• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.38-39
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• 2005

We have investigated the effect of the pad surface characteristics such as roughness, groove density and wear of pad on within wafer non-uniformity(WIWNU) in chemical mechanical polishing(CMP). We found that WIWNU increases as pad surface roughness($R_{pk}$; Reduced peak height) increases in an early stage of polishing. But after polishing time goes to a certain extent, WIWNU decreases as uniformity of pad surface roughness. Also, groove of pad has effect on relative pad stiffness although original mechanical properties of pad are unchanged by grooving. WIWNU decreases as relative pad stiffness decreases. In addition, conditioning process causes non-uniform wear of pad during in CMP. The profile of pad wear has a significant effect on WIWNU.

• 대한기계학회논문집B
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• 제32권6호
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• pp.463-470
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• 2008

Turbulent coherent structures near rod-roughened wall are investigated by analyzing the database of direct numerical simulation of turbulent boundary layer. The surface roughness rods with the height $k/{\delta}=0.05$ are arranged periodically in $Re_{\delta}=9000$. The roughness sublayer is defined as two-point correlations are not independent of streamwise locations around roughness. The roughness sublayer based on the two-point spatial correlation is different from that given by one-point statistics. Quadrant analysis and probability-weighted Reynolds shear stress indicate that turbulent structures are not affected by surface roughness above the roughness sublayer defined by the spatial correlations. The conditionally-averaged flow fields associated with Reynolds shear stress producing Q2/Q4 events show that though turbulent vortices are affected in the roughness sublayer, these are very similar at different streamwise locations above the roughness sublayer. The Reynolds stress producing turbulent vortices in the log layer ($y/{\delta}=0.15$)have almost the same geometrical shape as those in the smooth wall-bounded turbulent flows. This suggests that the mechanism by which the Reynolds stress is produced in the log layer has not been significantly affected by the present surface roughness.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2006년 제4회 한국유체공학학술대회 논문집
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• pp.445-448
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• 2006

The effects of surface roughness on a spatially-developing turbulent boundary layer (TBL) were investigated by performing direct numerical simulations of TBLs over rough and smooth walls. The Reynolds number based on the momentum thickness was varied in the range $Re_{\theta}=300{\sim}1400$. The roughness elements used were periodically arranged two-dimensional spanwise rods, and the roughness height was $k=1.5{\theta}_{in}$, which corresponds to $k/{\delta}=0.045{\sim}0.125$. To avoid generating a rough wall inflow, which is prohibitively difficult, a step change from smooth to rough was placed $80{\theta}_{in}$ downstream from the inlet. The spatially-developing characteristics of the rough-wall TBL were examined. Along the streamwise direction, the friction velocity approached a constant value and a self-preserving form of the turbulent stress was obtained. Introduction of the roughness elements affected the turbulent stress not only in the roughness sublayer but also in the outer layer. Despite the roughness-induced increase of the turbulent stress in the outer layer, the roughness had only a relatively small effect on the anisotropic Reynolds stress tensor in the outer layer. Inspection of the triple products of the velocity fluctuations revealed that introducing the roughness elements onto the smooth wall had a marked effect on vertical turbulent transport across the whole TBL. By contrast, good surface similarity in the outer layer was obtained for the third-order moments of the velocity fluctuations.

• 한국공작기계학회논문집
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• 제16권2호
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• pp.63-69
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• 2007

The surface roughness in centerless grinding is mainly affected by the many process parameters. For improving the surface roughness, the control of grinding parameters is very important. This paper deals with the analysis of the process parameters such as height of renters, tilting angle of the regulating wheel with respect to grinding wheel, rotation speed of regulating wheel, which are developed based on design of experiments such as factorial design. The investigation can enhance the surface roughness of ferrule. Finally, we have verified improved results of the optimized conditions.

• 한국환경과학회지
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• 제17권11호
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• pp.1203-1210
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• 2008

Flow resistance in a natural stream is caused by complex factors, such as the grains on the bed, vegetation, and bed-form, reach profile. Flow resistance in a generally stable gravel bed stream is due to protrudent grains from bed. Therefore, the flow resistance can be calculated by equivalent roughness in gravel bed stream, but estimation of equivalent roughness is difficult because nonuniform size and irregular arrangement of distributed grain on natural stream bed. In previous study, equivalent roughness is empirically estimated using characteristic grain size. However, application of empirical equation have uncertainty in stream that stream bed characteristic differs. In this study, we developed a model using an analytical method considering grain diameter distribution characteristics of grains on the bed and also taking into account flow resistance acting on each grain. Also, the model consider the protrusion height of grain.

• 대한기계학회논문집
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• 제7권3호
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• pp.301-312
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• 1983

Experimental results for the variation of the flow characteristics and heat transfer coefficients in the entrance region of concentric annular pipe with artificial roughness are compared with the theoretical results by numerical analysis. In the experiments, velocity profiles, pressure gradients and heat transfer coefficients were measured with variation of the Reynolds number for the constant ratio of pitch to height at the hydrodynamic entry region. Wall temperature of inner heated pipe with constant heat flux was measured at thermal entry region after the hydrodynamically fully developed region of flow. Experimental data agree well with numerical predictions. Both results show that turbulent flow of annular pipe with artificial roughness is fully developed thermally much faster than that of smooth pipe. Nusselt number of annular pipe with roughness is much higher than that of smooth pipe. However the ratios of Nusselt number of annular pipe with artificial roughness to that of smooth pipe does not vary with Reynolds number.

• 터널과지하공간
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• 제12권4호
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• pp.268-276
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• 2002

In this study, a 3D coordinate measurement system equipped with a laser displacement meter for digitizing rock joint surface was established and the digitized data were used to calculate several roughness parameters. The parameters used in this study were micro avenge inclination $angle(i_{ave})$, average slope of joint $asperity(SL_{ ave})$, root mean square of $i-angle(i_{rms})$, standard deviation of height(SDH), standard deviation of $i-angle(SD_i)$, roughness profile $index(R_P)$, and fractal dimension(D). The relationships between the roughness parameters based on the digitzation of the surface profile were analyzed. Since the measured value varied according to the degree of reflection and the variation of colors at the measuring point, rock joint surface was painted in white to minimize the influence of the surface conditions. The comparison of the measured values and roughness parameters before and after painting revealed the better consequence from measurement on the painted surfaces. Also, effect of measuring interval was studied. As measured interval was increased, roughness parameters were exponentially decreased. The incremental sequence of degree of decrease was $SDH\; i_{ave},\; i_{rms},\; SD_i,\;and\; R_ p-1$. As a result of comparison of parameters from pin-type measurement system and laser type measurement system, all value of parameters were higher when laser-type measurement system was used, except SDH.

• 대기
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• 제26권1호
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• pp.111-126
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• 2016

In the numerical weather model, surface properties can be defined by various parameters such as terrain height, landuse, surface albedo, soil moisture, surface emissivity, roughness length and so on. And these parameters need to be improved in the Seoul metropolitan area that established high-rise and complex buildings by urbanization at a recent time. The surface roughness length map is developed from digital elevation model (DEM) and it is implemented to the high-resolution numerical weather (WISE-WRF) model. Simulated results from WISE-WRF model are analyzed the relationship between meteorological variables to changes in the surface roughness length. Friction speed and wind speed are improved with various surface roughness in urban, these variables affected to temperature and relative humidity and hence the surface roughness length will affect to the precipitation and Planetary Boundary Layer (PBL) height. When surface variables by the WISE-WRF model are validated with Automatic Weather System (AWS) observations, NEW experiment is able to simulate more accurate than ORG experiment in temperature and wind speed. Especially, wind speed is overestimated over $2.5m\;s^{-1}$ on some AWS stations in Seoul and surrounding area but it improved with positive correlation and Root Mean Square Error (RMSE) below $2.5m\;s^{-1}$ in whole area. There are close relationship between surface roughness length and wind speed, and the change of surface variables lead to the change of location and duration of precipitation. As a result, the accuracy of WISE-WRF model is improved with the new surface roughness length retrieved from DEM, and its surface roughness length is important role in the high-resolution WISE-WRF model. By the way, the result in this study need various validation from retrieved the surface roughness length to numerical weather model simulations with observation data.

• 한국정밀공학회지
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• 제4권2호
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• pp.36-46
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• 1987

An optical technique using laser for non-contact measurement of surface roughness and form accuracy of ground surfaces is presented. It is found that, when a ground surface is illuminated by a beam of laser light, the roughness height and slope distribution has significant influence on the pattern of reflection and it maintains an unique Gaussian distribution relationship with the surface roughness. The principle idea of the optical measurement system is therefore monitor the radiation, and then calibrate it in process against surface roughness by means of necessary digital data processing. On the other hand, measuring the form accuracy of a ground surface is accomplished by using a triangular method, which is based on observing the movement of an image of a spot of light projected onto the surface. The image is focused, through a series of lenses for magnification, on a photodetector array lf line configur- ation. Then the relative movement of image and consequently the form accuracy of the surface can be obtained through appropriate calibration procedures. Experimental test showed that the optical roughness measurement technique suggested in this work is very efficient for most industrial applications being capable of monitoring the roughness heights ranging 0.1 to 0.6 .$\mu$m CLA values. And form accuracy can be measured in process with a resolution of 10 .$\mu$m.

• Journal of Mechanical Science and Technology
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• 제20권7호
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• pp.1077-1088
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• 2006

This paper describes a numerical investigation on the performance deteriorations of a low speed, single-stage axial turbine due to use of rough blades. Numerical calculations have been carried out with a commercial CFD code, CFX-Tascflow, by using a modified wall function to implement rough surfaces on the stator vane and rotor blade. To assess the stage performance variations corresponding to 5 equivalent sand-grain roughness heights from a transition ally rough regime to a fully rough regime, stage work coefficient and total to static efficiency were chosen. Numerical results showed that both work coefficient and stage efficiency reduced as roughness height increased. Higher surface roughness induced higher blade loading both on the stator and rotor which in turn resulted in higher deviation angles and corresponding work coefficient reductions. Although, deviation angle changes were small, a simple sensitivity analysis suggested that their contributions on work coefficient reductions were substantial. Higher profile loss coefficients were predicted by higher roughness heights, especially on the suction surface of the stator and rotor. Furthermore sensitivity analysis similar to the above, suggested that additional profile loss generations due to roughness were accountable for efficiency reductions.