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http://dx.doi.org/10.4191/KCERS.2010.47.4.290

Mirror-surface Machining Properties of Structural Ceramics using Diamond Abrasives  

Kim, Yoo-Young (Department of Mechanical Engineering, JINJU National University)
Kwak, Tae-Soo (Department of Mechanical Engineering, JINJU National University)
Kim, Kyung-Nyun (Department of Mechanical Engineering, KOJE College)
Publication Information
Journal of the Korean Ceramic Society / v.47, no.4, 2010 , pp. 290-295 More about this Journal
Abstract
This study has been focused on properties of mirror surface grinding technology by ELID(Electrolytic In-process Dressing) for structural ceramics using in high precision structural parts as like semi-conductor manufacturing processes. The experimental studies have been carried out to get mirror surface for grinding of structural ceramics, SiC, $Al_2O_3$ and AlN. Grinding process of the ceramics is carried out with varying mesh type, depth of cut and feed rate using diamond wheel. The machining result of the surface roughness and condition of ground surface, have been analyzed by use of surface roughness tester, SEM, AFM and three dimensional surface profiler measurement system.
Keywords
Structural ceramics; Mirror-surface machining; Surface roughness; Ductile mode; Brittle mode;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
Times Cited By SCOPUS : 2
연도 인용수 순위
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