• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.230-230
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• 2013

In amorphous or microcrystalline thin-film silicon solar cells, p-i-n structure is used instead of p/n junction structure as in wafer-based Si solar cells. Hence, these p-i-n structured solar cells inevitably consist of many interfaces and the cell efficiency critically depends on the effective control of these interfaces. In this study, in-situ plasma treatment process of the interfaces was developed to improve the efficiency of a-Si:H solar cell. The p-i-n cell was deposited using a single-chamber VHF-PECVD system, which was driven by a pulsed-RF generator at 80 MHz. In order to solve the cross-contamination problem of p-i layer, high RF power was applied without supplying SiH4 gas after p-layer deposition, which effectively cleaned B contamination inside chamber wall from p-layer deposition. In addition to the p-i interface control, various interface control techniques such as thin layer of TiO2 deposition to prevent H2 plasma reduction of FTO layer, multiple applications of thin i-layer deposition and H2 plasma treatment, H2 plasma treatment of i-layer prior to n-layer deposition, etc. were developed. In order to reduce the reflection at the air-glass interface, anti-reflective SiO2 coating was also adopted. The initial solar cell efficiency over 11% could be achieved for test cell area of 0.2 $cm^2$.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.193-193
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• 2012

In thin film silicon solar cells, p-i-n structure is adopted instead of p/n junction structure as in wafer-based Si solar cells. PECVD is the most widely used thin film deposition process for a-Si:H or ${\mu}c$-Si:H solar cells. Single-chamber PECVD system for a-Si:H solar cell manufacturing has the advantage of lower initial investment and maintenance cost for the equipment. However, in single-chamber PECVD system, doped and intrinsic layers are deposited in one plasma chamber, which inevitably impedes sharp dopant profiles at the interfaces due to the contamination from previous deposition process. The cross-contamination between layers is a serious drawback of single-chamber PECVD system. In this study, a new plasma process to solve the cross-contamination problem in a single-chamber PECVD system was suggested. In order to remove the deposited B inside of the plasma chamber during p-layer deposition, a high RF power was applied right after p-layer deposition with SiH4 gas off, which is then followed by i-layer, n-layer, and Ag top-electrode deposition without vacuum break. In addition to the p-i interface control, various interface control techniques such as FTO-glass pre-annealing in O2 environment to further reduce sheet resistance of FTO-glass, thin layer of TiO2 deposition to prevent H2 plasma reduction of FTO layer, and hydrogen plasma treatment prior to n-layer deposition, etc. were developed. The best initial solar cell efficiency using single-chamber PECVD system of 10.5% for test cell area of 0.2 $cm^2$ could be achieved by adopting various interface control methods.

• Journal of Korean Tunnelling and Underground Space Association
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• v.24 no.2
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• pp.217-230
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• 2022

The adequate control of TBM face pressure is of vital importance to maintain face stability by preventing face collapse and surface settlement. An EPB shield TBM excavates the ground by applying face pressure with the excavated soil in the pressure chamber. One of the challenges during the EPB shield TBM operation is the control of face pressure due to difficulty in managing the excavated soil. In this study, the face pressure of an EPB shield TBM was predicted using the geological and operational data acquired from a domestic TBM tunnel site. Four machine learning algorithms: KNN (K-Nearest Neighbors), SVM (Support Vector Machine), RF (Random Forest), and XGB (eXtreme Gradient Boosting) were applied to predict the face pressure. The model comparison results showed that the RF model yielded the lowest RMSE (Root Mean Square Error) value of 7.35 kPa. Therefore, the RF model was selected as the optimal machine learning algorithm. In addition, the feature importance of the RF model was analyzed to evaluate appropriately the influence of each feature on the face pressure. The water pressure indicated the highest influence, and the importance of the geological conditions was higher in general than that of the operation features in the considered site.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.23 no.2
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• pp.139-147
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• 2023

The compact tracking radar system is a pulsed radar tracking system that searches, detects, and tracks targets in real time against aircraft targets with a small RCS(Radar Cross Section) maneuvering at high speed. This paper describes the development of comprehensive performance test equipment to verify the performance of the radar system in a anechoic chamber environment. Describes the design and manufacture of comprehensive performance test equipment to meet requirements, including the generation of simulated target signals to simulate aircraft target signals to verify performance in the laboratory environment of radar systems. It also describes a GUI(Graphic User Interface) program to check performance through a test in conjunction with the tracking radar system. Verify the comprehensive performance test equipment implemented through the performance test.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.23 no.4
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• pp.35-40
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• 2023

For the EMC test, the radiation characteristics and immunity characteristics of the EUT are measured under the condition that the EUT maintains its normal operation. For normal operation of the EUT, it is necessary to operate the EUT and monitor its status through separate equipment outside the anechoic chamber. External equipment operates and monitors the EUT through various communications such as 1553B communication, RS-485 communication, and Ethernet communication. At this time, external equipment can transmit noise through the communication line. This noise is transmitted to the LISN through the connected power cable and measured. It is also radiated through the connection terminal to the LISN. In this case, the communication line is the power line It should be designed so that noise is not transmitted through electromagnetic isolation as much as possible. In addition, noise from external equipment must be suppressed as much as possible from entering the chamber through the communication line. In this paper, external EUT test equipment applied for EMC test It explains the considerations in the design and manufacture of the design and explains the satisfaction of the design through tests including CE and RE.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.19 no.3
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• pp.157-163
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• 2019

A small millimeter-wave tracking radar is a pulse radar that searches, detects, and tracks a target in real time through a TWS (Track While Scan) method on a sea-going traps target with a large RCS running at low speed. This paper describes the development of a simulated signal generator to verify the performance of a small millimeter wave tracking radar in laboratory anechoic chamber environment. We describe a GUI program for testing and performance analysis in conjunction with hardware configuration and tracking radar, and verified the simulated signal generator implemented through performance test.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.20 no.3
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• pp.121-127
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• 2020

The small tracking radar targets the target in a real-time, fast-moving, fast-moving target against aircraft with a large RCS that is maneuvering at low speed and a small RCS aircraft maneuvering at high speed (fighters, drones, helicopters, etc.) It is a pulsed radar that detects and tracks. Performing a performance test on a tracking radar in a real environment is expensive, and it is difficult to quantitatively measure performance in a real environment. Describes the composition of the laboratory environment's comprehensive performance test facility and the main requirements and implementation of each configuration.Anechoic chambers to simulate the room environment, simulation target generator to simulate the signal of the room target, target It is composed of a horn antenna driving device to simulate the movement of a vehicle and a Flight Motion Simulatior (FMS) to simulate the flight environment of a tracking radar, and each design and implementation has been described.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.523-523
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• 2012

As the wafer geometric requirements continuously complicated and minutes in tens of nanometers, the expectation of real-time add-on sensors for in-situ plasma process monitoring is rapidly increasing. Various industry applications, utilizing plasma impedance monitor (PIM) and optical emission spectroscopy (OES), on etch end point detection, etch chemistry investigation, health monitoring, fault detection and classification, and advanced process control are good examples. However, process monitoring in semiconductor manufacturing industry requires non-invasiveness. The hypothesis behind the optical monitoring of plasma induced ion current is for the monitoring of plasma induced charging damage in non-invasive optical way. In plasma dielectric via etching, the bombardment of reactive ions on exposed conductor patterns may induce electrical current. Induced electrical charge can further flow down to device level, and accumulated charges in the consecutive plasma processes during back-end metallization can create plasma induced charging damage to shift the threshold voltage of device. As a preliminary research for the hypothesis, we performed two phases experiment to measure the plasma induced current in etch environmental condition. We fabricated electrical test circuits to convert induced current to flickering frequency of LED output, and the flickering frequency was measured by high speed optical plasma monitoring system (OPMS) in 10 kHz. Current-frequency calibration was done in offline by applying stepwise current increase while LED flickering was measured. Once the performance of the test circuits was evaluated, a metal pad for collecting ion bombardment during plasma etch condition was placed inside etch chamber, and the LED output frequency was measured in real-time. It was successful to acquire high speed optical emission data acquisition in 10 kHz. Offline measurement with the test circuitry was satisfactory, and we are continuously investigating the potential of real-time in-situ plasma induce current measurement via OPMS.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.29 no.1
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• pp.50-60
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• 2018

In this paper, we developed a broadband multi-layered radome applicable for high-power applications. In this regard, we presented the wave propagation characteristics of the broadband multi-layered radome with the ABCD matrix and obtained the optimal thickness and the material constant for each layer by an optimization algorithm called "particle swarm optimization," implemented by a commercial numerical modeling tool. Further, we redesigned it in view of mechanical properties to reflect environmental conditions such as wind, snow, and ice. The power transmission property was reanalyzed based on the recalculated data of each layer's thickness to consider the limitations of the fabrication of a large structure. Under the condition of a peak electric field strength that is 10 dB above the critical electric field strength in air breakdown, we analyzed the air breakdown by radio frequency(RF) in the designed radome using the commercial full-wave electromagnetic tool. The radome was manufactured and tested by continuous wave(CW) RF small signal and large signal in an anechoic chamber. The test results showed good agreement with those attained by simulation.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.21 no.12
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• pp.1380-1393
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• 2010

This paper presents a design, fabrication and the test results of planar active electronically scanned array(AESA) radar prototype for airborne fighter applications using transmit/receive(T/R) module hybrid technology. LIG Nex1 developed a AESA radar prototype to obtain key technologies for airborne fighter's radar. The AESA radar prototype consists of a radiating array, T/R modules, a RF manifold, distributed power supplies, beam controllers, compact receivers with ADC(Analog-to-Digital Converter), a liquid-cooling unit, and an appropriate structure. The AESA antenna has a 590 mm-diameter, active-element area capable of containing 536 T/R modules. Each module is located to provide a triangle grid with $14.7\;mm{\times}19.5\;mm$ spacing among T/R modules. The array dissipates 1,554 watts, with a DC input of 2,310 watts when operated at the maximum transmit duty factor. The AESA radar prototype was tested on near-field chamber and the results become equal in expected beam pattern, providing the accurate and flexible control of antenna beam steering and beam shaping.