• 제목/요약/키워드: Rotational stage

검색결과 137건 처리시간 0.033초

PZT를 이용한 Semi-inchworm구동기법의 초정밀 회전 스테이지 개발 (Development of ultra precision rotational stage using Semi-inchworm driving mechanism with PZT)

  • 윤덕원;안강호;한창수
    • 반도체디스플레이기술학회지
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    • 제6권1호
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    • pp.37-41
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    • 2007
  • Recently PZT is used in ultra precision mechanism field. PZT has a small motion range although it has a high resolution. Many methods, such as inchworm, impact driving, etc., have been applied for the expansion of the motion range.? In this study, the new actuating mechanism for rotational motion with two PZT actuators is proposed. The ultra precision rotational actuator which is made by proposed mechanism is able to operate both coarse and fine motion. The design parameters of the proposed mechanism are considered to improve the performance of the system. The rotational stage which is applied by the proposed mechanism is fabricated. The resolution and velocity for fabricated rotational stage are measured by laser interferometer.

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허브면 형상의 변경을 통한 초음속 압축단의 공력효율 개선 (Improvement of Aerodynamic Efficiency of Supersonic Stage by the Modification of Hub Flowpath Shape)

  • 박기철
    • 유체기계공업학회:학술대회논문집
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    • 유체기계공업학회 2002년도 유체기계 연구개발 발표회 논문집
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    • pp.227-233
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    • 2002
  • It is common for highly loaded supersonic stage to have very high relative inlet Mach number. To get this level of inlet Mach number, rotor blade outer diameter or rotational speed should be increased. In the case of commercial turbo-fan engine, it is preferred to make the rotor blade outer diameter large than increasing the rotational speed. But, for multi-stage fan of military engines, overall diameter is often restricted and they are apt to increase the rotational speed. With high rotational speed, relative inlet Mach number is likely to be well supersonic over the entire rotor blade span and the characteristic of the stage is affected with meridional shape of the stage, especially at near hub or tip. In this paper, the aerodynamic performance of two different hub surface shape is compared and it's merit and demerits were discussed.

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회전현상 부품에서의 가공현상 특징의 자동인식에 관한 연구 (Automatic feature recognition for rotational parts)

  • 이경휘;정무영
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1992년도 한국자동제어학술회의논문집(국내학술편); KOEX, Seoul; 19-21 Oct. 1992
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    • pp.896-900
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    • 1992
  • This paper presents a comprehensive methodology of automatic feature recognition for rotational parts. The parts of interest are rotational without deviation. In stage one, IGES formatted daa of 2D engineering drawings are transformed into three independent graphs through upperhalf profile. In stage two, recursive evaluations are made to recognize features and relevant information is acquired. Finally,an example is evaluated to demonstrate the recognition power of the developed algorithm for rotational features.

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시스템 동바리 수직재와 수평재 연결부의 휨강도와 회전 강성 평가 (Flexural Strength and Rotational Stiffness Estimation of Joint between Vertical and Horizontal Members in System Support)

  • 원정훈;이형도;최명기;박만철
    • 한국안전학회지
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    • 제33권4호
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    • pp.46-53
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    • 2018
  • This study examined the maximum resistant moment and nonlinear rotational stiffness of wedge joint between the vertical and horizontal members of system supports. To examine the maximum resistant moment and propose the nonlinear rotation stiffness of wedge joint, 6 specimens were tested and additional 3 specimens, where the horizontal member was welded to the vertical member, were tested to compare the moment capacity of wedge joints. The average maximum moment in the tested wedge joint was 1.183 kNm which represented about 70 % of the maximum moment developed in the welded specimens. And, as simulating nonlinear rotational stiffness of the wedge joint, a tri-linear model was suggested. The rotational stiffness was estimated as 23.095 kNm/rad in first stage, 7.945 kNm/rad in second stage, and 3.073 kNm/rad in third stage. For the failure mode, the specimen with the wedge joint showed the failure of joint between vertical and horizontal members. However, the specimen with welded joint represented the yielding of horizontal members.

단 축적법을 이용한 다단 축류 압축기 성능예측 비교 (Performance Prediction Comparison of Multi-Stage Axial-Compressor by Stage-Stacking Method)

  • 박태진;윤성호;백제현
    • 유체기계공업학회:학술대회논문집
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    • 유체기계공업학회 2001년도 유체기계 연구개발 발표회 논문집
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    • pp.143-148
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    • 2001
  • In this study, to investigate the effect of the generalized performance curve on the performance prediction and to find the optimal ones, a systematic study is performed. For this purpose, we compared the influence of the stage performance curves with experimental data in multi-stage axial compressors. As a result, it is discovered that the optimal generalized performance curves vary according to the number of the stages in compressors. And we found that for a low-stage compressors, Muir's pressure coefficient curve gives the best prediction results at design rotational frequency regardless of the efficiency curve. On the other hand, for high-stage compressors, Stone's pressure coefficient curve gives the optimistic results about the performance prediction at design rotational frequency.

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다채널 광정렬 장치에서의 다자유도 회전 스테이지 동작 특성에 관한 연구 (A Study on the Mechanism of Rotational Stage with Multi Degree of Freedom for Multi-Channel Optical Alignment System)

  • 정상화;차경래;최석봉;김광호;박준호;이경형
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2004년도 춘계학술대회 논문집
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    • pp.219-224
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    • 2004
  • In recent years, as the demands of VBNS(Very high speed Backbone Network Service) and VDSL(Very high-data rate Digital Subscriber Line) increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, WDM elements increase. The alignment and the attachment technology are very important to fabricate the optical elements for communication. In this paper, the mechanism of rotational stage, the contact sensing unit, and integrated control circuit for the optical alignment system are studied.

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다채널 광소자 정렬 장치의 회전스테이지 구동 메커니즘 연구 (A Study on the Mechanism of Rotational Stage for Optical Fiber Alignment)

  • 정상화;차경래;김현욱;최석봉;김광호;박준호
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1514-1517
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    • 2005
  • In recent years, as the demands of VBNS(Very high speed Backbone Network Service) and VDSL(Very high-data rate Digital Subscriber Line) increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, WDM elements increase. The alignment and the attachment technology are very important to fabricate the optical elements for communication. In this paper, the mechanism of rotational stage are studied. with the three different method and the results of them are applied to the design of the system. The performance test of resolution and travel is performed.

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다채널 광정렬 장치에서의 다자유도 회전 스테이지 동작 특성에 관한 연구 (A Study on the Mechanism of Rotational Stage with Multi Degree of Freedom for Multi-Channel Optical Alignment System)

  • 정상화;차경래;김현욱;최석봉;김광호;박준호
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2005년도 춘계학술대회 논문집
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    • pp.150-155
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    • 2005
  • In recent years, as the demands of VBNS(Very high speed Backbone Network Service) and VDSL(Very high-data rate Digital Subscriber Line) increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, WDM elements increase. The alignment and the attachment technology are very important to fabricate the optical elements for communication. In this paper, the mechanism of rotational stage are studied. with the three different method and the results of them are applied to the design of the system. The performance test of resolution and travel is performed.

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VCM을 이용한 리소그래피용 레티클 스테이지의 설계 및 기구학적 해석 (Design and Kinematic Analysis of the Reticle Stage for Lithography Using VCM)

  • 오민택;김문수;김정한
    • 한국공작기계학회논문집
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    • 제17권3호
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    • pp.86-93
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    • 2008
  • This paper presents a design of the reticle stage for lithography using VCM(Voice Coil Motor) and kinematic analysis. The stage has three axes for X,Y,${\theta}_z$, those actuated by three VCM's individually. The reticle stage has cross coupled relations between X,Y,${\theta}_z$ axes, and the closed solution of the forward/inverse kinematics were solved to get an accurate reference position. The reticle stage for lithography was designed for reaching both high accuracy and long stroke, which was $0.1{\mu}m$ (X,Y)/ $1{\mu}rad({\theta}_z)$ accuracies and relatively long strokes about 2mm (X,Y) and 2 degrees(${\theta}_z$). Also this research presents a rotational compensation algorithm for the precision gap sensor for the stage. Simulation results show the overall performance of the whole algorithm and the improvement quantity of the rotational compensation algorithm.

Development of rotational pulse-echo ultrasonic propagation imaging system capable of inspecting cylindrical specimens

  • Ahmed, Hasan;Lee, Young-Jun;Lee, Jung-Ryul
    • Smart Structures and Systems
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    • 제26권5호
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    • pp.657-666
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    • 2020
  • A rotational pulse-echo ultrasonic propagation imager that can inspect cylindrical specimens for material nondestructive evaluations is proposed herein. In this system, a laser-generated ultrasonic bulk wave is used for inspection, which enables a clear visualization of subsurface defects with a precise reproduction of the damage shape and size. The ultrasonic waves are generated by a Q-switched laser that impinges on the outer surface of the specimen walls. The generated waves travel through the walls and their echo is detected by a Laser Doppler Vibrometer (LDV) at the same point. To obtain the optimal Signal-to-Noise Ratio (SNR) of the measured signal, the LDV requires the sensed surface to be at a right angle to the laser beam and at a predefined constant standoff distance from the laser head. For flat specimens, these constraints can be easily satisfied by performing a raster scan using a dual-axis linear stage. However, this arrangement cannot be used for cylindrical specimens owing to their curved nature. To inspect the cylindrical specimens, a circular scan technology is newly proposed for pulse-echo laser ultrasound. A rotational stage is coupled with a single-axis linear stage to inspect the desired area of the specimen. This system arrangement ensures that the standoff distance and beam incidence angle are maintained while the cylindrical specimen is being inspected. This enables the inspection of a curved specimen while maintaining the optimal SNR. The measurement result is displayed in parallel with the on-going inspection. The inspection data used in scanning are mapped from rotational coordinates to linear coordinates for visualization and post-processing of results. A graphical user interface software is implemented in C++ using a QT framework and controls all the individual blocks of the system and implements the necessary image processing, scan calculations, data acquisition, signal processing and result visualization.