• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.10a
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• pp.305-310
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• 2004

The Hot Embossing Lithography(HEL) as a method for the fabrication of nanostructure with polymer is becoming increasingly important because of its simple process, low cost, high replication fidelity and relatively high throughput. In this study, we investigated the characteristics of hot embossing lithography as a nanoreplication technique. To grasp characteristics of nano patterning rheology by process parameters(embossing temperature, pressure and time), we have carried out various experiments by using the DVD(400nm pattern width) and Blu-ray nickel stamps(150nm pattern width). During the hot embossing process, we have observed the characteristics of the size effect. The quality of products made by hot embossing is affected by its cooling shrinkage. The demolding process at the glass transition temperature results in low quality because of the shrinkage of the polymer. Therefore, the quantification of the temperature condition is essential for the replication of high quality.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.236-236
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• 2008

(Bi,La)$Ti_3O_{12}$(BLT) thin film is one of the most attractive materials for ferroelectric random access memory (FRAM) applications due to its some excellent properties such as high fatigue endurance, low processing temperature, and large remanent polarization [1-2]. The authors firstly investigated and reported the damascene process of chemical mechanical polishing (CMP) for BLT thin film capacitor on behalf of plasma etching process for fabrication of FRAM [3]. CMP process could prepare the BLT capacitors with the superior process efficiency to the plasma etching process without the well-known problems such as plasma damages and sloped sidewall, which was enough to apply to the fabrication of FRAM [2]. BLT-CMP characteristics showed the typical oxide-CMP characteristics which were related in both pressure and velocity according to Preston's equation and Hernandez's power law [2-4]. Good surface roughness was also obtained for the densification of multilevel memory structure by CMP process [3]. The well prepared BLT capacitors fabricated by CMP process should have the sufficient ferroelectric properties for FRAM; therefore, in this study the electrical properties of the BLT capacitor fabricated by CMP process were analyzed with the process parameters. Especially, the effects of CMP pressure, which had mainly affected the removal rate of BLT thin films [2], on the electrical properties were investigated. In order to check the influences of the pressure in eMP process on the ferroelectric properties of BLT thin films, the electrical test of the BLT capacitors was performed. The polarization-voltage (P-V) characteristics show a decreased the remanent polarization (Pr) value when CMP process was performed with the high pressure. The shape of the hysteresis loop is close to typical loop of BLT thin films in case of the specimen after CMP process with the pressures of 4.9 kPa; however, the shape of the hysteresis loop is not saturated due to high leakage current caused by structural and/or chemical damages in case of the specimen after CMP process with the pressures of 29.4 kPa. The leakage current density obtained with positive bias is one order lower than that with negative bias in case of 29.4 kPa, which was one or two order higher than in case of 4.9 kPa. The high pressure condition was not suitable for the damascene process of BLT thin films due to the defects in electrical properties although the better efficiency of process. by higher removal rate of BLT thin films was obtained with the high pressure of 29.4 kPa in the previous study [2].

• Journal of Korean Society of Industrial and Systems Engineering
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• v.11 no.18
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• pp.71-80
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• 1988

Process capability implies the qualitative capability of a process, and it is necessary to specify the process capability by quantification and to evaluate the level with the specified standardizaion. But the process capability index is currently used to evaluate the performance of quality control activity. without considering the characteristics of process structure or the economy of management. Here the researcher would like to redefine process capability and emphasize its index may be used as the measure of managerial assessment and the objective of process quality control in full consideration of the economic aspects of process characteristics. Too little or too much process capability causes a loss of or excess. The proper economic level of process capability varies to each process. The procedure of taking the optimum process capability index is derived from the expected profit function, whereas each method is studied in cases of normal process with one-sided specification and two-sided specification. In addition, the process capability index is presented as a method of quality assurance. And an example is exhibited on wrapping process of 'A' company. The results of this study are summarized at follows. First, though the norminalization of the process capability index is possible by the existing methods, the optimum process capability index can vary to the situation of each process. So, the optimum process capability index which is suggested in this dissertation should be used as the standard to assess process capability. Second, the process capability index can take its effect not just in indicating quality control or managerial records but also in the management of high qualify assurance.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.30 no.4
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• pp.182-189
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• 2007

Process Capability indices(PCIs) have been widely used in manufacturing industries to provide a quantitative measure of process performance. PCIs have been developed to represent process capability more exactly. The traditional process capability indices Cp, Cpk, Cpm, $Cpm^+$ have been used to characterize process performance on the basis of univariate quality characteristics. Cp, Cpk consider the process variation, Cpm considers both the process variation and the process deviation from target and $Cpm^+$ considers economic loss for the process deviation from target In the previous studies, only one designated location on each part is measured. System process capability index even though in single process, multiple measurement locations on each part are required to calculate the reliable process capability. In manufacturing industry, there is growing interest in quantitative measures of process variation under multivariate quality characteristics. The multivariate process capability index incorporates both the process variation and the process deviation from target or considers expected loss caused by the process deviation from target. In this paper, we compare various process capability indices and propose the application method of PCIs.

• Journal of Institute of Control, Robotics and Systems
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• v.15 no.12
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• pp.1240-1245
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• 2009

The throughput characteristics of the cluster tool with dual blade robot are analyzed. Using equipment's cycle time chart of the equipment, simple analytic form of the throughput is derived. Then, several important throughput characteristics are analyzed by the throughput formula. First, utilization of the process chamber and the robot are maximized by assigning the equipment to the process whose processing time is near the critical process time. Second, rule for selecting optimal number of process chambers is suggested. It is desirable to select a single process chamber plus a single robot structure for relatively short time process and multi process chambers plus a single robot, namely cluster tool for relatively long time process. Third, throughput variation between equipments due to the wafer transfer time variation is analyzed, especially for the process whose processing time is less than critical process time. And the throughput and the wafer transfer time of the equipments in our fabrication line are measured and compared to the analysis.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.25 no.2
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• pp.1-10
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• 2002

Process capability indices are widely used in industries and quality assurance system. In past years, process capability analysis have been used to characterize process performance on the basis of univariate quality characteristics. However, in actual manufacturing industrial, statistical process control (SPC) often entails characterizing or assessing processes or products based on more than one engineering specification or quality characteristic. Therefore, the analysis have to be required a multivariate statistical technique. This paper introduces to multivariate capability indices and then selects a multivariate process capability index incorporated both the process variation and the process deviation from target among these indices under the multivariate normal distribution. We propose a new multivariate capability index $MC_{pm}^+$ using quality loss function instead of the process variation and this index is compared with the proposed indices when quality characteristics are independent and dependent of each other.

• Journal of the Korean Ceramic Society
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• v.51 no.2
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• pp.97-102
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• 2014

In order to improve the refresh rate of old newspaper(ONP), PCC shape-controlling experiments were carried out. The effect of a PCC polymorph on improving the quality of old newspaper was studied for a transformation from waste paper to eco-friendly paper. The synthesis of PCC consists of an in-situ process and a loading process to enhance the refresh rate of old newspaper. The characteristics between the in-situ process and the loading process could be analysed by SEM analyses of coated fiber surfaces. The retention rate ranges from 65 to 67% after the application of the in-situ process, and that after the loading process ranges from 55 to 58%. The retention rates thus show a difference of about 7-10%. In addition, the whiteness and ERIC characteristics of the in-situ process gave more efficient results than those of the loading process.

• Journal of Korean Elementary Science Education
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• v.28 no.3
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• pp.229-244
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• 2009

This study was initiated to investigate sixth graders' gender characteristics in science problem solving process and thus find out the proper learning and teaching strategies for each gender. A total of 14 students, each of seven male and female students, were selected through three tests, including items of science knowledge, science inquiry, and creativity. Students were required to solve 26 items and to think aloud for researchers help understand how they thought in their problem solving process. Males and females showed some similarity and difference in four steps of problem solving process, understanding, planning, solving, and reviewing. We found gender differences in self-confidence of their answer. This study is expected to help develop teachers' differential teaching strategy for male and female students' science problem solving.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.10
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• pp.720-725
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• 2013

Power MOSFET operate voltage-driven devices, design to control the large power switching device for power supply, converter, motor control, etc. We have analyzed trench process, field limit ring process for fabrication of unified trench gate power MOSFET. And we have analyzed electrical characteristics of fabricated unified trench gate power MOSFET. The optimal trench process was based on SF6. After we carried out SEM measurement, we obtained superior trench gate and field limit ring process. And we compared electrical characteristics of planar and trench gate unified power MOSFET after completing device fabrication. As a result, the both of them was obtained 500 V breakdown voltage. However trench gate unified power MOSFET was shown improved Vth and on state voltage drop characteristics than planar gate unified power MOSFET.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.8 no.3
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• pp.13-20
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• 2009

Development of a dynamic engine model is essential to predict and analyze of dynamic characteristics from a natural gas engine. Reducing the harmful exhaust emissions can be accomplished by a precise air-fuel ratio control. In this paper, the dynamic engine model was proposed and included mixture formation and intake process because the dynamic characteristics can be affected by the mixture components such as an air and a gaseous fuel. The air mass flow, the partial pressure ratio, and the gas constant are changed by variations of the components in the mixture formation and intake process. The dynamic engine model is applied to the natural gas engine for validation test. Experimental results show that the dynamic engine model is effective to predict the dynamic characteristics of the natural gas engine.