environment to provide its proper function. Especially, lithography and inspection device, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved Giga Class semi conductor wafers. This high technology equipments require very strict environmental vibration criteria in proportion to the accuracy of the manufacturing. In this paper, the dynamic analysis and modal test were performed to evaluate the dynamic properties of the constructing clean room structure. Based on these results, a structural dynamic modification(SDM) were required to satisfiy the vibration allowable limit for pression machine. Therefore, in order to improve the dynamic stiffness of clean room structure, the VSD system which can control the force applied on structure, were adopted and its utility were proved from dynamic test results of the improved structure after a modification work.

• 한국시뮬레이션학회:학술대회논문집
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• 한국시뮬레이션학회 2004년도 춘계학술대회 논문집
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• pp.69-71
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• 2004

반도체 산업은 21세기 정보화 사회를 선도하는 핵심부품 산업으로 국가의 첨단 산업 발전을 촉진하는 주력산업이다 반도체 산업은 첨단 핵심 부품산업으로써, Timing산업, 고부가가치, 고성장, 고 위험, 기술 집약적 특징을 갖는다. 반도체 라인 건설에는 수 조원의 비용과 수년의 시간이 투입되어야 하므로, 생산 및 설비투자 계획의 옳고 그름에 따라 회사의 생사가 결정될 수 있다. 생산 및 설비투자계획을 세우기 위해선 여러 가지 변수를 적용시켜야 한다. 이에 본 과제에서는 과거의 판매자료를 바탕으로 마련된 패턴을 이용하여 라인의 생산계획 및 설비투자 계획을 수립하고자 한다.

• 한국세라믹학회지
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• 제47권4호
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• pp.290-295
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• 2010

This study has been focused on properties of mirror surface grinding technology by ELID(Electrolytic In-process Dressing) for structural ceramics using in high precision structural parts as like semi-conductor manufacturing processes. The experimental studies have been carried out to get mirror surface for grinding of structural ceramics, SiC, $Al_2O_3$ and AlN. Grinding process of the ceramics is carried out with varying mesh type, depth of cut and feed rate using diamond wheel. The machining result of the surface roughness and condition of ground surface, have been analyzed by use of surface roughness tester, SEM, AFM and three dimensional surface profiler measurement system.

• 한국기계가공학회지
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• 제7권4호
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• pp.56-61
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• 2008

Cropping metal materials is widely used for feeding processes of various forming method, such as forging, extrusion, drawing, and upsetting. However, cropping has many weak points, which are material loss in part of cutting, chip creation, and much use of lubrication oil, etc. In this study, instead of cropping, a novel process is proposed to cut metal materials, especially stainless steel bar which is known very difficult to crop. Results of FE-analysis will be shown to verify the proposed method comparing with those of the conventional cropping process. Also, fitting products were successfully forged using the fabricated billet by the proposed process.