• 한국유체기계학회 논문집
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• 제16권2호
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• pp.10-14
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• 2013

The present study conducts CFD analyses on the internal flow fields of roots type vacuum pumps of semiconductor fabrication facility, and the computed CFD results for internal pressure and temperature distributions are applied to structural analyses of the pumps. The coupled analysis results between flow and structure show that the deformation of pump structure is mainly resulted from the thermal expansion of gas in pump, and the deformed impeller and housing produce their severe contact and impact phenomena causing mechanical damage and fracture.

• 한국진공학회지
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• 제8권3B호
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• pp.257-261
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• 1999

The claw pump, one of oil-less dry pumps developed to solve problems found in vacuum systems pumped by oil-sealed rotary pumps, has been widely used separately or as a part of compound structure with a roots pump. The claw pump has some merits such as a high pumping speed, a high compression ratio, and relatively little heat generation. The high compression ratio of the claw pump is compression ratio, and relatively little heat generation. The high compression ratio of the claw pump is based on efficient sweeping action of the special type rotor and an intrinsic self-valving mechanism. The contour of the rotor with claw-type blade is designed basically to make two rotors revolve smoothly without touching with each other, and related dimensions are determined by required pumping speed, compression ratio, power demand and diameter of the rotor axis. In this paper the procedure of designing the rotor of the claw pump is described and factors influencing the pump performance are analyzed.

• International journal of advanced smart convergence
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• 제7권4호
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• pp.84-91
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• 2018

In this paper, we simulated three different HV systems and analyzed of each vacuum characteristics by VacCAD modelling. In each of modelled vacuum systems, selection of chamber materials, combination of rough pump with high vacuum pump and conductance of roughing line (diameter and length) were proposed as system variables. In the modelling of chamber materials, the pumping times to ultimate pressures of different chamber materials (stainless steel, aluminum) were compared by the variations of chamber volume. In this model, the effects of outgassing dependent on the chamber materials was also simulated and aluminum was estimated to optimum chamber materials. It was also obtained that modelling of vane and roots pump with diffusion pump and diameter, length of $50{\times}250$ [mm]roughing line were characterized as optimum variables to reach the ultimate pressure of 10E-7 [mbar] most effectively. Optimum design factors for vacuum characteristics of modelled vacuum system were achieved by VacCAD simulations. Feasibility of VacCAD as vacuum simulator was verified and applications of VacCAD expected to be increased to fields in vacuum needed.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.153-153
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• 2014

건식 진공펌프(dry vacuum pump)는 기계적 저진공펌프 중 펌프 내부의 기체 배기통로에 오일을 전혀 사용하지 않는 펌프의 통칭으로써, 대개 비접촉형으로 여러 형태의 회전자가 고속으로 회전하면서 흡기구로부터 들어온 기체를 압축해 배기를 한다. 비접촉형에는 루츠(roots)형, 클로(claw)형, 스크류(screw)형, 스크롤(scroll)형 등이 있다. 그 중 스크류형 펌프는 큰 배기속도를 갖는 펌프의 설계에 유리하고 높은 운용온도가 가능하여 다수공정에 쉽게 적용할 수 있는 장점이 있다. 그러나 1단 펌프 구성을 갖게 됨에 따라 루츠형 대비 높은 소비전력 특성을 보이는 약점을 가지고 있다. 본 논문에서는 건식 진공펌프 중의 하나인 스크류형 진공펌프에 대하여, 기본적인 1단 펌프 구성에 스크류 리드(lead)의 변화를 주어 기존의 똑같은 리드의 스크류 진공펌프에 대한 소비전력 및 배기구 온도 등 스크류 형상에 대한 성능평가 연구를 진행 하고자 한다.

• Journal of Electrical Engineering and Technology
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• 제1권3호
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• pp.359-365
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• 2006

Since the start of the KSTAR (Korea Superconducting Tokamak Advanced Research) project, Instrumentation and Control (I&C) of the Neutral Beam Test Facility (NB-TF) has been striving to answer diverse requests arising from various facets during the project's development and construction phases. Hard-wired electrical circuits have been designed, tested, fabricated, and finally installed to the relevant parts of the system. In relation to the vacuum system I&C, controlling functions for the rotary pumps, a Roots pump, two turbomolecular pumps, and four cryosorption pumps have been constructed. I&C for the ion source operation are the temperature and flow rate signal monitoring, Langmuir probe signal measurements, gradient grid current measurements, and arc detector circuit. For the huge power system to be monitored or safely operated, many temperature measurement functions have also been implemented for the beam line components like the neutralizer, bending magnet, ion dump, and calorimeter. Nearly all of the control and probe signals between the NB test stand and the control room were made to be transmitted through the optical cables. Failures of coolant flow or beam line vacuum pressure were made to be safely blocked from influencing the system by an appropriate interlock circuit that will shut down the extraction voltage application to the system or prevent damages to the vacuum components. Preliminary estimation of the beam power through the calorimetric measurement shows that 87.9% of the total power of the 60kV/18A beam with 200 seconds duration is absorbed by the calorimeter surface. Most of these I&C results would be highly appropriate for the construction of the main NBI facility for the KSTAR national fusion research project.

• 원예과학기술지
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• 제31권2호
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• pp.153-158
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• 2013

본 실험은 인공배지가 담긴 용기에서 재배되는 6가지 분식물의 지상부와 지하부에 흡수된 규소의 양과 각 양액에 첨가된 규소의 농도에 따른 흡수 경향을 구명하고자 수행되었다. 화훼농가에서 주로 재배되고 있는 분식물 중에서 국화, 스파티필럼, 칼랑코에, 아이비, 카네이션, 그리고 포인세티아를 선정하고 균일한 묘를 선별하여 350mL 마젠타 박스에서 재배하면서 $K_2SiO_3$를 이용하여 Si를 0, 2.7 또는 5.4mM 농도로 첨가하였다. 각 마젠타 박스에 에어펌프에 1m 길이의 polyethylene 튜브를 연결하여 전체 실험기간 동안 $2L{\cdot}h^{-1}$(노즐당 $143mL{\cdot}h^{-1}$)로 양액에 통기하면서 재배하였다. 양액의 EC는 $1.5mS{\cdot}cm^{-1}$로, pH는 5.6으로 실험 시작 전에 조정하였다. 모든 환경 조건이 동일한 조건에서 재배한 작물을 15일째에 수확하여 지하부와 지상부의 규소 함량을 몰리브덴청법을 이용하여 측정하였다. 이를 바탕으로 규소 흡수 정도와 농도에 따른 규소 함량 변화를 알아보기 위해 단순회귀분석을 통해 검정하였으며, 양액 내에 남아 있는 규소 함량은 ICP-AES을 이용하여 측정하였다. 6가지 분식물 중 지하부의 규소 함량은 카네이션에서 가장 높고 포인세티아에서 가장 낮았다. 그리고 지상부의 규소 함량은 카네이션에서 가장 높았고 칼랑코에에서 가장 낮았다. 지상부와 지하부를 합친 식물체의 총규소 함량은 포인세티아, 칼랑코에 및 국화 는 규소 흡수 정도가 낮았고, 스파티필름은 중간 그리고 아이비와 카네이션은 높게 나타났다. 본 연구의 결과에서 규소 흡수 정도는 식물마다 달랐고 회귀분석이 식물에 따라 다양하게 나타났다.