• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.188-189
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• 2006

차세대 반도체 공정을 위한 많은 노력 중 미세가공의 중요성이 날로 증가함에 따라 reactive ion etching (RIE)에 대한 연구 또한 그 중요성이 커지고 있다. 본 논문에서는 RIE 과정에서 etch rate과 uniformity에 영향을 줄 수 있는 요인 4가지 즉, $CHF_3$, $O_2$, chamber pressure, RF power의 변화에 대한 실험 계획법(DOE)을 통해 계획하고, 실험한 후 neural network를 통해 학습함으로서 RIE 공정상의 최적화를 모색하였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.10
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• pp.808-813
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• 2009

Indium nitride thin films were deposited by the radio-frequency reactive magnetron sputtering method. The indium target was sputtered by the mixture flow ratio of $N_2$ to Ar, 9:1. The effects of growth temperature on the structural, optical, and electrical properties of the films were investigated. With increasing the growth temperature, the crystallinity of the films was improved, and the crystalline size was increased. The energy bandgap for the film grown at $25^{\circ}C$ was 3.63 eV, and the bandgap showed an increasing tendency on the growth temperature. The carrier concentration, Hall mobility and electrical resistivity of the films depended significantly on the growth temperature and the maximum Hall mobility of $32.3\;cm^2$/Vsec was observed for the film grown at $400^{\circ}C$.

• Journal of Soil and Groundwater Environment
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• v.17 no.4
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• pp.73-80
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• 2012

The objectives of this research were to study the applicability and limitations of permeable reactive barrier (PRB) for the removal of tetrachloroethylene (PCE) from the groundwater. PRB column tests were conducted using reactive material with Moringa Oleifera Mass - Bentonite (Mom-Bentonite). Most of the PCE in the groundwater was degraded and/or captured (sorpted) in the zone containing activated material (MOM-Bentonite). The removal rate of PCE from the groundwater was 90% and 75% after 30 days and 180 days, respectively. The effect of micro-organisms on the long-term permeability and reactivity of the barrier is not well understood. MOM-Bentonite PRB system in this research has the potential to be developed into an environmentally and economically acceptable technology for the in situ remediation of PCE-contaminated groundwater.

• Journal of Powder Materials
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• v.4 no.4
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• pp.243-251
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• 1997

Engine valve-shaped TiAl-Mn intermetallics containing 43.5 to 47.5at%Al (Mn/Al=0.036) are successively fabricated by reactive sintering the elemental powder mixtures near-net shaped by extrusion and die forging. A duplex structure consisted of lamellar grains and equiaxed $\gamma$ grains is developed for all compositions, and the areal fraction of the lamellar grains(or equiaxed $\gamma$ grains) decreases (or increases) with increasing Al content. As Al content increased, the elongation increases with accompanying decrease in yield strength and ultimate tensile strength at both room temperature and 80$0^{\circ}C$. This indicates that the suitable composition is Ti-45at%Al-1.6at%Mn in considering the balance of ambient and elevated tensile properties. The reactive-sintered Ti-45Al-1.6Mn alloy shows superior oxidation resistance not only to the plasma arc melted one but also to the heat resistance steel STR35(representative exhaust valve head material for automotive engine). The reactive-sintered Ti-45Al-1.6Mn alloy coated with an oxidizing scale exhibits a better wear resistance than induction hardened martensitic steel STR11(representative exhaust valve tip material for automotive engine).

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.7
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• pp.527-534
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• 1998

Thin film deposition of InN, which is a less-studied III-nitride compound semiconductor because of the difficulty if crystal growth, was performed by rf reactive sputtering method using In target and $N_2$reactive gas. The structrual, electrical, and optical properties of the produced films were measured and disussed according to the sputtering parameters such as deposition pressure, rf power, and substrate temperature. From the result of deposition pressure, rf power, and substrate temperature, we could obtain optimal conditions of 5m Torr, 60W, $60^{\circ}C$ for preparing InN thin film with high crystallinity, low carrier concentration, and high Hall mobility. The carrier concentration, Hall mobility, and optical bandgap of the fabricated InN thin films at optimal condition were $6.242\times10^{18}cm^{-3}, 212.526cm^2/V\cdot$ｓ, and 1.912eV, respectively.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.37 no.3
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• pp.304-308
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• 2024

In this paper, in order to analyze the PMU data of the accident section, we collected the raw data of a total of 35 PMU installed at the Yeonggwang substation and tried to find a way to analyze the data, and analyzed the data using Excel format and formula. As a result, the three-phase voltage and current data of the PMU were calculated using formulas in Excel and interpreted as effective and reactive power, and it was possible to check the effective and reactive power of the accident section through the graph to see why it was different from before the accident. As a result, it was confirmed that each power was greatly reduced in the graph of the effective and reactive power of the accident section, and it was confirmed that the loss occurred as the power of the accident section was greatly reduced.

• Journal of the Korea Institute of Military Science and Technology
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• v.15 no.5
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• pp.550-556
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• 2012

In this study, a series of ballistic experiments have been performed to investigate the protection mechanism of some inert reactive cassettes against shaped charge jet. Three kinds of material were tested as a core material of the inert cassettes, i.e. one of rubber materials, a high modulus and high strength composite material used for ballistic protection and a mixture of energetic materials. Parameters such as deformation of the cassettes, occurrence time of jet distortion, leading jet length and residual penetration depth were investigated from the experiments and they were compared to each other quantitatively according to the jet incidence angles. The results show that the increment of cassette deformation caused jet distortion to occur early and jet distortion brought decrease of the length of leading jet. Then the decrease of the length of leading jet accompanied the decrease of residual penetration depth.

• Journal of the Korean institute of surface engineering
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• v.47 no.6
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• pp.311-315
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• 2014

Indium tin oxide (ITO) thin films (30 nm) were deposited on PET substrate by reactive DC magnetron sputtering using In/Sn(2, 5 wt.%) metal alloy target without intentionally substrate heating during the deposition under different DC powers of 70 ~ 110 W. The electrical properties were estimated by Hall-effect measurements system. The resistivity of ITO thin film deposited using In/Sn (5 wt.%) metal alloy target at low DC power increased with increasing annealing time. However, they increased with increasing annealing time at high DC power. In the case of ITO (Sn 2 wt%), we can't find clear change in resistivity with increasing annealing time. However, carrier density and mobility showed difference behavior due to change of oxygen vacancy.

• Structural Engineering and Mechanics
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• v.84 no.6
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• pp.783-798
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• 2022

This study attempts to investigate the impact of thickness stretching and nonlinear hygro-thermo-mechanical loading on the bending behavior of FG beams. Young's modulus, thermal expansion, and moisture concentration coefficients vary gradually and continuously according to a power-law distribution in terms of the volume fractions of the constituent materials. In addition, the interaction between the thermal, mechanical, and moisture loads is involved in the governing equilibrium equations. Using the present developed analytical model and Navier's solution technique, the numerical results of non-dimensional stresses and displacements are compared with those obtained by other 3D theories. Furthermore, the present analytical model is appropriate for investigating the static bending of FG beams exposed to intense hygro-thermo-mechanical loading used for special technical applications in aerospace, automobile, and civil engineering constructions.

• Steel and Composite Structures
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• v.44 no.3
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• pp.353-369
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• 2022

This study attempts to shed light on the coupled impact of types of loading, thickness stretching, and types of variation of Winkler-Pasternak foundations on the flexural behavior of simply- supported FG plates according to the new quasi-3D high order shear deformation theory, including integral terms. A new function sheep is used in the present work. In particular, both Winkler and Pasternak layers are non-uniform and vary along the plate length direction. In addition, the interaction between the loading type and the variation of Winkler-Pasternak foundation parameters is considered and involved in the governing equilibrium equations. Using the virtual displacement principle and Navier's solution technique, the numerical results of non-dimensional stresses and displacements are computed. Finally, the non-dimensional formulas' results are validated with the existing literature, and excellent agreement is detected between the results. More importantly, several complementary parametric studies with the effect of various geometric and material factors are examined. The present analytical model is suitable for investigating the bending of simply-supported FGM plates for special technical engineering applications.