• Title/Summary/Keyword: RF-type

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Fabrication of Diamoud Thin Films using RF Plasma (RF 플라즈마를 이용한 다이아몬드 박막의 제조)

  • 신재균;현준원
    • Journal of the Korean institute of surface engineering
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    • v.31 no.3
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    • pp.165-170
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    • 1998
  • Deposition of diamond on silicon substrates has been performed by RF HPCVD (Helicon Plasma Chemical Vapor Deposition) from methane-hydrogen gas mixture. Growth properties and deposition condition conditions have been studies as functions of substrate temperature ($750^{\circ}C$~$850^{\circ}C$). Si p-type (100) wafers were used as a substrate. The chharecterizations of the gaind thin films by SEM, AFM and Raman seattring are diamond crystallites which include disordered graphit.

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The structure and optical properties of n-type and p-type porous silicon (n-type과 p-type 다공성 실리콘의 구조와 광학적 특성에 관한 연구)

  • 박현아;오재희;박동화;안화승;태원필;이종무
    • Journal of the Korean Vacuum Society
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    • v.12 no.4
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    • pp.257-262
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    • 2003
  • The structure and optical properties of n-type and p-type porous silicon (PS) prepared by the chemical etching in the light and the dark, respectively, are reported in this paper. Microstructural features of the samples are mainly investigated by SEM, AFM XRDGI techniques. Also, their optical properties are investigated by photoluminescence (PL) and Fourier transform infrared absorption measurements. In the n-type PS, the room temperature photoluminescence is observed in a visible range from 500 nm to 650 nm in contrast to that in the blue region (400∼650 nm) in p-type PS. Further, semi-transparent Cu films in thickness range of ∼40 nm are deposited by rf-magnetron sputtering on PS to investigate the I-V characteristics of the samples.

A study on the Characteristics of RF switch module on 1${\sim}$3 GHz Band (1${\sim}$3 GHz 대역의 GMS Type Switch Module 특성에 관한 연구)

  • Kim, In-Sung;Song, Jae-Sung;Suh, Young-Suk
    • Proceedings of the KIEE Conference
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    • 2004.07c
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    • pp.1673-1675
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    • 2004
  • The design, modeling and measurement of RF switch module for GSM applications is presented in this paper. RF switch module is constructed using a LTCC multi-layer switching circuit and integrated low pass filter. Insertion and return loss of the low pass filter were designed less than 0.3 dB and better than 12.7 dB at 900 MHz. The RF switch module contained 10 embedded passives and 3 surface mount components integrated on $4.6{\times}4.8{\times}1.2$ mm, 6-layer multi-layer integrated circuit. The insertion loss of switch module was measured at 900 MHz was 11 dB.

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Online output power measurement of full-bridged MOS-FET RF power inverter operating at shortwave frequency

  • Suzuki, Taiju;Suyama, Tetsuji;Yamamoto, Tetsuya;Ikeda, Hiroaki;Yoshida, Hirofumi;Shinohara, Shigenobu
    • 제어로봇시스템학회:학술대회논문집
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    • 1991.10b
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    • pp.1920-1923
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    • 1991
  • An online RF power measurement is needed for the full-bridged MOS-FET RF power inverter because the output current and/or voltage waveform is other than sinusoidal. In order to satisfy the requirement, the online measurement of the output power of this type of RF power inverter by the use of the PC-98 personal computer has been presented. The current and voltage waveforms are sensed by the digital oscilloscope probes so as to obtain the instantaeous power and they are entered into the PC98 personal computer so as to average the instantaneous powers. The RF power of up to 1 kw at 1 MHz measured for the power inverter at the output transformer. This method was confirmed to be applied to evaluate the load resistance change with temperature.

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Si기판상의 BST박막 제조를 위한 MgO 완충층의 제조 및 특성

  • 최명률;이태일;박인철;김홍배
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2002.11a
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    • pp.10-13
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    • 2002
  • 본 논문에서는 P-type (100)Si 기판위에 RF magnetron sputtering법으로 강유전체 BST 박막을 증착하기 위한 완충층용(buffer layer) MgO 박막을 제작하였다. 증착 시 기판온도는 $400^{\circ}C$, 작업가스 Ar:$O_2$:=80:20, 작업진공 10m torr에서 RF 파워를 25W, 50W, 7SW로 변화하면서 증착하여 최적의 RF 파워조건을 확립하였다. XRD 측정결과 RF 파워 세기에 관계없이 MgO(200)피크만 관찰되었고 RF 파워 5OW에서 제작한 박막이 가장 양호한 결정성을 나타내었고 이 때 I-V측정결과 $\pm$ 1.5 MV/$cm^2$에서 $10^{-7}$A/$cm^2$이하의 양호한 누설전류특성을 나타내었고 C-V 측정결과 히스테리시스가 거의없는 양호한 인터페이스 특성을 보여주었고 비유전율은 약 8.4였다.

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A study on the design and fabrication of electrostatically actuatedRF MEMS switches (정전 구동형 RF MEMS 스위치의 설계 및 제작에 관한 연구)

  • Park, Jae-Hyoung
    • Journal of Sensor Science and Technology
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    • v.19 no.4
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    • pp.320-327
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    • 2010
  • In this paper, electrostatically actuated direct contact type RF MEMS switches have been designed and demonstrated. As driving structures of the switch, cantilever, bridge, and torsion spring beam structures are used and the actuation voltage characteristics of the switches have been compared and discussed. The designed RF switches are fabricated with the surface micromachining technology using the electroplated gold and nickel structures. The characteristics of the fabricated switches are measured and analyzed. The switch, which is fabricated using the 510 ${\mu}m$-length bridge structure with the thickness of 1.5 ${\mu}m$, is actuated with 15 V driving voltage. The insertion losses are less than 0.2 dB over the measured frequency ranges from 0 to 20 GHz and the isolations are more than 30 dB.

Study on Characteristics of Various RF Transmission Line Structures on PES Substrate for Application to Flexible MMIC

  • Yun, Young;Kim, Hong Seung;Jang, Nakwon
    • ETRI Journal
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    • v.36 no.1
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    • pp.106-115
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    • 2014
  • In this work, the coplanar waveguide is fabricated on a PES (poly[ether sulfone]) substrate for application to a flexible monolithic microwave integrated circuit, and its RF characteristics were thoroughly investigated. The quality factor of the coplanar waveguide on PES is 40.3 at a resonance frequency of 46.7 GHz. A fishbone-type transmission line (FTTL) structure is also fabricated on the PES substrate, and its RF characteristics are investigated. The wavelength of the FTTL on PES is 5.11 mm at 20 GHz, which is 55% of the conventional coplanar waveguide on PES. Using the FTTL, an impedance transformer is fabricated on PES. The size of the impedance transformer is $0.318mm{\times}0.318mm$, which is 69.2% of the size of the transformer fabricated by the conventional coplanar waveguide on PES. The impedance transformer showed return loss values better than -12.9 dB from 5 GHz to 50 GHz and an insertion loss better than -1.13 dB in the same frequency range.

Characterization and Emission/Absorption Study of a Grimm-type Glow discharge source in the application of high frequency Glow Discharge (고주파 글로우 방전을 이용한 GRIMM형 방전원의 특성 및 방출/흡광분석법 연구)

  • Suh, Jung-Gee;Woo, Jin-Chun
    • Analytical Science and Technology
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    • v.7 no.2
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    • pp.155-164
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    • 1994
  • A conventional Grimm-type glow discharge source was constructed and applied to radio-frequency(13.56MHz) discharge for metal and ceramic analysis. We investigated the emission spectrum for aluminium and aluminium oxide and the influence of discharge operating paramaters including argon pressure, rf-power and DC-bias voltages at the sample-side electrode. Scanning Electron Microscope(SEM) also was used to investigate the effect of rf-sputtering on the microstructure formation of the aluminium oxide. Linear analytical calibration curves were constructed for Manganese and zinc element in samples of low alloy steel(BAS 401-405) and brass(NIST 1108-1117).

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An Assessment of a Random Forest Classifier for a Crop Classification Using Airborne Hyperspectral Imagery

  • Jeon, Woohyun;Kim, Yongil
    • Korean Journal of Remote Sensing
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    • v.34 no.1
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    • pp.141-150
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    • 2018
  • Crop type classification is essential for supporting agricultural decisions and resource monitoring. Remote sensing techniques, especially using hyperspectral imagery, have been effective in agricultural applications. Hyperspectral imagery acquires contiguous and narrow spectral bands in a wide range. However, large dimensionality results in unreliable estimates of classifiers and high computational burdens. Therefore, reducing the dimensionality of hyperspectral imagery is necessary. In this study, the Random Forest (RF) classifier was utilized for dimensionality reduction as well as classification purpose. RF is an ensemble-learning algorithm created based on the Classification and Regression Tree (CART), which has gained attention due to its high classification accuracy and fast processing speed. The RF performance for crop classification with airborne hyperspectral imagery was assessed. The study area was the cultivated area in Chogye-myeon, Habcheon-gun, Gyeongsangnam-do, South Korea, where the main crops are garlic, onion, and wheat. Parameter optimization was conducted to maximize the classification accuracy. Then, the dimensionality reduction was conducted based on RF variable importance. The result shows that using the selected bands presents an excellent classification accuracy without using whole datasets. Moreover, a majority of selected bands are concentrated on visible (VIS) region, especially region related to chlorophyll content. Therefore, it can be inferred that the phenological status after the mature stage influences red-edge spectral reflectance.

Site Plan of High-enthalpy Plasma Research Center in Chonbuk National University (전북대학교 고온플라즈마응용연구센터 Site Plan)

  • Kim, Min-Ho;Choi, Seong-Man;Seo, Jun-Ho;Choi, Chea-Hong;Hong, Bong-Guen
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2010.11a
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    • pp.764-767
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    • 2010
  • The high enthalpy plasma research center in Chonbuk national university is under construction for MW class plasma wind tunnel. Four types of plasma equipment will be installed in the research center. The equipments are 1set of 0.4 MW class enhanced Huels type plasma equipment, 1 set of 2.4 MW class enhanced Huels type plasma equipment, 1 set of 60 kW RF plasma equipment and 1 set of 200 kW RF plasma equipment. And electrical, water and gas utilities to assistant plasma equipments are under construction. The research center consists of experiment building, research building, power supply building, air supply building, cooling tower foundation.

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