• Title/Summary/Keyword: Re-oxidation

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증착방법을 달리한 $TiO_2$ 박막의 표면처리에 따른 저항변화 특성 연구

  • Seong, Yong-Heon;Kim, Sang-Yeon;Do, Gi-Hun;Seo, Dong-Chan;Jo, Man-Ho;Go, Dae-Hong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.206-206
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    • 2010
  • 정보화 기술이 급속히 발전함에 따라서 보다 많은 양의 data를 전송, 처리, 저장 하게 되면서 이를 처리 할 수 있는 대용량, 고속, 비휘발성의 차세대 메모리의 개발이 요구 되고 있다. 이 중 저항 변화 메모리(ReRAM)는 일반적으로 전이금속산화물을 이용한 MIM 구조로서 적당한 전기 신호를 가하면 저항이 높아서 전도되지 않는 상태(Off state)에서 저항이 낮아져 전도가 가능한 상태(On state)로 바뀌는 메모리 특성을 가진다. ReRAM은 비휘발성 메모리이며 종래의 비휘발성 기억소자인 Flash memory 보다 access time이 $10^5$배 이상 빠르며, 2~5V 이하의 낮은 전압에서 동작이 가능하다. 또한 구조가 간단하여 공정상의 결함을 현저히 줄일 수 있다는 점 등 많은 장점들이 있어서 Flash memory를 대체할 수 있는 유력한 후보로 여겨지고 있다. 저항 변화의 특징을 잘 나타내는 물질에는 $TiO_2$, $Al_2O_3$, $NiO_2$, $HfO_2$, $ZrO_2$등의 많은 전이금속산화물들이 있다. 본 연구에서는 Reactive DC-magnetron Sputtering 방법과 DC-magnetron sputter를 이용하여 Ti를 증착한 후 Oxidation 방법으로 각각 증착한 $TiO_2$박막을 사용하여 저항변화특성을 관찰하였다. $TiO_2$상부에 Atomic Layer Deposition (ALD)를 이용하여 $HfO_2$ 박막을 증착하여 표면처리를 하고, 또한 $TiO_2$에 다른 전이 금속박막 층을 추가 증착하여 저항변화 특성에 접합한 조건을 찾는 연구를 진행하였다. 하부 전극과 상부 전극 물질로는 Si 100 wafer 위에 Pt 또는 TiN을 사용하였다. 저항변화 특성을 평가하기 위해 Agilent E5270B를 이용하여 current-voltage (I-V)를 측정하였다. X-ray Diffraction (XRD)를 이용하여 증착 된 전기금속 박막 물질의 결정성을 관찰했으며, Atomic Force Microscopy (AFM)을 이용하여 증착 된 샘플의 표면을 관찰했다. SEM과 TEM을 통해서는 sample의 미세구조를 확인 하였다.

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Electrical Properties of Donor-doped BaTiO3 Ceramics by Attrition Milling and Calcination Temperature (분쇄 방법 및 하소온도에 따른 Doner-doped BaTiO3의 전기적 특성)

  • Lee, Jeong-Cheol;Myong, Seong-Jae;Chun, Myoung-Pyo;Cho, Jeong-Ho;Kim, Byung-Ik;Shin, Dong-Wook
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.3
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    • pp.217-221
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    • 2008
  • In this study, We have been investigated the effect of calcination temperature and high-energy ball-milling of powder influences the $BaTiO_3$-based PTCR(Positive Temperature coefficient Resistance) characteristics and microstructure. The mixed powder was obtained from $BaCO_3$, $TiO_2$, $CeO_2$ ball-milled in attrition mill. The mixed powder was calcine from 1000 $^{\circ}C$ to 1200 $^{\circ}C$ in air and then it was sintered in reduction- re-oxidation atmosphere. As a result, The room-temperature electrical resistivity decreased and increased with increasing calcination temperature. specially, Attrition milled powder could have low room-temperature resistivity and high PTC jump order at 1100 $^{\circ}C$. attrition milling had lower room-temperature resistivity than ball milling. Particle size decreased by Attrition milling of powder influences in calcination temperature and room-temperature resistivity.

Effect of Reduction-Reoxidation Firing on PTCR Properties of Sm-doped Barium Titanate Ceramics (Sm이 첨가된 티탄산바륨의 PTCR 특성에 대한 환원-재산화의 영향)

  • Chun, Myoung-Pyo;Myoung, Seong-Jae;Han, Ik-Hyun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.35-38
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    • 2005
  • The effect of reduction and re-oxidation firing on the PTCR properties of Sm-doped Barium Titanate ceramics was investigated for the application of multilayered PTC thermistor. The lattice parameter a, c decreases monotonically with increasing oxygen concentration in the reoxidation atmosphere, which seems to be related with the electrostatic Coulomb interaction between oxygen vancancy and nearest other atoms. With increasing oxygen concentration, the resistivity at room temperature and the magnitude of resistivity jump as a function of temperature increased in the region of oxygen concentration of 0 $\sim$ 10%. However, the resistivity at room temperature and the magnitude of resistivity jump is nearly constant and saturated in the region of oxygen concentration of 10 $\sim$ 20%. These phenomena is considered to be related with the variation of oxygen and barium-vancany concentration near the grain boundary.

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Electrochemical Study of Functional Organic Monomolecular Film prepared by Langmuir-Blodgett Method (기능성 유기 LB단분자막의 전기화학적 연구)

  • 박수길;임기조;전일철;이주성
    • Journal of the Korean institute of surface engineering
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    • v.28 no.1
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    • pp.34-45
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    • 1995
  • An amphiphilic nitroxide radical(2,2'6,6'-tetramethyl-4-octadecyioxy-1-piperidinyloxyl, TEMOPO) or mixture of TEMOPO and arachidic acid(Icosanoic acid, AA), was spread on water surface by the Langmuir-Blodgett(LB) method and surface pressure-area curve was measured. Such monolayer films of TEMOPO were transferred onto surfaces of photo transferable tin oxide electrodes(PTTO) by the LB method under various surface pressure with the transfer ratio of larger than 0.95 at the surface pressure higher than 15mN/m. The electrochemical effect of functional nitroxy radical monolayer onto semi-conductive electrode to electrolyte have been investigated by using LB method. Cyclic voltammetry technique was used for the electrochemical behavior measurement of TEMOPO monolayer onto the PTTO in 0.18 mo1/$dm^3$ $H_2SO_4$ solutions. The shape of voltammograms was found to change from one electrode to another. The amount of charge for the oxidation and the re-reduction of the cation to TEMOPO were evaluated from graphical integration. The amounts of charge were always smaller than those predicted from the $\pi$-$\sigma$ curves though the transfer ratio was unity. The poor reproducibility of the cyclic voltammograms was improved by the mixing with AA. Structure and arrangement of monomolecular layer on water surface and electrode were studied. Characteristics of monolayer film applied for the mediation reaction was also discussed by electrochemical method.

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Comparison of HVOF Thermal Spray Coatings of T800 and WC-Co Powders

  • Cho, T.Y.;Yoon, J.H.;Kim, K.S.;Baek, N.K.;Song, K.O.;Youn, S.J.;Hwang, S.Y.;Chun, H.G.
    • Journal of the Korean institute of surface engineering
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    • v.39 no.6
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    • pp.295-301
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    • 2006
  • Hard chrome plating has been used in surface hard coating over 50 years both for applying hard coating and re-building of worn components. Hard chrome plating solution and mist pollute environment with very toxic $Cr^{6+}$(hex-Cr) known as carcinogen which causes lung cancer, High velocity oxy-fuel (HVOF) thermal spray coatings of WC base cermet and Co-alloy powders are the most promising candidates for the replacement of the traditional hard chrome plating. Surface properties, wear, and friction behaviors of micron size Co-alloy (T800) and micron size WC-l2Co (WC-Co) have been studied for the application as hard coatings. The temperature dependence of wear and friction behaviors of T800 and WC-Co have been investigated at the temperature of $25^{\circ}C$ and $538^{\circ}C$ for the application to high speed spindle.

DFT/B3LYP Study of the Substituent Effects on the Reaction Enthalpies of the Antioxidant Mechanisms of Magnolol Derivatives in the Gas-Phase and Water

  • Najafi, Meysam;Najafi, Mohammad;Najafi, Houshang
    • Bulletin of the Korean Chemical Society
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    • v.33 no.11
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    • pp.3607-3617
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    • 2012
  • In this paper, the study of various ortho- and meta-substituted Magnolol derivatives is presented. The reaction enthalpies related to three antioxidant action mechanisms HAT, SET-PT and SPLET for substituted Magnolols have been calculated using DFT/B3LYP method in gas-phase and water. Calculated results show that electron-withdrawing substituents increase the bond dissociation enthalpy (BDE), ionization potential (IP) and oxidation/reduction enthalpy (O/RE), while electron-donating ones cause a rise in the proton dissociation enthalpy (PDE) and proton affinity (PA). In ortho- position, substituents show larger effect on reaction enthalpies than in meta-position. In comparison to gas-phase, water attenuates the substituent effect on all reaction enthalpies. In gas-phase, BDEs are lower than PAs and IPs, i.e. HAT represents the thermodynamically preferred pathway. On the other hand, SPLET mechanism represents the thermodynamically favored process in water. Results show that calculated enthalpies can be successfully correlated with Hammett constants (${\sigma}_m$) of the substituted Magnolols. Furthermore, calculated IP and PA values for substituted Magnolols show linear dependence on the energy of the highest occupied molecular orbital ($E_{HOMO}$).

Fate and Transport of Mercury in Environmental Media and Human Exposure

  • Kim, Moon-Kyung;Zoh, Kyung-Duk
    • Journal of Preventive Medicine and Public Health
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    • v.45 no.6
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    • pp.335-343
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    • 2012
  • Mercury is emitted to the atmosphere from various natural and anthropogenic sources, and degrades with difficulty in the environment. Mercury exists as various species, mainly elemental ($Hg^0$) and divalent ($Hg^{2+}$) mercury depending on its oxidation states in air and water. Mercury emitted to the atmosphere can be deposited into aqueous environments by wet and dry depositions, and some can be re-emitted into the atmosphere. The deposited mercury species, mainly $Hg^{2+}$, can react with various organic compounds in water and sediment by biotic reactions mediated by sulfur-reducing bacteria, and abiotic reactions mediated by sunlight photolysis, resulting in conversion into organic mercury such as methylmercury (MeHg). MeHg can be bioaccumulated through the food web in the ecosystem, finally exposing humans who consume fish. For a better understanding of how humans are exposed to mercury in the environment, this review paper summarizes the mechanisms of emission, fate and transport, speciation chemistry, bioaccumulation, levels of contamination in environmental media, and finally exposure assessment of humans.

Influence of oxytetracycline on the fate of Nitrogen species in a recirculating aquaculture system

  • Medriano, Carl A.D.;Yoon, Hyojik;Chandran, Kartik;Khanal, Samir.K.;Lee, Jaewoo;Cho, Yunchul;Kim, Sungpyo
    • Membrane and Water Treatment
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    • v.9 no.2
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    • pp.123-128
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    • 2018
  • Common aquaculture practices include the use of certain pharmaceuticals such as antibiotics in avoiding diseases and promoting a healthier growth of the culture. The aim of this study is to monitor and assess the influence of different low oxytetracycline concentrations on the transformation of nitrogen compounds under aeration condition in a lab-scale recirculating aquaculture system (RAS). Over $1mg\;L^{-1}$ dose of oxytetracycline to aquaculture had induced ammonia($NH_4-N$), nitrate($NO_3-N$), soluble COD accumulation in RAS. In addition, nitrous oxide ($N_2O$) emission from RAS was significantly reduced during the oxytetracycline dose periods. After ceasing the dose of oxytetracycline, ammonia oxidation and nitrous oxide re-emission were observed. This observation indicated that low concentrations of oxytetracycline could affect the nitrogen species in RAS. Also, the emission mechanisms of $N_2O$ may not be only dependent on nitrification process but also dependent on denitrification process in our RAS system.

Mercury Ions Mediated Phosphorus Containing Carbon Dots as Fluorescent Probe for Biothiols Screening

  • Du, Han;Xu, Hu;Zhao, Yun;Li, Dan;Wang, Yuhong
    • Nano
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    • v.13 no.10
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    • pp.1850116.1-1850116.14
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    • 2018
  • In this study, we report the mercury ions ($Hg^{2+}$) mediated phosphorus-containing carbon dots (PCDs) as a selective "off-on" fluorescence probe for glutathione (GSH), cysteine (Cys) and homocysteine (Hcys). PCDs obtained by hydrothermal reaction are sensitive to $Hg^{2+}$ ions and its fluorescence can be significantly quenched owing to the electron transfer from the lowest unoccupied molecular orbital (LUMO) of PCDs to $Hg^{2+}$. Interestingly, the weak fluorescence of $Hg^{2+}$-mediated PCDs could be gradually recovered with the addition of GSH, Cys and Hcys. This can be attributed to the formation of $Hg^{2+}-S$ complex due to the super affinity of $Hg^{2+}$-sulfydryl bond. The formation of $Hg^{2+}-S$ complex extremely reduces the oxidation ability of $Hg^{2+}$ that inhibits the electron transfer from LUMO of PCDs to $Hg^{2+}$ and re-opens the native electron transition from LUMO to the highest occupied molecular orbital (HOMO) of PCDs. Thus, the green fluorescence of PCDs is switched on. Furthermore, the present $Hg^{2+}$-mediated PCDs assay exhibits a high selectivity for GSH, Cys and Hcy and has been successfully used to detect the total biothiols content in human urine samples.

Analysis of Wafer Cleaning Solution Characteristics and Metal Dissolution Behavior according to the Addition of Chelating Agent (착화제 첨가에 따른 웨이퍼 세정 용액 특성 분석 및 금속 용해 거동)

  • Kim, Myungsuk;Ryu, Keunhyuk;Lee, Kun-Jae
    • Journal of Powder Materials
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    • v.28 no.1
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    • pp.25-30
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    • 2021
  • The surface of silicon dummy wafers is contaminated with metallic impurities owing to the reaction with and adhesion of chemicals during the oxidation process. These metallic impurities negatively affect the device performance, reliability, and yield. To solve this problem, a wafer-cleaning process that removes metallic impurities is essential. RCA (Radio Corporation of America) cleaning is commonly used, but there are problems such as increased surface roughness and formation of metal hydroxides. Herein, we attempt to use a chelating agent (EDTA) to reduce the surface roughness, improve the stability of cleaning solutions, and prevent the re-adsorption of impurities. The bonding between the cleaning solution and metal powder is analyzed by referring to the Pourbaix diagram. The changes in the ionic conductivity, H2O2 decomposition behavior, and degree of dissolution are checked with a conductivity meter, and the changes in the absorbance and particle size before and after the reaction are confirmed by ultraviolet-visible spectroscopy (UV-vis) and dynamic light scattering (DLS) analyses. Thus, the addition of a chelating agent prevents the decomposition of H2O2 and improves the life of the silicon wafer cleaning solution, allowing it to react smoothly with metallic impurities.