• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 추계학술대회논문집
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• pp.759-764
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• 2000

The accurate prediction of aeroacoustic analysis is necessary for designers to control and reduce airflow-induced sound pressure levels in high speed rotating DVD drives. This paper focuses on the numerical prediction of airflow-induced sound in DVD drives. Computational fluid dynamics(CFD) is first conducted to evaluate flow field characteristics due to the high-speed disk rotation, and to support the acoustic analysis. The acoustic analogy based on Ffowcs Williams-Hawkings(FW-H) equation is adopted to predict aeroacoustic noise patterns. The integral solution for quadrupole volume source is included to identify the turbulence noise generated inside the DVD tray. The strength of sound pressure level with respect to rotating speed is discussed to meet upfront demand on the high fidelity product development. The present study also focuses on the noise directivity and examines how much the sound noise is sensitive to change in rotating speed. Near-field noise is strongly affected by the flow field characteristic, which is caused by the complex shape of the tray. For a mid-field, the quadrupole noise play as a counterpart of thickness noise or loading noise, so it generates different sound noise patterns compared with those in the near field.

• Bulletin of the Korean Chemical Society
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• 제10권6호
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• pp.524-529
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• 1989

A glow discharge mass spectrometric(GDMS) analytical method was developed for direct analysis of impurities in solids. Ions extracted from a glow discharge ion source with a sample as a cathode were analyzed by a quadrupole mass filter. Ion extractions were carried out through differentially-pumped orifices biased to positive and negative potentials. Operating parameters of the glow discharge source such as discharge current, orifice-to-cathode distance, energy analyzer setting and bias voltages have been optimized. The developed GDMS was applied to the analysis of KSS copper-base alloy standards certified by Korea Standards Research Institute(KSRI). In the analysis, the reproducibility and the detection limits were estimated to be about 2.5% RSD, and in the low ppm range, respectively.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.156.2-156.2
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• 2015

반도체 소자의 크기가 나노사이즈로 줄어들기 때문에, 건식식각의 중요성이 강조되고 있다. dual plasma source를 사용함으로써 plasma 밀도, 이온충돌에너지, 이온플럭스를 조절 가능하다. Low frequency로 이온에너지를 조절하고, high frequency로 이온플럭스를 일반적으로 조절한다. 본 연구는 inductively coupled plasma (ICP)와 capacitively coupled plasma (CCP)를 사용하는 dual plasma source이다. ICP는 AE RPS로 2.4 MHz를 사용하고, CCP는 AE RFX-600으로 13.56 MHz이다. single L-probe는 Hiden ESPion이고, quadrupole mass spectrometer (QMS)는 INFICON CPM-300이다. chuck에 CCP가 인가되고, ICP는 SUS mesh를 거쳐서 영향을 미친다. Gas는 Ar, Ar+CF4 두 조건에서 비료를 하였다. Single L-probe를 이용하여 플라즈마를 측정한 결과 CCP만 인가하였을 때, Te 2.05 eV, Ne 4.07E+10 #/cm3, Ni 5.82E+10 #/cm3의 결과를 얻을 수 있었다. ICP를 방전하고 mesh를 통해서 chuck으로 입사하는 이온을 측정한 결과 mesh에 의해 이온이 중성화되어 거의 입사하지 않음을 확인할 수 있었다. 최종적으로 이온의 영향이 상쇄되고, 라디칼의 영향이 증가하여 높은 etch rate와 선택비를 가지며, 등방성 식각의 영향이 커질 것으로 사료된다.

• 신재생에너지
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• 제3권3호
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• pp.45-53
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• 2007

This paper demonstrates a computational method in predicting aerodynamic noise generated from wind turbines. Low frequency noise due to displacement of fluid and leading fluctuation, according to the blade passing motion, is modelled on monopole and dipole sources. They are predicted by Farassat 1A equation. Airfoil self noise and turbulence ingestion noise are modelled upon quadrupole sources and are predicted by semi-empirical formulas composed on the groundwork of Brooks et al. and Lowson. Aerodynamic flow in the vicinity of the blade should be obtained first, while noise source modelling need them as numerical inputs. Vortex Lattice Method(VLM) is used to compute aerodynamic conditions near blade. In the use of program X-foil [M.Drela] boundary layer characteristics are calculated to obtain airfoil self noise. Wind turbine blades are divided into spanwise unit panels, and each panel is considered as an independent source. Retarded time is considered, not only in low frequency noise but also In turbulence ingestion noise and airfoil self noise prediction. Numerical modelling is validated with measurement from NREL [AOC15/50 Turbine) and ETSU [Markham's VS45] wind turbine noise measurements.

• 한국표면공학회지
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• 제37권4호
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• pp.220-225
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• 2004

A new ion beam extraction system is designed using a simple ion mass filter and a micro mass balance and a QMS based detecting system. A quadrupole Mass Filter is used for selective ion beam formation from inductively coupled high density plasma sources with appropriate electrostatic lens and final analyzing QMS. Also a quartz crystal microbalance is set between a QMF and a QMS to measure the etching and polymerization rate of the mass selected ion beam. An inductively coupled plasma was used as a ion/radical source which had an electron temperature of 4-8 eV and electron density of $4${\times}$10^{11}$＃/㎤. A computer interfaced system through 12bit AD-DA board can control the pass ion mass of the qmf by setting RF/DC voltage ratio applied to the quadrupoles so that time modulation of pass ion's mass is possible. So the direct measurements of ion - surface chemistry can be possible in a resolution of $1\AA$/sec based on the qcm's sensitivity. A full set of driving software and hardware setting is successfully carried out to get fundamental plasma information of the ICP source and analysed $Ar^{+}$ beam was detected at the $2^{nd}$ QMS.

• 대한기계학회논문집B
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• 제26권9호
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• pp.1319-1324
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• 2002

A theoretical model on shock-vortex interaction is investigated using a numerical technique to solve Navier-Stokes equations. The shock-vortex interaction generated by this model based on the classical Rankin vortex is precisely investigated for a benchmark problem: Dosanjh and Weeks experiment. In terms of shock dynamics, the interaction is categorized to three stages: shock distortion, shock split, and shock-shock interaction. The quadrupolar structure of the sound source produced by the interaction is far supported with the present model, and the difference between experiment and theoretical model is also discussed in this paper.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 추계학술대회논문집
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• pp.1490-1493
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• 2007

Aerodynamic noise generated from wind turbines is predicted by it's classified source mechanisms using computational method. BPF noise according to the blade passing motion, is modelled on monopole and dipole sources. They are predicted by Farassat 1A equation. Airfoil self noise and turbulence ingestion noise are modelled upon quadrupole sources and are predicted by semi-empirical formulas composed on the groundwork of Brooks et al. and Lowson. Retarded time is considered, not only in low frequency noise prediction but also in turbulence ingestion noise and airfoil self noise prediction. Wind turbine noise emission of a 3MW wind turbine and a 600 kW wind turbine, standing for large and middle sized wind turbines, is analyzed.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 춘계학술대회 논문집
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• pp.67-67
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• 2009

본 연구는 강유전체 박막의 buffer 층으로 사용되는 Yttrium oxide($Y_2O_3$) 박막에 대한 $BCl_3$/Ar 혼합가스 식각 특성에 대해 연구하였다. 식각 메카니즘을 해석하기 위해 QMS(Quadrupole Mass Spectrometer), OES(Optical Emission Spectroscopy)를 사용하여 플라즈마 특성을 추출하였다. 공정 조건(source power, bias power, pressure, total gas flow)을 동일하게 유지하고 $BCl_3$/Ar 혼합가스 비율을 변화시키며 실험을 진행 하였다. 혼합가스의 비율이 $BCl_3$(80%)/Ar(20%)일때 가장 높은 식각 속도을 나타냈고, 이후 점차 감소하였다. 이때의 식각 속도는 8.8 nm/min 였다. 이에 $Y_2O_3$는 이온 보조 화학식각 특성을 가짐을 확인하였다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 1997년도 춘계학술대회논문집; 경주코오롱호텔; 22-23 May 1997
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• pp.636-642
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• 1997

Laminar vortex shedding behind a circular cylinder with and without splitter plates attached to the circular cylinder at low Reynolds numbers are simulated by solving the unsteady incompressible Navier-Strokes equations. The Strouhal number, lift and drag rapidly change with the splitter plate. Far-field noise from the vortex shedding behind the cylinder is computed using the Lighthill acoustic analogy and the Curle's solution for the Lighthill equation. The acoustic source functions are obtained from the computed near-field velocity and pressure. Numerical results show that the volume quadrupole noise is small at low Mach numbers, compared with the surface dipole noise. Also the amplitude and frequency of the acoustic density fluctuations are varied with the length of splitter plates. The scattering effects at the edge of a splitter plate are considered by using the half-plane Green's function.

• 한국초전도ㆍ저온공학회논문지
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• 제18권2호
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• pp.30-36
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• 2016

For the magnetic field analysis or design, it is important to know the behavior of the magnetic field in an interesting space. Magnetic field mapping becomes a useful tool for the study of magnetic field. In this paper, a numerical way for mapping the magnetic field within the cylindrical center volume of magnet is presented, based on the solution of the Laplace's equation in the cylindrical coordinate system. The expression of the magnetic field can be obtained by the magnetic flux density, which measured in the mapped volume. According to the form of the expression, the measurement points are arranged with the parallel cylindrical line (PCL) method. As example, the magnetic flux density generated by an electron cyclotron resonance ion source (ECRIS) magnet and a quadrupole magnet were mapped using the PCL method, respectively. The mapping results show the PCL arrangement method is feasible and convenience to map the magnetic field within a cylindrical center volume generated by the general magnet.