• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.6
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• pp.494-502
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• 1999

This paper represents an electrostatic micro plate resonator which consists of a rigid plate suspended with four bridges and a counter electrode. The bridges of the resonator are designed corrugated so that the residual stress are released. The FEM simulation results confirmed that the deflection characteristic of the corrugated bridge is hardly affected by the initial residual tensile stress. One resonator with the corrugated bridges and the other with the flat bridges were fabricated by the boron diffusion process and the anisotropic etch process. The vertical deflection of the fabricated electrostatic resonator was measured with a laser vibrometer, and the data were compared with the calculation results. The deflection of the resonator with the flat bridges is smaller than the deflection of that with the corrugated ones because of the residual stress. The residual stress release effect was confirmed by the fact that the measured deflection of the resonator with the corrugated bridges in close to the calculated deflection of the resonator with the flat ones with the initial stress neglected.

• Journal of Welding and Joining
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• v.17 no.4
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• pp.76-84
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• 1999

The residual stress generated when the steel plates were produced, did not influence on the out-of-plane deformation and residual stress generated by welding. When the initial deflection shape was a concave(Type I), the out-of-plane deformation became the same shape as that of the initial deflection and its magnitude became small. When the initial deflection made a winding in the welding direction(Type III), the out-of-plane deformation became large in the plate width. The initial deflection shape did not influence on residual stress and plastic strain produced by welding.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.9
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• pp.495-501
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• 2000

This paper presents a method to minimize the initial deflection of a multi-layer piezoelectric microactuator without loosing its piezoelectric deflection performance required for light modulating micromirror devices. The multi-layer piezoelectric actuator composed of PZT silicon nitride and platinum layers deflects or buckles due to the gradient of residual stress. Based on the structural analysis results and relationship between process conditions and mechanical properties we have modified the fabrication process and the thickness of thin film layers to reduce the initial residual stress deflection without decreasing its piezoelectric deflection performance. The modified designs fabricated by surface-micromachining process achieved the 77% reduction of the initial deflection compared with that of the conventional method based on the measured micromechanical material properties is applicable to the design refinement of multi-layer MEMS devices and micromechanical structures.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.11
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• pp.2415-2420
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• 2002

In the present study, a new anchor design was proposed to minimize the initial deflection of micro multi-layer cantilever beam with step-up structure, which is a key component of thin film micro-mirror array. It is important to minimize the initial deflection, caused by residual stress, because it reduces the performance of the actuation. Theoretical and experimental studies were conducted to examine the cause of the initial bending deflection. It was found that the bending deflection at the anchor of the cantilever beam was the primary source of initial deflection. Various anchor designs were proposed and the initial deflections for each design were calculated by finite element analysis. The analysis results were compared with experiments. To reduce the initial deflection a secondary support was added to the conventional structure. The optimal shapes were obtained by simulation and experiment. It was found from the analysis that the ratio or horizontal and vertical dimensions of secondary support was the governing factor, which affected the initial deflection.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.6
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• pp.354-359
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• 2000

A new method of measuring residual stress in micromachined film is proposed. An estimation of residual stress is performed by using least squares fit with an appropriate deflection modeling. an exact value of residual stress is obtained without any of the ambiguities that exist in conventional buckling method, and a good approximation is also obtained by using a few data points. Therefore, the test structures area could be greatly decreased by using this method. The measurement can be done more easily and simply without any actuation or any specific measuring equipment. The structure and fabrication processes described in this paper are simple and widely used in surface micromachining. In addition, in-situ measurement is available by using the proposed method when the test structure and the measurement structure are fabricated on a wafer simultaneously.

• Structural Monitoring and Maintenance
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• v.1 no.3
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• pp.309-322
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• 2014

Detection of fatigue cracks at an early stage of their development is important in structural health monitoring. The breathing of cracks in a structure generates higher harmonic components of the exciting frequency in the frequency spectrum. Previously, the residual operational deflection shape (R-ODS) method was successfully applied to beams with a single crack. The method is based on the ODSs at the exciting frequency and its higher harmonic components which consider both amplitude and phase information of responses to map the deflection pattern of structures. Although the R-ODS method shows the location of a single crack clearly, its identification for the location of multiple cracks in a structure is not always obvious. Therefore, an improvement to the R-ODS method is presented here to make the identification process distinct for the beams with multiple cracks. Numerical and experimental examples are utilised to investigate the effectiveness of the improved method.

• Journal of Mechanical Science and Technology
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• v.20 no.10
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• pp.1646-1652
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• 2006

A model of mechanical behavior of microcantilever due to intrinsic strain during deposition of MEMS structures is derived. A linear ordinary differential equation is derived for the beam deflection as a function of the thickness of the deposited layer. Closed-form solutions are not possible, but numerical solutions are plotted for various dimensionless ratios of the beam stiffness, the intrinsic strain, and the elastic moduli of the substrate and deposited layer. This model predicts the deflection of the cantilever as a function of the deposited layer thickness and the residual stress distribution during deposition. The usefulness of these equations is that they are indicative of the real time behavior of the structures, i.e. it predicts the deflection of the beam continuously during deposition process.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.9
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• pp.119-129
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• 2007

The residual life expectancy of the container crane which has been operated more or less 39 years is examined carefully, especially on the boom structure. The basic load and load combination need to be considered for to analyse the boom structure. Various parts of container crane are modeled for to analyse stress, the deflection and the fatigue. Analysis results show that the boom is stable in the stress and deflection but the boom vertical member is over the fatigue life. The rail support beam and boom bottom chord are approximately near the fatigue life. Analysis results show that the residual life of rail support beam and the boom bottom chord would be 2.2 years and 6.8 years, respectively.

• Journal of Ocean Engineering and Technology
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• v.9 no.2
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• pp.20-29
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• 1995

When structures are constructed by welding, structural elements are always accompained by welding residual stress and deformation. Therefore, when the rigidity and strength of the welded structures is considered, it is very important to have sufficient information about the effect of initial deflection and welding residual stress on them. In this paper, the square plates with welding residual stress under compression are dealt with; First, heat conduction and thermal elastic-plastic problems are analyzed by finite element method using 4-node isoparametric elements for assessment on the ultimate strength of welding joint. Later, the ultimate strength of welding joint is assessed by examining the effect of changed type of loading. The specimens are 500{\times}$500mm(a/b=1) and 750{\times}$500mm(a/b=1.5) rectangular plates of whichthicknesses is 9.0mm and simply supported plates getting axiul load in each direction.

• Structural Engineering and Mechanics
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• v.89 no.6
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• pp.627-634
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• 2024

This research deals with the process of conducting a reinforced concrete slab loading test of a Residential Complex Project at the Shatt Al Arab District which is located in southern Iraq. The purpose of the test which represents a destructive test is to evaluate the structural behavior of the slab condition state during and after the examination of the test process in order to ascertain the ability of the slab ceiling to withstand the loads generated during the use of the building. The test was carried out accordant to ACI 437.2-13 code. The reason for this test is the postponed 8 years of building project construction. Concrete blocks were used to simulate and conduct a loading test of 30-tons for 3 days. The central point has been installed to measure the slab deflection that occurred during the test. The results showed that both the total deflection and residual deflections were lesser than the permissible values according to the ACI 437.2-13, the RC slab behavior was mainly linear structural behave, and that the purpose of the examination was achieved. Finally, a new method was introduced to the assessment of the slab condition at the support which is found in good condition.