Global analysis of heat transfer in Si CZ furnace with specular and diffuse surfaces
-
- 한국결정성장학회:학술대회논문집
- /
- 한국결정성장학회 1998년도 PROCEEDINGS OF THE 14TH KACG TECHNICAL MEETING AND THE 5TH KOREA-JAPAN EMGS (ELECTRONIC MATERIALS GROWTH SYMPOSIUM)
- /
- pp.45-48
- /
- 1998