• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.207-212
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• 2006

A dynamic analysis of a tilting actuator for projection TV is presented in this study. Generally, an excessive vibration of a tilting actuator is occurred a lowering of video quality of projection TV because of a dynamic unstability of it. Therefore, a dynamic analysis of a tilting actuator system is positively necessary. In this study, a mathematical model about a mirror-reactive type tilting actuator is presented and evidenced by experiment. A FEM model of a lens-transmissive type tilting actuator is presented and we made prototype of it. Then, it is evidenced by experiment. Besides, a design for hinge configuration of it is presented.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.2
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• pp.192-198
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• 2008

A dynamic analysis of a tilting actuator for a projection TV is presented in this study. Severe vibration of a tilting actuator deteriorates the video quality of a projection TV. For this reason, a dynamic analysis of the tilting actuator system is essential to improve the video quality. The dynamic behaviors of the mirror reactive-type tilting actuator are examined in order to obtain design requirements of the lens transmissive-type tilting actuator. Based on these design requirements, a basic design is performed for the lens transmissive-type tilting actuator. With the basic design, the dynamic characteristics of the lens transmissive-type actuator are investigated by the finite element analysis After the prototype of the actuator is manufactured, the dynamic behaviors of the prototype are examined by experiments. As a result of this study, a new design for the hinge configuration of the actuator is suggested for better performance.

• Proceedings of the KIEE Conference
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• 1998.07g
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• pp.2515-2517
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• 1998

The micro fresnel lens(MFL) was modeled and fabricated on a XY-stage electrostatically driven by comb actuator. The modeled MFL was approximated as a step shape with 4-phase and 4-zone plate. The focal length and diameter of the MFL is 20mm and 912${\mu}m$, respectively. The XY-stage suspending the MFL is designed to generate a large static displacement up to about 20${\mu}m$. On SOI substrates, we first fabricated MFL using the RIE(reactive Ion etching) technology and then patterned and etched bulk silicon to make XY-stage. After the fabrication of all structures on top side of the SOI substrates. $Si_3N_4$ was deposited for passivation of all structures using PECVD(plasma enhanced chemical vapor deposition). All the MFL systems width comb drive actuator were released by KOH etching from the bottom side of the SOI wafer using double-sided alignment technique. In fabrication of MFL, a dry etching conditions is established in order to improve surface roughness and to control the etched depth.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.10a
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• pp.381-385
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• 2003

This paper presents the fabrication possibility of the micro actuator which uses a micro-thermal bubble, generated by a micro-heater under pulse heating. The micro-actuator is consist of three plate. The lower plate includes the channel and chamber are fabricated on high processability silicon wafer by the DRIE(Deep Reactive ion Etching) process. The middle plate includes the chamber and diaphragm, and the upper plate is the micro-heater. The micro-heater designed non-uniform width and results in periodic generation of stable single bubbles in D.I water. The single bubble appears precisely on the narrow part of the micro-heater and control is recorded.

• Proceedings of the KSME Conference
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• 2001.06b
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• pp.295-300
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• 2001

In recent years, as changing the habit of eating, the pathology in the colon grows up annually. For that reason, the colonoscopy is generalized. But it requires much time to acquire a dexterous skill to perform an operation. And the procedure is painful to the patient. Therefore, biomedical and robotic researchers are developing a locomotive colonoscope that can travel safely in colon. In this paper, we propose a novel design and concept of semi-autonomous colonoscope and two actuators for the micro robot. The micro robot comprises camera and LED for diagnosis, steering system to pass through the loop, pneumatic actuator and bow-shaped flexible supporters to control a contact force and to keep the space between colon wall and the actuator. For actuating mechanism, we suggest two models. One is based on the reaction force, and the other is impact force. In order to validate the concept and the performance of the actuators, we carried out the preliminary experiments in rigid pipes.

• JSTS:Journal of Semiconductor Technology and Science
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• v.2 no.4
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• pp.259-267
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• 2002

We present a novel 3D fabrication method with single X-ray process utilizing an X-ray mask in which a micro-actuator is integrated. An X-ray absorber is electroplated on the shuttle mass driven by the integrated micro-actuator during deep X-ray exposures. 3D microstructures are revealed by development kinetics and modulated in-depth dose distribution in resist, usually PMMA. Fabrication of X-ray masks with integrated electrothermal xy-stage and electrostatic actuator is presented along with discussions on PMMA development characteristics. Both devices use $20-\mu\textrm{m}$-thick overhanging single crystal Si as a structural material and fabricated using deep reactive ion etching of silicon-on-insulator wafer, phosphorous diffusion, gold electroplating, and bulk micromachining process. In electrostatic devices, $10-\mu\textrm{m}-thick$ gold absorber on $1mm{\times}1mm$ Si shuttle mass is supported by $10-\mu\textrm{m}-wide$, 1-mm-long suspension beams and oscillated by comb electrodes during X-ray exposures. In electrothermal devices, gold absorber on 1.42 mm diameter shuttle mass is oscillated in x and y directions sequentially by thermal expansion caused by joule heating of the corresponding bent beam actuators. The fundamental frequency and amplitude of the electrostatic devices are around 3.6 kHz and $20\mu\textrm{m}$, respectively, for a dc bias of 100 V and an ac bias of 20 VP-P (peak-peak). Displacements in x and y directions of the electrothermal devices are both around $20{\;}\mu\textrm{m}$at 742 mW input power. S-shaped and conical shaped PMMA microstructures are demonstrated through X-ray experiments with the fabricated devices.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.10
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• pp.2187-2193
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• 2002

We present a novel method for 3D microfabrication with LIGA process that utilizes a deep X-ray mask in which a micro-actuator is integrated. The integrated micro-actuator oscillates the X-ray absorber, which is formed on the shuttle mass of the micro-actuator, during X-ray exposures to modify the absorbed dose profile in X-ray resist, typically PMMA. 3D PMMA microstructures according to the modulated dose contour are revealed after GG development. An X-ray mask with integrated comb drive actuator is fabricated using deep reactive ion etching, absorber electroplating, and bulk micromachining with silicon-on-insulator (SOI) wafer. 1mm $\times$ 1 mm, 20 $\mu$m thick silicon shuttle mass as a mask blank is supported by four 1 mm long suspension beams and is driven by the comb electrodes. A 10 $\mu$m thick, 50 $\mu$m line and spaced gold absorber pattern is electroplated on the shuttle mass before the release step. The fundamental frequency and amplitude are around 3.6 kHz and 20 $\mu$m, respectively, for a do bias of 100 V and an ac bias of 20 $V_{p-p}$ (peak-peak). Fabricated PMMA microstructure shows 15.4 $\mu$m deep, S-shaped cross section in the case of 1.6 kJ $cm^{-3}$ surface dose and GG development at 35$^{\circ}C$ for 40 minutes.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.06a
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• pp.291-298
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• 2000

This paper describes a theoretical and experimental investigation into an active vibration isolation system in which four electromagnetic actuators are installed in parallel with each of four passive mounts placed between a piece of equipment and a vibrating base structure. Decentralised velocity feedback control is employed, where each actuator is operated independently by feeding back the absolute equipment velocity at the same location. Although one end of each actuator acts at the sensor positions on the equipment, the control system is not collocated because of the reactive forces acting on the flexible base structure, whose dynamics are strongly coupled with the mounted equipment. Isolation of low frequency vibration is considered where the equipment can be modelled as a rigid body and the mounts as lumped parameter springs and dampers. Control mechanisms are discussed, and some experimental and simulation results are reported.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.463-467
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• 2004

This paper presents the fabrication possibility of the micro actuator which uses a micro-thermal bubble, generated b micro-heater under pulse heating. The valve-less micropump using the diffuser/nozzle is consists of the lower plate, he middle plate, the upper plate. The lower plate includes the channel and chamber are fabricated on high processability silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The middle plate includes the chamber and diaphragm d the upper plate is the micro-heater. The Micropump is fabricated by bonding process of the three layer. This paper resented the possibility of the PCR chip operation by the fabricated micropump.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.63 no.10
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• pp.1347-1353
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• 2014

This paper researches a modeling and experiment of 50kW diesel generator in grid-connected mode. The output of diesel generator can be calculated by the phase difference between voltage and current as well as the diesel generator parameter such as mutual impedance, field current and rotor angle. Considering the different d-q frame impedance, the output of diesel generator is analyzed for equation and verified by simulation. The diesel generator modeled by considering the time delay for actuator, diesel engine and exciter. The controller of diesel generator is divided into governor and exciter. The governor consists of speed controller and active power controller, where speed controller maintains frequency as 60Hz and active power tracks active power reference. On the other hand, the exciter consists of voltage controller and reactive power controller, where voltage controller controls $380V_{LL}$ and reactive power is controlled as zero. When the active power reference is changed as 0.1pu in the grid connected mode, the active power takes 10 seconds to reach the steady state and the reactive power is maintains as zero. The 50kW diesel generator is tested and experiment results are well matched with the simulation results.