• Title/Summary/Keyword: Pulsed Laser deposition

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Development of PLD processes for the mono color OLEDs panel (단색 OLEDs 패널 제작을 위한 PLD 공정 개발)

  • Jang, S.W.;Kim, C.K.;Yoo, H.J.;Hong, C.S.
    • Proceedings of the KIEE Conference
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    • 2004.07c
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    • pp.2079-2082
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    • 2004
  • This paper study on OLEDs(Organic Light Emitting Diodes) panel using PLD(Pulsed Laser Deposition) methode. Deposition of organic was used Q-stitched Nd/YAG laser in 355 nm and reduced organic pellet for PLD method. Organic morphology was measured AFM(Atomic Forced Microscope) and emitting efficiency was measured luminance meter.

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Comparison of Ga-doped and Ag-doped ZnO Nanowire Gas-sensor Sensitivity and Selectivity

  • Lee, Sang Yeol
    • Transactions on Electrical and Electronic Materials
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    • v.16 no.6
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    • pp.334-337
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    • 2015
  • Pure ZnO, ZnO nanowires doped with 3 wt.% Ga (3GZO) and doped with 3 wt.% Ag (3SZO) were grown by a hot-walled pulse laser deposition (HW-PLD) technique. The optical and chemical properties of Ga and Ag doped nanowires was analyzed. Nanowires were determined to be under 200 nm in diameter and several μm in length. Change of significant resistance was observed and the gas detection sensitivities of ZnO, 3GZO and 3SZO nanawires were compared. The sensitivities of ZnO, 3GZO, and 3SZO nanowire sensors were measured at 300℃ for 1 ppm of ethanol gas at 97%, 48%, and 203%, respectively.

Effect of Hydrogen Passivation on the Photoluminescence of Si Nanocrystallites Thin Flms (수소 Passivation에 따른 실리콘 나노결정 박막의 광학적 특성 변화 연구)

  • 전경아;김종훈;이상렬
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.29-32
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    • 2001
  • Hydrogen passivation of Si nanocrystals identifies luminescence mechanism indirectly. Si nanocrystallites thin films on p-type (100) Si substrate have been fabricated by pulsed laser deposition technique using a Nd:YAG laser After deposition, Si nanocrystallites thin films have been annealed at 600$^{\circ}C$ and 760$^{\circ}C$ in nitrogen ambient, respectively. Hydrogen passivation was subsequently performed at 500$^{\circ}C$ in forming gas (95 % N$_2$ + 5 % H$_2$) for an 1 hour. We report the photoluminescnece(PL) property of Si thin films by the hydrogen passivation. The luminescence mechanism of Si nanocrystallites has also been investigated.

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Annealing effect of Si nanocrystallites thin films (실리콘 나노결정 박막의 후열처리 효과 연구)

  • Jeon, Kyung-Ah;Kim, Jong-Hoon;Choi, Jin-Baek;Lee, Sang-Yeol
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.04a
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    • pp.88-91
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    • 2003
  • Si nanocrystallites thin films have been fabricated by pulsed laser deposition using a Nd:YAG laser. After deposition, samples were annealed at the temperature range of 400 to $800^{\circ}C$. Hydrogen passivation was then performed in the forming gas ($95%N_{2}+5%H_{2}$) at $500^{\circ}C$. Strong violet-indigo photoluminescence has been observed at room temperature on nitrogen ambient-annealed Si nanocrystallites. As a result of photoluminescence spectra and infrared absorption spectra, we conclude that the violet-indigo PL efficiency is related with oxygen vacancy in the $SiO_x$(x= 1.6-1.8) matrix.

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Morphology Control of Ag-doped ZnO Nanowires by Hot-walled pulse Laser Deposition

  • Kim, Gyeong-Won;Song, Yong-Won;Kim, Sang-Sik;Lee, Sang-Ryeol
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.04b
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    • pp.25-26
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    • 2009
  • We design and demonstrate the controlled morphologies of Ag-dpped ZnO nanowires (NWs) adopting self-contrived hot-walled pulsed laser deposition (HW-PLD). p-type Ag-doping is ensuired by low temperature photoluminescence (PL) spectrum to find the AoX peak at 3.349 eV. Morphology of grown NWs are controlled by changing the kinetic energy and flux of the ablated particles with adjusting the target - substrate (T-S) distance. The analysis on the resultant NWs is presented.

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Development of advanced laser processing for the fabrication of HTS metallic tapes for power applications (전력용 고온초전도 금속테이프 제작을 위한 첨단 레이저공정 개발)

  • Lee, Sang-Yeol
    • Proceedings of the KIEE Conference
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    • 1997.11a
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    • pp.688-691
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    • 1997
  • Good quality superconducting $YBa_2Cu_30_{7-{\delta}}$(YBCO) thin films were grown on Hastelloy (Ni-Cr-Mo alloys) with yttria-stabilized zirconia(YSZ) buffer layers by in situ pulsed laser deposition in a multi-target processing chamber. Generally, Hastelloy exhibits excellent resistance to corrosion, fatigue, thermal shock, impact, and erosion. However, it is difficult to make films on flexible metallic substrates due to interdiffusion problems between metallic substrates and superconducting overlayers. To overcome this difficulty, it is necessary to use YSZ buffer layer since it will not only limit the interdiffusion process but also minimize the surface microcrack formation due to smaller mismatch between the film and the substrate. In order to enhance the crystallinity of YBCO films on metallic substrates, YSZ buffer layers were grown at various temperatures different from the deposition temperature of YBCO films. On YSZ buffer layer grown at higher temperature than that for depositing YBCO film, the YBCO thin film was found to be textured with c-axis orientation by x-ray diffraction and had a zero-resistance critical temperature of about 85K.

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A Study on Structural and Dielectric Properties of the (Ba,Sr)TiO$_3$ Thin Films Prepared by Laser Ablation (레이저 어블레이션법으로 제작될 (Ba, Sr)TiO$_3$ 박막의 구조 및 유전특성에 관한 연구)

  • 주학림;김성구;장낙원;마석범;백동수
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.05a
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    • pp.122-125
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    • 1999
  • (Ba$_{0.6}$Sr$_{0.4}$)TiO$_3$(BST) thin films were fabricated with different deposition temperature and oxygen pressure by Pulsed Laser Deposition(PLD). Energy Dispersive Spectroscopy(EDS) proved that BST thin films prepared by PLD have almost the same stoichiometric composition as the BST target materials. This BST thin films were fully crystallized at $650^{\circ}C$, 300mTorr oxygen pressure and showed a maximum dielectric constant value of $\varepsilon$$_{t}$=684 and dielectric loss was 0.01 at 75$0^{\circ}C$, 300mTorr oxygen pressure.ssure.

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Controlled Ga-doped ZnO NWs Synthesized by PLD in Furnace (PLD in Furnace 장비에 의한 Ga-Doped ZnO 나노선 합성 제어)

  • Song, Yong-Won;Lee, Sang-Gyu;Chang, Seong-Pil;Son, Chang-Wan;Leem, Jae-Hyeon;Lee, Sang-Yeol
    • Proceedings of the KIEE Conference
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    • 2007.11a
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    • pp.112-113
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    • 2007
  • We synthesize ZnO nanowires (NWs) doped with 3 wt% Ga on sapphire substrate using a hot-walled pulsed laser deposition (PLD) system named PLD in Furnace. A proprietary target rotating system is employed in the furnace to ensure the homogeneity of the deposition. The kinetic energy of the laser-ablazed ZnO is controlled for the optimization of NW formation. The physical properties of the resultant NWs are presented.

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Laser Ablation : Fundamentals and applications in Micropatterning and Thin Film Formation

  • J. Heitz;D. Bauerle;E. Arenholz;N. Arnold;J.T. Dickinson
    • Journal of Photoscience
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    • v.6 no.3
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    • pp.103-108
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    • 1999
  • We present recent results on ablation mechanism, single-pulse laser micropatterning , pulsed-laser deposition(PLD) and particulates formation accompanying laser ablation, with special emplasis on polymers, in particular polymide, (PI), and polytetrafluoroethylene, (PTFE). Ablation of polymers is described on the basis of photothermal bond breaking within the bulk material. Here, we assume a first order chemical reaction, which can be described by an Arrhenius law. Ablation starts when the density of broken bonds at the surface reaches a certain critical value. Single-pulse laser ablation of polyimide shows a clear-length dependence of the threshold fluence. This experimental result strongly supports a thermal ablation model. We discuss the various possibilities and drawbacks of PLD and describe the morphology, physical properties and applications of PTFE films.

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A Study on Development of PLD Process for PM OLED Device Manufacture (PM OLED 디바이스 제작을 위한 PLD 공정 개발에 관한 연구)

  • Lee, Eui-Sik;Lee, Byoung-Wook;Kim, Chang-Kyo;Hong, Jin-Su;Park, Sung-Hoon;Moon, Soon-Kwun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.264-266
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    • 2005
  • Manufacture of OLED device used thermal evaporation method. However thermal evaporation method has many defect as thermal damage of substrate, difficult of dopant rate control and low utilization of organic materials. so we suggest PLD(Pulsed Laser Deposition) method that solution of these problems. PLD method has many advantage as without thermal damage, easy indicate of deposition rate per one pulse and good utilization of organic materials. In this paper we apply the PLD method for manufacture of device so we present high efficiency device manufacture using PLD method that has good deposition uniformity, surface rough and deposition rate.

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