• 제목/요약/키워드: Pulse discharge plasma

검색결과 154건 처리시간 0.042초

직류 방전과 펄스 직류 방전에 의한 플라즈마 형상 관찰 (Observation of Plasma Shape by Continuous dc and Pulsed dc)

  • 양원균;주정훈
    • 한국표면공학회지
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    • 제42권3호
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    • pp.133-138
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    • 2009
  • Effects of bipolar pulse driving frequency between 50 kHz and 250 kHz on the discharge shapes were analyzed by measuring plasma characteristics by OES (Optical Emission Spectroscopy) and Langmuir probe. Plasma characteristics were modeled by a simple electric field analysis and fluid plasma modeling. Discharge shapes by a continuous dc and bipolar pulsed dc were different as a dome-type and a vertical column-type at the cathode. From OES, the intensity of 811.5 nm wavelength, the one of the main peaks of Ar, decreased to about 43% from a continuous dc to 100 kHz. For increasing from 100 kHz to 250 kHz, the intensity of 811.5 nm wavelength also decreased by 46%. The electron density decreased by 74% and the electron temperature increased by 36% at the specific position due to the smaller and denser discharge shape for increasing pulse frequency. Through the numerical analysis, the negative glow shape of a continuous dc were similar to the electric potential distribution by FEM (Finite Element Method). For the bipolar pulsed dc, we found that the electron temperature increased to maximum 10 eV due to the voltage spikes by the fast electron acceleration generated in pre-sheath. This may induce the electrons and ions from plasma to increase the energetic substrate bombardment for the dense thin film growth.

Double Pulse Memory 방식을 이용한 Plasma Display Panel의 효율 향상에 관한 연구 (Improvement of Luminous Efficacy of Plasma Display Panel with Double Pulse Memory)

  • 최경철;신범재;황기웅
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1991년도 추계학술대회 논문집 학회본부
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    • pp.423-426
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    • 1991
  • A Plasma Display Panel with Double Pulse Memory was fabricated and its luminance and luminous efficacy were investigated. Application of non-discharge pulses to an auxiliary anode increased luminance by 43% and luminous efficacy by 33%. Compared to PDP with PPM(Planar Pulse Memory) driving technique, PDP with DPM obtained higher luminous efficacy and consumed lower power with the same delay time.

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방전에너지 제어용 외부 커패시터를 이용한 대기압 마이크로 플라즈마 소스 개발 (Development of a Microplasma Source under Atmospheric Pressure using an External Ballast Capacitor)

  • 하창승;이제현;손의정;박차수;이호준
    • 조명전기설비학회논문지
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    • 제27권6호
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    • pp.31-38
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    • 2013
  • A pulse driven atmospheric plasma jet controlled by external ballast capacitor is developed. Unlike the most commonly use DBD sources, the proposed device utilizes bare metal electrode. The discharge energy per pulse can precisely be determined by changing voltage and capacitance of the ballast capacitor. It is shown that the device can provide wide range of plasma, from stable glow mode to near arc state. Current-voltage waveforms, optical emission spectra and discharge images are investigated as a function of an injection energy. The OES shows that He and oxygen lines are increased as a function of the external ballast capacitor. Ozone and rotational temperature have similar tendency with a power consumption. The feeding gas is He and the applied DC voltage is from 400V to 800V when the gap distance is $500{\mu}m$.

제논 (Xe) 평판형 플라즈마 광원의 전기적 및 광학적 특성 연구 (The Electrical and Optical Properties of Xe Flat Plasma Light Source)

  • 최용성;문종대;이경섭;이상헌
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 영호남 합동 학술대회 및 춘계학술대회 논문집 센서 박막 기술교육
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    • pp.86-90
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    • 2006
  • Discharge of the flat lamp lighting source research are requested very much. For improving brightness, life time, efficiency of flat lamp, plasma diagnosis of the f1at lamp lighting source to understand property of lighting source is very important. Distance of discharge electrode is 5.5mm and width is 16.5mm, we have measured electron temperature and electron density measured with single Langmuir probe in flat lamp. We have tested the discharge from 100 Torr to 300 Torr pressure. The pulse is rectangular pulse with frequency 20kHz and duty ratio 20%. In result, electron temperature decreases and electron density increase as increase the gas pressure and electron temperature decreases and electron density increase as increase the voltage.

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Study on the Effects of Ultrasonic Wave for the Effective Hydrogen Generation by Electrical Discharge Plasma Process

  • Park Jae-Youn;Cong Nghi-Vu;Han Sang-Bo;Kim Jong-Seok;Park Sang-Hyun;Lee Hyun-Woo;Lee Su-Jung
    • 한국전기전자재료학회논문지
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    • 제19권6호
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    • pp.591-598
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    • 2006
  • The research was tried to investigate the hydrogen generation from water by the pulsed power plasma process. Hydrogen was generated by way of the electrical pulse power discharge process with the ultrasonic wave. The yield on the hydrogen generation was also studied with and without operating the ultrasonic generator, in which the applied high voltage was varied from 10 kV to 15 kV. Nitrogen and argon gases were used as working gases. As the results, the generation yield using the pure nitrogen gas is better than argon and mixed gases such as argon and nitrogen. Hydrogen concentration are significantly increased when the ultrasonic generator was operated with the electrical discharge simultaneously. It is increased with increasing the applied ultrasonic level as well.

플라즈마 발생을 위한 인버터의 출력 제어 방식 (The Inverter Output Control Method for Plasma Generator)

  • 김주용;박진민;문상필;이현우;서기영
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2004년도 하계학술대회 논문집 B
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    • pp.1229-1231
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    • 2004
  • A resonant type voltage source and power device and a control method using Pulse Density Modulation(PDM) power control and Pulse Width Modulation(PWM) voltage control for plasma sterilization are described. For the stability of discharge in the generating tube

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전.자계상의 전원장치변화에 따른 비열방전 플라즈마의 $SO_2$와 CO가스 제거특성 ($SO_2$ and CO Removal Characteristics in Various Applied Voltage of Nonthermal Discharge Plasma in a Crossed DC Magnetic Field)

  • 이근택;금상택;문재덕
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권3호
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    • pp.215-220
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    • 1999
  • $SO_2$and CO gas removal characteristics of a wire-to-cylinder type nonthermal discharge plasma reactor in various applied voltage (-dc, ac, fast rising pulse and high frequency pulse) and a crossed dc magnetic field have been investigated. The experiment has been emphasized on the oxidizing characteristics of $SO_2$ and CO gas by $O_3$ and the applying of a crossed magnetic field, which would induce the cyclotronic and drift motions of electrons making the residual time longer in the removal airgap space. And it also would enhance the energy of electrons and the electrophysicochemical actions to remove the pollutant gases effectively. It is found thatthe corona onset voltage and the breakdown voltage were decreased with increasing the crossed magnetic field and decrease initial fed $SO_2$and CO concentration. As a result, a higher ozone generation and $SO_2$ and CO gas removal rate of 20[%] can be obtained with -dc, ac and fast rising pulse corona discharges in the crossed dc current-induced magnetic field. But high frequency pulse didn't show effect in applying of a crossed magnetic field.

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A New Generation of Biocompatible Pulse-discharged Plasma by Marx Generator and Its Application on the Biomolecules

  • 박지훈;;홍영준;;김상엽;김영조;이구협;이승목;박봉상;전수남;최은하
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.240.2-240.2
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    • 2014
  • Characteristics of pulse-discharged plasma in liquid and its biological applications to proteins are investigated by making use of high voltage Marx generator. The Marx generator has been consisted of 5 stages, where each charging capacitor is $0.5{\mu}F$ to generate a high voltage pulse with rising time of $1{\mu}s$. We have applied an input voltage of 6 kV to the each capacitor of $0.5{\mu}F$. The high voltage pulsed plasma has been generated inside a polycarbonate tube by a single-shot operation, where the breakdown voltage is measured to be 7 kV, current of 1.2 kA, and pulse width of ${\sim}1{\mu}s$ between the two electrodes of anode-cathode made of stainless steel, which are immersed into the liquids. For the investigation of the influence of pulsed plasma on biomolcules, we have focused on the amino acids, DNA, proteins, cell and cholesterol.

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저온 플라즈마 공정을 이용한 상용설비의 배연가스 처리 기술개발 (Technical Development of Flue Gas Control at Commercial Plant Using the Non-thermal Plasma Process)

  • 유정석;백민수;김태희;김정일;김유석;최석호
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 춘계학술대회논문집D
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    • pp.939-944
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    • 2001
  • For the application of simultaneous $DeSO_{2}\;&\;DeNO_{x}$ equipment using non-thermal plasma process to the industrial and power plants, the many types of plasma device and process were studied. The e-beam and pulsed plasma corona discharge process are outstanding for the study to apply commercial large-scale plant from among these. In this paper, non-thermal plasma of technical trends and the characteristics of system developed by Doosan heavy industries & construction Co., Ltd. are explained. We have researched pulsed plasma corona discharge process since 1994. At the basis of reasonable results for the pilot plant, we constructed the demonstration plant at a domestic coal-fired power plant in 1999, as the previous step for commercial use. In near future, enough information about designs and costs of commercial-size system will be obtained.

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대향형 Xe 플라즈마 평판 램프의 방전 및 발광 특성에 관한 수치적 연구 (Numerical Analysis of the Discharge and Luminous Characteristics of a Planar Type Xe Plasma Flat Lamp)

  • 김혁환;이원종
    • 한국전기전자재료학회논문지
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    • 제24권10호
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    • pp.822-833
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    • 2011
  • A Xe plasma flat lamp, which has been noticed as a new eco-friendly LCD (liquid crystal display) backlight, requires the improvement of the luminance and the luminous efficiency although it has several advantages. To improve the performance of a lamp, it is necessary to understand the effects of discharge variables on the luminous characteristics of the lamp. Since it is difficult to diagnose a lamp discharge experimentally, the numerical analysis can be used instead. In this study, the luminous characteristics of a planar type Xe plasma flat lamp were analyzed with the variation of an input voltage and a pulse frequency. The numerical analysis of a lamp discharge was then performed using a RCT (relaxation continuum) model and a LFA (local field approximation) model. The comparison with the experimental results showed that the RCT model is valid for the numerical analysis of the flat lamp. The numerical analysis also showed that the modifications of a high frequency component and a voltage falling rate in the input voltage waveform could improve the luminous characteristics of the lamp.