Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1992.11a
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- Pages.102-105
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- 1992
A study on deposition of diamond thin films by RF plasma CVD
RF플라즈마CVD법에 의한 Diamond 박막의 성장에 관한 연구
- Jang, Jae-Deog (Department of Electrical Engineering, Kyung-nam University) ;
- Koo, Hyo-Geun (Department of Electrical Engineering, Kyung-nam University) ;
- Lee, Chwi-Cung (Department of Electrical Engineering, Kyung-nam University) ;
- Park, Sang-Hyun (Department of Electrical Engineering, Kyung-nam University) ;
- Kim, Jung-Dal (Department of Electrical Engineering, Kyung-nam University)
- Published : 1992.11.07
Abstract
Using RF plasma CVD the diamond particles and films were deposited on Si and quartz substrate from
Keywords