Evaluation of Elastic Properties for Nanoscale Coating Layers Using Ultrasonic Atomic Force Microscopy (초음파원자현미경을 이용한 나노스케일 박막 코팅층에 대한 탄성특성 평가)
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- Journal of the Korean Society of Manufacturing Technology Engineers
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- v.24 no.5
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- pp.475-480
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- 2015