• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2004.05a
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• pp.92-96
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• 2004

Scales, accumulated on semiconductor equipment parts during device fabrication processes, often lower equipment lifetime and production yields. Thus, many equipments parts have be cleaned regularly. In this study, an attempt to establish an effective process for the removal of scales on the sidewall of collimators in the chamber of sputter is made. The EDX analysis revealed that the scales are composed of Ti and TiN with the colummar structure. It was found that the heat-treatment at 700 for 1 min. after the oxide removal in the HF solution, and then etching in the HNO3 : H2SO4 : H2O =4:2:4 solution for 5.5 hrs at 67 was the most effective process for the scale removal.

• Journal of Environmental Science International
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• v.12 no.9
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• pp.1017-1023
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• 2003

The high speed elimination process of suspended solid was investigated to treat the pulp waste water by using surface modified magnetite particle and magnetic power. The effects of the various aluminum salts such as Al(NO$_3$)$_3$ㆍ9$H_2O$, AlC1$_3$ㆍ6$H_2O$, $Al_2$(SO$_4$)$_3$ㆍ13∼14 on the COD, BOD and suspended solid were systematically studied. It has been found that the 2.0 wt% of Al was most effective for the modification of Fe$_3$O$_4$ powder and then best for the treatment of pulp waste water, Optimum quantity of modified magnetite in this study was 12 wt%, and aging time was found to be 12 hours. Comparing with the conventional process, the required time for SS removal was drastically decreased. BOB and COD were also effectively removed when applied to the pulp wastewater.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.12
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• pp.549-554
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• 2006

In this paper we first applied the chemical mechanical polishing (CMP) process to the planarization of ferroelectric film in order to obtain a good planarity between electrode and ferroelectric film. $Pb_{1.1}(Zr_{0.52}Ti_{0.48})O_3$ (shortly PZT) ferroelectric film was fabricated by the sol-gel method. And then, we compared the structural characteristics before and after CMP process of PZT films. Removal rate, WIWNU% and surface roughness have been found to depend on slurry abrasive types and their hardness, especially, surface roughness and planarity were strongly depends on its pH value. A maximum in the removal rate is observed in the silica slurry, in contrast with the minimum removal rate occurs at ceria slurry. We found that the surface roughness of PZT films can be significantly reduced using the CMP technique.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.11
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• pp.1807-1812
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• 2004

The application of chemical mechanical polishing(CMP) has a long history. Recently, CMP has been used in the planarization of the interlayer dielectric(ILD) and metal used to form the multilevel interconnections between each layers. Therefore, much research has been conducted to understand the basic mechanism of the CMP process. CMP performed by the down force and the relative speed between pad and wafer with slurry is typical tribo-system. In general, studies have indicated that removal rate is relative to energy. Accordingly, in this study, CMP results will be analyzed by a viewpoint of the friction energy using friction force measurement. The results show that energy would not constant in the same removal rate conditions

• Advances in environmental research
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• v.5 no.1
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• pp.37-50
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• 2016

The main objective of this study is to evaluate adsorptive removal of Methylene Blue (MB) dye from aqueous solution using pumice powder. The effects of pH, adsorption time, agitation speed, adsorbent dose, and dye concentrations on dye adsorption were investigated. Process kinetics and isotherm model constants were determined accordingly. The results showed that adsorbent dose, dye concentration and agitation speed are the important parameters on dye adsorption and the removal of MB did not significantly change by varying pH. A total adsorption process time of 60 min was observed to be sufficient to effectively remove 50 mg/L MB concentration. The MB adsorption data obeyed both pseudo first order and second order kinetic models. Adsorption of MB by pumice fitted well both Langmiur and Freundlich isotherms ($R^2{\geq}0.9700$), except for 150 rpm agitation speed that system fitted only Langmiur isotherm. The results of this study emphasize that pumice powder can be used as a low cost and effective adsorbent for dye removal.

• Journal of Industrial and Engineering Chemistry
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• v.67
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• pp.326-332
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• 2018

In this study,the result shows that polyvinyl alcohol-sodium alginate (PVA-SA) gel bead crosslinked with sodium sulfate are better among the different methods by comparing the relative mechanical strength, mechanical strength swelling and expansion coefficient of beads in water. Subsequently, anammox biomass entrapment by PVA-SA gel was introduced into continuous stirred tank reactor (CSTR). After 24 operation days, the nitrogen removal efficiency achieved 60%, while the nitrogen loading rate (NLR) was $0.14kgN/m^3/d$ and the experiment data indicated that PVA-SA gel bead crosslinked with sodium sulfate can be used to initiate anammox process. Furthermore, it is an alternative for culturing anammox in a long-term operation.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.3
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• pp.122-128
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• 2021

Machining operations require removal of chips to keep the coolant clean and fresh throughout the operation time. In this study, microchip removal equipment was developed using AutoCAD and CATIA programs for 3D modeling and 2D draft. In addition, the flow analysis and electromagnetic field analysis of the equipment were performed using the COMSOL Multiphysics program. The flow design of the coolant oil tank was realized on the basis of fluid analysis results. Further, on the basis of magnetic density analysis, a conveyer was designed for effectively removing metal microchips in the tank by using arrays of neodymium permanent magnets.

• Journal of Korean Society of Environmental Engineers
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• v.32 no.1
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• pp.97-104
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• 2010

At present, the biological nutrient removal (BNR) process for removal of nitrogen and phosphorus is being constructing to keep pace with the reinforced standard of effluent quality and the traditional activated sludge process of preexistence is being promoting to retrofit. At the most case of retrofitting, processes are subjected to be under consideration as alternative BNR process for retrofitting. However, process evaluation methods are restricted to compare only treatment efficiency. Therefore, when BNR process apply, process evaluation was needed various method for treatment efficiency as well as sludge production and aeration cost, and all. In this study, the evaluation method of alternative process was suggested for the case for retrofitting S wastewater treatment plant which has been operated the standard activated sludge process. Three BNR processes for evaluation of proper alternatative process were selected and evaluated with suggested method. The selected $A^2$/O, VIP and DNR processes were evaluated using the mathematical model which is time and cost effective as well as gathered objective evaluation criteria. The evaluation between 5 individual criteria was possible including sludge production and energy efficiency as well as treatment performance. The objective final decision method for selection of optimal process was established through the fuzzy inference.

• Journal of Korean Society of Environmental Engineers
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• v.22 no.6
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• pp.1027-1035
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• 2000

This study was carried out to investigate the treatability of landfill leachate having high concentration of ammonium nitrogen with/without the circulation of media in pilot-scale($48m^3basis$) process. Total nitrogen removal efficiency was relatively increased in the media added process (influent ; $1.230{\sim}2,000mg{\cdot}l^{-1}$, effluent ; $120{\sim}250mg{\cdot}l^{-1}$) compared with the control process. The difference of nitrogen removal efficiency between these processes may be due to that stable growth of nitrifiers attached to the media could be achieved 99.3% of ammonium-nitrogen removal efficiency(without ; 98.2%) and 88.5% of total nitrogen removal efficiency(without ; 85.8%) were shown in media added process, respectively. Also, optimum BOD/ $NH_4{^+}$-N ratio was relatively decreased in the media process compared with the control process. Sludge settleability, on the other hand. was shown better in media added process than in control process. This outstanding sludge settleability in the media added process indicates the compatibility of media(zeolite) to the microorganism and the possibility of using media of biofilm process.

• Journal of Environmental Health Sciences
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• v.33 no.2 s.95
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• pp.150-157
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• 2007

The chemical and photochemical decolorization of Rhodamine B (RhB) in water has been carried out by Fenton, Fenton-like and photo-Fenton-like process. The effect of applied $H_2O_2,\;Fe^{2+}$ dosage (Fenton process), $H_2O_2,\;Fe^{\circ}$ dosage (Fenton-like and photo-Fenton-like process), UV light power (photo-Fenton-like process) pH (all processes) have been studied. The results obtained showed that more than 98% of color removal was obtained for the RhB solutions in every process. However, Fenton-like process was not suitable for the color removal of RhB because Fenton-like process was required much more reagents than Fenton and photo-Fenton-like process. The Fenton and photo-Fenton-like process showed similar reagents need. Optimum pH for three processes in this study is about pH 3. The relative order of sensitivity for pH of each process was: Fenton-like > photo-Fenton-like > Fenton.