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Development of a Microplasma Source under Atmospheric Pressure using an External Ballast Capacitor

방전에너지 제어용 외부 커패시터를 이용한 대기압 마이크로 플라즈마 소스 개발

  • 하창승 (부산대학교 전자전기공학과) ;
  • 이제현 (부산대학교 전자전기공학과 대학원) ;
  • 손의정 (부산대학교 전자전기공학과 대학원) ;
  • 박차수 (동의과학대학교 전기과) ;
  • 이호준 (부산대학교 전자전기공학부)
  • Received : 2013.02.07
  • Accepted : 2013.04.23
  • Published : 2013.06.30

Abstract

A pulse driven atmospheric plasma jet controlled by external ballast capacitor is developed. Unlike the most commonly use DBD sources, the proposed device utilizes bare metal electrode. The discharge energy per pulse can precisely be determined by changing voltage and capacitance of the ballast capacitor. It is shown that the device can provide wide range of plasma, from stable glow mode to near arc state. Current-voltage waveforms, optical emission spectra and discharge images are investigated as a function of an injection energy. The OES shows that He and oxygen lines are increased as a function of the external ballast capacitor. Ozone and rotational temperature have similar tendency with a power consumption. The feeding gas is He and the applied DC voltage is from 400V to 800V when the gap distance is $500{\mu}m$.

Keywords

References

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