The KSFM Journal of Fluid Machinery (한국유체기계학회 논문집)

Korean Society for Fluid machinery (한국유체기계학회)
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Coupled flow-structure Analyses on the Roots Type Vacuum Pumps in Semiconductor Fabrication Facility

반도체 생산설비 루츠형 진공펌프 계통에 대한 유동-구조 연성해석

  • Received : 2012.10.22
  • Accepted : 2013.02.27
  • Published : 2013.04.01
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Abstract

The present study conducts CFD analyses on the internal flow fields of roots type vacuum pumps of semiconductor fabrication facility, and the computed CFD results for internal pressure and temperature distributions are applied to structural analyses of the pumps. The coupled analysis results between flow and structure show that the deformation of pump structure is mainly resulted from the thermal expansion of gas in pump, and the deformed impeller and housing produce their severe contact and impact phenomena causing mechanical damage and fracture.

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References

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