• Journal of the Institute of Electronics Engineers of Korea SD
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• v.45 no.7
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• pp.37-43
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• 2008

In this paper, the dependence of electrical characteristics of Silicon-$Al_2O_3$-Nitride-Oxide-Silicon (SANOS) memory cell transistors and program/erase (P/E) speed, reliability of memory device on interface trap between Si substrate and tunneling oxide and bulk trap in nitride layer were investigated using charge pumping method which has advantage of simple and versatile technique. We analyzed different SANOS memory devices that were fabricated by the identical processing in a single lot except the deposition method of the charge trapping layer, nitride. In the case of P/E speed, it was shown that P/E speed is slower in the SANOS cell transistors with larger capture cross section and interface trap density by charge blocking effect, which is confirmed by simulation results. However, the data retention characteristics show much less dependence on interface trap. The data retention was deteriorated as increasing P/E cycling number but not coincides with interface trap increasing tendency. This result once again confirmed that interface trap independence on data retention. And the result on different program method shows that HCI program method more degraded by locally trapping. So, we know as a result of experiment that analysis the SANOS Flash memory characteristic using charge pumping method reflect the device performance related to interface and bulk trap.

• Journal of the Korean Vacuum Society
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• v.16 no.2
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• pp.79-90
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• 2007

Prototype of $800{\ell}$ vacuum web coater (Vic Mama) consisting of ion source with low energy less than 250 eV for high speed surface modification and 4 magnetron sputter cathodes was designed and constructed. Its performance was evaluated through fabricating the adhesiveless flexible copper clad laminate (FCCL). Pumping speed was monitored in both upper noncoating zone pumped down by 2 turbo pumps with 2000 l/sec pumping speed and lower surface modification and sputter zone vacuumed by turbo pumps with 450 1/sec and 1300 1/sec pumping speed respectively. Ion current density, plasma density, and uniformity of ion beam current were measured using Faraday cup and the distribution of magnetic field and erosion efficiency of sputter target were also investigated. With the irradiation of ion beams on polyimide (Kapton-E, $38{\mu}m$) at different fluences, the change of wetting angle of the deionized water to polyimide surface and those of surface chemical bonding were analyzed by wetting anglometer and x-ray photoelectron spectroscopy. After investigating the deposition rate of Ni-Cr tie layer and Cu layer was investigated with the variations of roll speed and input power to sputter cathode. FCCL fabricated by sputter and electrodeposition method and characterized in terms of the peel strength, thermal and chemical stability.

• International Journal of Naval Architecture and Ocean Engineering
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• v.12 no.1
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• pp.71-84
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• 2020

In order to improve the performance of marine centrifugal pump, a centrifugal pump whose specific speed is 66.7 was selected for the research. Outlet diameter D2, outlet width b2, blade outlet angle β2, blade wrap φ and blade number z of the impeller were chosen as the variables. The maximum weighted average efficiency and the minimum vibration intensity at the base were calculated as objectives. Based on the Latin Hypercube method, the impeller was numerically optimized. The numerical results show that after optimization, the amplitudes of pressure fluctuation on the main frequency at different monitoring points decrease in varying degrees. The radial force on impeller decreases obviously under off-design flow rates and is more symmetrical during the operation of the pump. The variation of the axial force is relatively small, which has no obvious relationship with the rotating angle of the impeller. The energy performance and vibration experiment was performed for verifying. The test results show that the weighted average efficiency under 0.8Qd, 1.0Qd and 1.2Qd increases by 4.3% after optimization. The maximal vibration intensity at M1-M4 on the pump base reduced from 0.36 mm/s to 0.25 mm/s, decreasing by 30.5%. In addition, the vibration velocities of bracket in pump side and outlet flange also have significant reductions.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.77.2-77.2
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• 2005

• Journal of the Korean Vacuum Society
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• v.6 no.4
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• pp.298-307
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• 1997

TDS(Thermal Desorption Spectroscopy)system, for diagnosis of CRT manufacturing process, was designed and constructed. Outgassings and thermal desorptions from the part or materials of CRT can be measured and analysed with this system at various temperatures. The system is consisted of 3 parts, vacuum chamber and pumping system with variable conductance, sample heating stages & their controller, and outgassing measurement devices, like as ion gauge or quadrupole mass spectrometer. The ultimate pressure of the system was under $1{\times}10^{-7}$ Pa. With the variable conductance system, the effective pumping speed of the chamber could be controlled from sub l/s to 100 l/s. The effective pumping speed values were determined by dynamic flow measurement principle. The temperatures and ramp rate of sample were controlled by tungsten heater and PID controller up to 600℃ within ±1℃ difference to setting value. Ion gauge & QMS were calibrated for quantitative measurements. Some examples of TDS measurement data and application on the CRT process analysis were shown.

• Journal of the Korean Vacuum Society
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• v.6 no.4
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• pp.308-313
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• 1997

TDS (Thermal Lkso~ption Spectroscopy)system, for diagnosis of CRT manufacturing process, was designed and constructed. Outgassings and themla1 desorptions from the part or materials of CRT can be measured and analysed with this system at various temperatures. The system is consisted of 3 pirrts. vacuum chamher and pumping system with variable conductance, sample heating stages & their controller, and outgassing measurement devices, like as ion gauge or quadrupole mass spectrometer. The ultimate pressure of the system was under $1\times10^{-7}$ Pa. With the variable conductance system, the effective pumping speed of the chamber could he controlled from sub 11s to 100 11s. The effective pumping speed values were determined by dynamic flow measurement principle. The temperatures and ramp rate of sample were controlled by tungsten heater and PID controller up to $600^{\circ}C$ within t $\pm 1^{\circ}C$$difference to setting value. Ion gauge & QMS were calibrated for quantitative measurements. Some examples of TDS measurement data ;ind application on the CRT process analysis were shown.

• Journal of the Korean Vacuum Society
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• v.12 no.2
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• pp.93-104
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• 2003

For evaluation of durability of low vacuum pumps, it is required to examine the performance and degradation of low vacuum pumps. Pump degradation may result from abnormalities associated with the performance in many areas of pump operation. The diagnostics method can be used to monitor the pump performance in the semi-conductor process line. Based on the mechanical defect of the pump, the dynamic response and reliability of the system for performance test, and the dynamic characteristics of the pump were experimentally assessed. The theoretical work rate for the compression process in the pump was calculated, and then the efficiency of the pump associated with the power consumption was evaluated. This analysis will be useful in detecting pump degradation with increasing the power consumption. To determine the predominant factors of pump degradation, it is important to evaluate the entire pumping system. We studied vibration, dynamic pressure, pumping speed, and power consumption of low vacuum pumps. Our results can be utilized for the future research on the evaluating technology of durability of low vacuum pumps.

• Journal of Mechanical Science and Technology
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• v.20 no.9
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• pp.1483-1491
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• 2006

The pumping performance of molecular drag pumps (MDP) has been investigated experimentally. The exporimented MDPs are a disk-type drag pump (DTDP), helical-type drag pump(HTDP) and compound drag pump (CDP), respectively In the case of the DTDP, spiral channels of a rotor are cut on both upper surface and lower surface of a rotating disk, and the corresponding stator is a planar disk. In the case of the HTDP, the rotor has six rectangular grooves. The CDP consists with the DTDP, at lower part, and with the HTDP, at upper part. The experiments are performed in the outlet pressure range of $0.2{\sim}533Pa$. The inlet pressure and compression ratio are measured under the various conditions of outlet pressure and throughputs, and nitrogen is used for the test gas. At the outlet pressure of 0.2Pa, the ultimate pressure has been reached to $1.0{\times}10^{-2}Pa$ for the HTDP, $1.3{\times}10^{-4}Pa$ for the DTDP, and $3.6{\times}10^{-5}Pa$ for the CDP. The maximum compression ratio of the CDP is much higher than those of the DTDP or HTDP. Consequently, the ultimate pressure of the CDP is the lowest one.

• 제어로봇시스템학회:학술대회논문집
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• 1998.10a
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• pp.474-479
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• 1998

In this paper, we present a mathematical model of the piezoelectric pump and its application to the automobile brake system. The piezoelectric pump consists of a multi-layered piezoelectric element a diaphragm, pumping values, resonant pipes and accumulators, and the maximum pumping power of 62W nab obtained in the previous experiments by using the piezoelectric element of 22mm diameter and 55.5mm length. A detailed mathematical model of the pump is derived here by considering the compressibility of the working oil, nonlinear characteristics of piezoelectric element, the time delay of pumping values' action and be on. The validity of the model is illustrated by comparing the experimental data and the simulation results. Using the mathematical model of the piezoelectric pump, a brake system for automobile disk brake is also simulated in this paper. The brake system consists of a piezoelectric pump as a power source, calipers and its piston to generate brake force, and a three position solenoid value to change the brake situation. It is shown that 15mm/sec of piston speed and 20kN of piston force are obtained by using the piezoelectric element of 33mm diameter and 55.5mm length.

• Transactions on Electrical and Electronic Materials
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• v.17 no.1
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• pp.25-28
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• 2016

We investigate the effect of interface states on the endurance of a charge trap flash (CTF) NOR array using charge pumping methods. The endurance test was completed from one cell selected randomly from 128 bit cells, where the memory window value after 10² program/erase (P/E) cycles decreased slightly from 2.2 V to 1.7 V. However, the memory window closure abruptly accelerated after 10³ P/E cycles or more (i.e. 0.97 V or 0.7 V) due to a degraded programming speed. On the other hand, the interface trap density (Nit) gradually increased from 3.13×10¹¹ cm⁻² for the initial state to 4×10¹² cm⁻² for 10² P/E cycles. Over 10³ P/E cycles, the Nit increased dramatically from 5.51×10¹² cm⁻² for 10³ P/E cycles to 5.79×10¹² cm⁻² for 10⁴ P/E cycles due to tunnel oxide damages. These results show good correlation between the interface traps and endurance degradation of CTF devices in actual flash cell arrays.