• 센서학회지
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• 제25권1호
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• pp.35-40
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• 2016

Pulse diagnosis is one of the representative diagnostic methods in Oriental medicine. In this study, a pulse pressure sensor array coated with silicone, which includes 6 piezo-resistive sensors and 1 thermistor, is fabricated for pulse measurement. It is necessary to coat the pulse sensor array with silicone to avoid the fracture or damage of pressure sensors when the sensor is in contact with the skin and a constant pressure is applied. However, the silicone coating on the pulse sensor array can cause signal interference among the sensors in the pulse sensor array. The interference number (IN), a calculation for expressing the degree of interference among channels, is changed according to the silicone thickness on the pulse sensor array. The IN is increased by a thick silicone coating, but the fabrication error, an important index for the mass production of the sensor array, is reduced by the thickness of the silicone coating. We propose that the thickness of the silicone on the pulse sensor array is an important consideration for the performance of the fabricated sensor and manufacturing repeatability.

• ETRI Journal
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• 제29권1호
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• pp.70-78
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• 2007

A new low-voltage CMOS interface circuit with digital output for piezo-resistive transducer is proposed. An input current sensing configuration is used to detect change in piezo-resistance due to applied pressure and to allow low-voltage circuit operation. A simple 1-bit first-order delta-sigma modulator is used to produce an output digital bitstream. The proposed interface circuit is realized in a 0.35 ${\mu}m$ CMOS technology and draws less than 200 ${\mu}A$ from a single 1.5 V power supply voltage. Simulation results show that the circuit can achieve an equivalent output resolution of 9.67 bits with less than 0.23% non-linearity error.

• 반도체디스플레이기술학회지
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• 제17권2호
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• pp.1-5
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• 2018

Elastic resistive pressure sensor is fabricated by a direct spray coating of silver nanowires (AgNWs) on uncured polydimethylsiloxane (PDMS) and an additional coating of a conductive polymer, poly(3,4-ethylenedioxythiophene): poly (styrene sulfonate) (PEDOT:PSS). To improve the sensitive and stability, we have fabricated sandwich-structured AgNW/polymer sensor where two AgNW/polymer-coated PDMS films are laminated with the conducting surfaces contacted by pressure lamination. It shows a resistance decrease upon loading due to the formation of dense network of AgNWs. It is demonstrated that the sandwich-structured AgNW/polymer sensor exhibits very high sensitivity ($2.59kPa^{-1}$) and gauge factor (37.8) in the low pressure regime. It can also detect a subtle placement and removal of a weight as low as 3.4 mg, the corresponding pressure of which is about 5.4 Pa. It is shown that the protrusion of AgNWs from PDMS is suppressed substantially by the over-coated PEDOT:PSS layer, thereby reducing hysteresis and rendering the sensor more stable.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.409-410
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• 2002

In order to measure the oil-film pressure in sliding surface of machinery, we have developed a piezo-resistive type thin-film pressure sensor. To reduce the measurement error due to temperature and strain, the constituent of the pressure sensitive alloy was optimized and a new sensor shape was devised. In this study, we present the measurement results of the oil-film pressure distribution in engine connecting rod big-end bearing and piston pin- bosses with 3 different pin-boss shapes using the newly developed thin-film pressure sensor.

• 전자공학회논문지
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• 제51권8호
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• pp.38-48
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• 2014

본 논문은 Piezo Resistive Type(PRT) 압력 센서용 신호 처리 아날로그 전단부 IC 설계를 주제로 한다. 센서의 출력 전압을 개선을 하기 위해 센서의 전류를 보상하는 Gauge Factor Calibration 회로, 같은 센서와의 오차가 있더라도 적용이 가능하도록 설계한 Programmable Gain Amplifier (PGA), 클록 생성기에서 발생하는 EMI를 감소시키기 위한 확산 스펙트럼 클록 생성기, 압력 센서의 분해능을 향상시키기 위한 10Bit ADC와 14Bit DAC 그리고 기존 아날로그 방식으로 처리하던 방식과는 달리 디지털 신호처리 방식을 이용한 Calibration Microcontroller (CMC)를 설계하였다. $0.35{\mu}m$ CMOS Process를 이용하여 설계 하였으며, 설계된 IC의 공급 전압은 5V와 3.3V의 전원 분리를 통하여 아날로그 회로는 5V를 사용하고 디지털 회로는 LDO로부터 3.3V를 공급 받도록 구성하였다. Gauge Factor Calibration 회로는 3.75uA부터 120uA까지 보상이 가능하며 PGA는 30dB부터 45dB까지 제어가 가능하고 확산 스펙트럼 클록 생성기는 2.13dB에서 -5.94dB로의 EMI를 감소시킬 수 있다. 공급전압에 대한 ASIC 보호 회로는 800mV부터 6.4V를 제외한 나머지 전압은 차단이 가능하고 14Bit DAC는 0.305mV의 해상도를 가지고 있다. 총 전류 5.32mA를 소모하고 있으며, Die 크기는 $1.94mm{\times}1.94mm$의 면적을 갖는다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.229.1-229.1
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• 2014

Tactile sensors have widely been researched in the areas of electronics, robotic system and medical tools for extending to the form of bio inspired devices that generate feeling of touch mimicking those of humans. Recent efforts in adapting the tactile sensor have included the use of novel materials with both scalability and high sensitivity [1]. Graphene, a 2-D allotrope of carbon, is a prospective candidate for sensor technology, having strong mechanical properties [2] and flexibility, including recovery from mechanical stress. In addition, its truly 2-D nature allows the formation of continuous films that are intrinsically useful for realizing sensing functions. However, very few investigations have been carrier out to investigate sensing characteristics as a device form with the graphene subjected to strain/stress and pressure effects. In this study, we present a sensor of vertical forces based on single-layer graphene, with a working range that corresponds to the pressure of a gentle touch that can be perceived by humans. In spite of the low gauge factor that arises from the intrinsic electromechanical character of single-layer graphene, we achieve a resistance variation of about 30% in response to an applied vertical pressure of 5 kPa by introducing a pressure-amplifying structure in the sensor. In addition, we demonstrate a method to enhance the sensitivity of the sensor by applying resistive single-layer graphene.

• 센서학회지
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• 제32권1호
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• pp.22-30
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• 2023

Innovative and advanced technologies, including robots, augmented reality, virtual reality, the Internet of Things, and wearable medical equipment, have largely emerged as a result of the rapid evolution of modern society. For these applications, pressure monitoring is essential and pressure sensors have attracted considerable interest. To improve the sensor performance, several new designs of pressure sensors have been researched based on resistive, capacitive, piezoelectric, optical, and triboelectric types. In particular, optical pressure sensors have been actively studied owing to their advantages, such as robustness to noise and remote sensing capability. Herein, a review of recent research on optical pressure sensors with self-powered sensing, remote sensing, high spatial resolution, and multimodal sensing capabilities is presented from the viewpoints of design, fabrication, and signal processing.

• 한국정보통신학회논문지
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• 제11권8호
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• pp.1478-1485
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• 2007

본 논문에서는 풍향 풍속 계측모듈 및 DSP 센서인터페이스 회로 보드를 포함하는 기상계측 시스템을 제안한다. 이 DSP 시스템은 풍향풍속모듈, 대기압센서, 대기 온도 센서의 정보를 받아들이고, 빠르게 처리하여 PC 모니터링 시스템에 전달한다. 특히 풍향 풍속 모듈과 DSP 하드웨어는 직접 설계하여 적용한다. 풍향 풍속 모듈은 바람에 관한 벡터적 정보를 얻기 위해 4개의 박막형 RTD(Resistive Temperature Detectors) 저항센서를 히팅 코일에 의해 일정하게 가열된 원기둥 모양의 지지 표면에 벡터적으로 배치하는 구조를 채택한다. 이 구조를 채택한 계측 모듈은 진동, 습기, 부식 등에 강인하면서 정확한 계측을 가능케 한다. 센서 신호처리 회로는 TI사의 고속 DSP인 TMS320F2812 사용한다. 적용된 풍향 풍속 모듈을 통해 얻어진 데이터와 DSP 인터페이스 회로보드의 빠른 데이터 처리를 통해 저렴한 기상계측시스템을 구성 할 수 있었다.

• 대한의용생체공학회:의공학회지
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• 제21권2호
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• pp.213-218
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• 2000

Pressure distributions of the soft tissue are valuable for understanding and diagnosing the disease characteristics due to the mechanical loading. Our system measures dynamic pressure distributions in real-time under the general PC environment, and analyzes various foot disorders. Main features of the developed system are as follows: (1) With the resistive pressure sensor matrix of 40${\times}$40 cells, the data is sent to the PC with the maximum sampling rate of 40 frames/sec. (2) For each frame, contact area, pressure and force are analyzed by graphic forms. Thus, various biomechanical parameters are easily determined at specific areas of interests. (3) A certain stance phase can be chosen for the analysis from the continuous walking, and the detailed biomechanical analysis can be done according to an arbitrary line dividing anterior/posterior or medial/lateral plantar areas. (4) The center of pressure (COP) is calculated and traced from the pressure distribution data, and thus the movement of the COP is monitored in detail. A few experiments revealed that our system successfully measured the dynamic plantar distribution during normal walking.

• 대한전자공학회논문지SD
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• 제42권11호
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• pp.1-8
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• 2005

본 논문은 MEMS (Micro-Mechanical-Electronic System) 기술을 이용한 온도, 압력, 습도 복합 센서의 설계와 제작, 그리고 평가에 관한 것이다. 이러한 MEMS 복합 센서는 휴대 전화나 PDA와 같이 가정용 제품에 사용되어 환경을 모니터링하는 건강 측정용 센서로서 사용될 것이다. 이 연구의 범위는 이러한 개별 센서의 연구 및 모든 센서를 하나의 실리콘 웨이퍼 상에서 집적할 수 있는 구조에 관한 연구, 그리고 복합 센서를 MEMS 공정에서 제작할 수 있는 공정 호환성에 대한 연구와 얻어진 센서 prototype의 측정, 평가로 이루어져 있다. 이 연구에서 우리는 온도와 압력 센서의 경우에는 선형성과 이력특성이 $1\%FS$안에 들어오는 특성을 얻었으며 단지 습도 센서의 경우에는 $5\%FS$에 해당하는 선형성과 이력 특성을 얻었다. 다만 원리적으로 습도 센서의 동작 특성은 비선형적이며 우리가 3차로 근사화할 경우에 보다 낳은 결과를 얻을 것을 기대할 수 있다. 이러한 특성을 더욱 개선하기 위한 것은 추후의 연구 영역이 될 것이다.