• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1992.11a
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• pp.102-105
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• 1992

Using RF plasma CVD the diamond particles and films were deposited on Si and quartz substrate from $CH_4$-$H_2$ mixed gas. The temperature of substrate was uniformly maintained by inserting matal plate between substrate and substrate holder. As a result, the deposited diamond particles were mainly twins. The deposited diamond films were identified by SEM, XRD and Raman spectroscopy.

• Journal of the Korean institute of surface engineering
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• v.41 no.4
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• pp.134-141
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• 2008

We have developed a numerical model for a remote ICP(inductively coupled plasma) system in 2D and 3D with gas distribution configurations and confirmed it by plasma diagnostics. The ICP source has a Cu tube antenna wound along a quartz tube driven by a variable frequency rf power source($1.9{\sim}3.2$ MHz) for fast tuning without resort to motor driven variable capacitors. We investigated what conditions should be met to make the plasma remotely localized within the quartz tube region without charged particles' diffusing down to a substrate which is 300 mm below the source, using the numerical model. OES(optical emission spectroscopy), Langmuir probe measurements, and thermocouple measurement were used to verify it. To maintain ion current density at the substrate less than 0.1 $mA/cm^2$, two requirements were found to be necessary; higher gas pressure than 100 mTorr and smaller rf power than 1 kW for Ar.

• Journal of the Korean institute of surface engineering
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• v.49 no.1
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• pp.20-25
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• 2016

Femtosecond laser ablation of ultrathin polymer films on quartz glass using laser pulses of 100 fs and centered at ${\lambda}=400nm$ wavelength has been investigated for nanometer precision thin film patterning. Single-shot ablation craters on films of various thicknesses have been examined by atomic force microscopy, and beam spot diameters and ablation threshold fluences have been determined by square diameter-regression technique. The ablation thresholds of polymer film are about 1.5 times smaller than that of quartz substrate, which results in patterning crater arrays without damaging the substrate. In particular, at a $1/e^2$ laser spot diameter of $0.86{\mu}m$, the smallest craters of 150-nm diameter are fabricated on 15-nm thick film. The ablation thresholds are not influenced by the film thickness, but diameters of the ablated crater are bigger on thicker films than on thinner films. The ablation efficiency is also influenced by the laser beam spot size, following a $w_{0q}{^{-0.45}}$ dependence.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1664-1667
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• 2003

Aperture-coupled microstrip antenna is one type of microstrip antennas. This type of antenna has bandwidth wider than simple microstrip antenna. Herein, we use two substrates, that have the same dielectric constant 2.47 (PTFE-quartz) in which upper substrate is a rectangular patch. The microstrip patch is fed by a microstrip line which is printed on lower substrate, through an aperture or slot in the common ground plane of patch and microstrip feed. This antenna is analyzed by using Finite Difference Time Domain (FDTD) method the specific design frequency 10 GHz and match impedance is 50 ohms. The simulation results of its characteristics are input impedance, return loss, VSWR and radiation patterns respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.199-200
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• 2006

Transparent conductive alum mum-doped ZnO (AZO) films have been prepared on polycarbonate (PC), Coring 7059 and Quartz substrates by DC sputtering method at room temperature. Films deposited was evaluated about spectra of X-ray diffraction and transmittance and characteristics of films deposited as kind of substrate was compared. Films deposited showed (002) orientation and all AZO films are transparent over 80% within the visible wavelength region.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.12
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• pp.1107-1113
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• 2014

In this article, the megasonic cleaning system for cleaning micro/nano particles from flat panel display (FPD) surfaces was developed. A piezoelectric actuator and a waveguide were designed by finite element method (FEM) analysis. The calculated peak frequency value of the quartz waveguide was 1002 kHz, which agreed well with the measured value of 1003 kHz. The average acoustic pressure of the megasonic cleaning system was 43.1 kPa, which is three times greater than that of the conventional type of 13.9 kPa. Particle removal efficiency (PRE) tests were performed, and the cleaning efficiency of the developed system was proven to be 99%. The power consumption of the developed system was 64% lower than that of the commercial system. These results show that the developed megasonic cleaning system can be an effective solution in particle removing from FPD substrate with higher energy efficiency and lower chemical and ultra pure water (UPW) consumption.

• Journal of Microbiology and Biotechnology
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• v.16 no.10
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• pp.1523-1528
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• 2006

The optimization of a batch-type quartz crystal microbalance (QCM)-precipitation sensor measuring acetylcholinesterase (AChE) activity was conducted. To covalently bind AChE onto the gold electrode of a QCM surface, glutaraldehyde cross-linking to a cystamine self-assembled monolayer was tried at different cystamine concentrations. At the optimum conditions of the QCM-precipitation sensor, 0.1 M potassium phosphate buffer (pH 8.0), containing 0.01% Tween 80, was used as the reaction buffer, with the enzyme amount of 5 units for immobilization and the substrate concentration of 50 mg/ml. The current biosensor might find a future applicability to the sum parameter detection on organophosphorus and carbamate pesticides.

• Korean Journal of Materials Research
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• v.14 no.7
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• pp.482-488
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• 2004

$SiO_2$ nanowires were synthesized using the vapor evaporation method. Grown nanowires had a different shapes by kind of substrates. Diameters and lengths of the nanowires increased with increasing growth temperature and time. Mean diameters and lengths of $SiO_2$ nanowire were different by kind of substrates. These variations were attributed to nanowire densities on the substrates. The kind of substrates affected microstructure and PL properties of grown nanowires. In case of $Al_{2}O_3$ and quartz substrates, additional $O_2$ were supported during growth stages, and made a nucleation site. Therefore relative narrow nanowire was grown on $Al_{2}O_3$ and quartz substrates. Optical property were measured by photoluminescence spectroscopy. Relatively broad peak was obtained and mean peak positioned at 450 and 420nm. however in case of quartz substrates, mean peak positioned at 370nm. These peak shift was contributed to the size and substrate effects.

• Korean Journal of Materials Research
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• v.31 no.11
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• pp.608-613
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• 2021

This study investigated the reaction between clay and Mn. Mn was coated using a manganese sulfate on porcelain plate and sintered from 1,100 ℃ to 1,250 ℃. The body begin to shrink around 950 ℃ with the increase in temperature and rapidly progressed after 1,100 ℃. Shrinkage of celadon body was performed at a lower temperature than for other substrates. Quartz, kaolin, and feldspar were the main crystalline phases of the starting materials, but they became mullite and crystobalite during the firing process, and some formed amorphous glass. When manganese sulfate was applied and fired, manganese oxide was fused, and some manganese oxide reacted with the substrate to show a dense microstructure different from that of the substrate; the substrate had pores. The manganese coated porcelain fired at 1,200 ℃ had L^* values of 55.25, 36.87, and 37.13 for the white ware, celadon body, and white mixed ware, respectively; with a^* values of 4.63, 3.07, and 2.15, and b^* values of 7.93 and 3.98, it was found to be 3.42. This result indicated that the color of the surface was affected during firing by the chemical reaction between the substrate and manganese.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1425-1427
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• 1994

Laser ablation of glass substrates (8K-7 and synthetic quartz) using a transversely excited atmospheric (TEA) $CO_2$ laser has been inverstigated to obtain high speed etching. The ablation occurs by local heating of a substrate with a focused TEA-$CO_2$ laser beam. The dependence of ablation rate on pulse count and repetition-rate of laser has been discussed.