• Title/Summary/Keyword: Process Chamber State

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A Novel Hydrogen-reduced P-type Amorphous Silicon Oxide Buffer Layer for Highly Efficient Amorphous Silicon Thin Film Solar Cells (고효율 실리콘 박막태양전지를 위한 신규 수소저감형 비정질실리콘 산화막 버퍼층 개발)

  • Kang, Dong-Won
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.65 no.10
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    • pp.1702-1705
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    • 2016
  • We propose a novel hydrogen-reduced p-type amorphous silicon oxide buffer layer between $TiO_2$ antireflection layer and p-type silicon window layer of silicon thin film solar cells. This new buffer layer can protect underlying the $TiO_2$ by suppressing hydrogen plasma, which could be made by excluding $H_2$ gas introduction during plasma deposition. Amorphous silicon oxide thin film solar cells with employing the new buffer layer exhibited better conversion efficiency (8.10 %) compared with the standard cell (7.88 %) without the buffer layer. This new buffer layer can be processed in the same p-chamber with in-situ mode before depositing main p-type amorphous silicon oxide window layer. Comparing with state-of-the-art buffer layer of AZO/p-nc-SiOx:H, our new buffer layer can be processed with cost-effective, much simple process based on similar device performances.

A Study on the Friction and Wear Characteristics of C-N Coated Spur Gear (C-N 코팅 스퍼기어의 마찰${\cdot}$마모 특성에 관한 연구)

  • Lu Long;Lyu Sung-ki
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2004.11a
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    • pp.41-46
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    • 2004
  • This study deals with the friction and wear characteristics of C-N coated spur gear. The PSII apparatus was built and a SCM415 test piece and test gear with steel substrate was treated with carbon nitrogen by this apparatus. The composition and structure of the surface layer were analyzed and compared with that of PVD coated TiN layer. It was found that both of friction coefficients of C-N coating and TiN coaling decreased with increasing load, however, C-N coating showed relatively lower friction coefficient than that of TiN coating. We was investigated the effect of C-N coating on hardness, friction and wear. The TiN coated gear showed more serious friction phenomena than that of C-N coated gear. It was considered that coating of TiN, which was conducted at a vacuum chamber at about $500^{\circ}C$ results in a tempering of base material that causes microstructure change, which in turn resulted in decreasing of hardness. The C-N coated gear and pinion had higher wear resistance that of TiN coated gear and pinion. C-N coating significantly improved the friction and wear resistance of the gear.

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Comparative analysis of two methods of laser induced boron isotopes separation

  • K.A., Lyakhov;Lee, H.J.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.407-408
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    • 2011
  • Natural boron consists of two stable isotopes 10B and 11B with natural abundance of 18.8 atom percent of 10B and 81.2 atom percent of 11B. The thermal neutron absorption cross-section for 10B and 11B are 3837 barn and 0.005 barn respectively. 10B enriched specific compounds are used for control rods and as a reactor coolant additives. In this work 2 methods for boron enrichment were analysed: 1) Gas irradiation in static conditions. Dissociation occurs due to multiphoton absorption by specific isotopes in appropriately tuned laser field. IR shifted laser pulses are usually used in combination with increasing the laser intensity also improves selectivity up to some degree. In order to prevent recombination of dissociated molecules BCl3 is mixed with H2S 2) SILARC method. Advantages of this method: a) Gas cooling is helpful to split and shrink boron isotopes absorption bands. In order to achieve better selectivity BCl3 gas has to be substantially rarefied (~0.01%-5%) in mixture with carrier gas. b) Laser intensity is lower than in the first method. Some preliminary calculations of dissociation and recombination with carrier gas molecules energetics for both methods will be demonstrated Boron separation in SILARC method can be represented as multistage process: 1) Mixture of BCl3 with carrier gas is putted in reservoir 2) Gas overcooling due to expansion through Laval nozzle 3) IR multiphoton absorption by gas irradiated by specifically tuned laser field with subsequent gradual gas condensation in outlet chamber It is planned to develop software which includes these stages. This software will rely on the following available software based on quantum molecular dynamics in external quantized field: 1) WavePacket: Each particle is treated semiclassicaly based on Wigner transform method 2) Turbomole: It is based on local density methods like density of functional methods (DFT) and its improvement- coupled clusters approach (CC) to take into account quantum correlation. These models will be used to extract information concerning kinetic coefficients, and their dependence on applied external field. Information on radiative corrections to equation of state induced by laser field which take into account possible phase transition (or crossover?) can be also revealed. This mixed phase equation of state with quantum corrections will be further used in hydrodynamical simulations. Moreover results of these hydrodynamical simulations can be compared with results of CFD calculations. The first reasonable question to ask before starting the CFD simulations is whether turbulent effects are significant or not, and how to model turbulence? The questions of laser beam parameters and outlet chamber geometry which are most optimal to make all gas volume irradiated is also discussed. Relationship between enrichment factor and stagnation pressure and temperature based on experimental data is also reported.

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Characteristics of Sputtered Ta films by Statistical Method (통계적 실험 방법에 의한 Ta 박막의 증착 특성 연구)

  • Seo, Yu-Seok;Park, Dae-Gyu;Jeong, Cheol-Mo;Kim, Sang-Beom;Son, Pyeong-Geun;Lee, Seung-Jin;Kim, Han-Min;Yang, Hong-Seon;Park, Jin-Won
    • Korean Journal of Materials Research
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    • v.11 no.6
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    • pp.492-497
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    • 2001
  • We report the characteristics and the dependence of sputter-deposited Ta films on the process parameters. The properties of as-deposited Ta films such as deposition rate, resistivity, Rs uniformity, reflectivity, and stress were investigated and analyzed as a function of process parameter using a statistical experimental method. The functional relationships between the independent and dependent variables were predicted by surface response. The optimal deposition condition of DC magnetron sputtered Ta films was obtained at the chamber pressure of 2 mTorr, power density of 8 W/$\textrm{cm}^2$, and substrate temperature of 2$0^{\circ}C$ by means of resistivity and Rs uniformity. The fitness value for quadratic model as evaluated by the R- square was 0.85~ 0.9 without pooling. The as-deposited Ta films exhibited the resistivity of ~180$\mu$$\Omega$cm with Rs uniformity of ~2%. The transmission electron microscopy and x-ray diffractometry identified that the phase of as-deposited film was $\beta$-Ta having the grain size of 100~200.

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Solid-state synthesis of yttrium oxyfluoride powders and their application to plasma spray coating (옥시불화이트륨 분말의 고상합성 및 플라즈마 스프레이 코팅 적용)

  • Lee, Jung-Il;Kim, Young-Ju;Chae, Hui Ra;Kim, Yun Jeong;Park, Seong Ju;Sin, Gyoung Seon;Ha, Tae Bin;Kim, Ji Hyeon;Jeong, Gu Hun;Ryu, Jeong Ho
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.31 no.6
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    • pp.276-281
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    • 2021
  • In order to manufacture a semiconductor circuit, etching, cleaning, and deposition processes are repeated. During these processes, the inside of the processing chamber is exposed to corrosive plasma. Therefore, the coating of the inner wall of the semiconductor equipment with a plasma-resistant material has been attempted to minimize the etching of the coating and particle contaminant generation. In this study, we synthesized yttrium oxyfluoride (YOF) powder by a solid-state reaction using Y2O3 and YF3 as raw materials. Mixing ratio of the Y2O3 and YF3 was varied from 1.0:1.0 to 1.0:1.6. Effects of the mixing ratio on crystal structure and microstructure of the synthesized YOF powder were investigated using XRD and FE-SEM. The synthesized YOF powder was successfully applied to plasma spray coating process on Al substrate.

Estimation of Pile Ultimate Lateral Load Capacity in Sand Considering Lateral Stress Effect (응력상태를 고려한 사질토지반에 관입된 말뚝의 극한수평지지력 분석 및 평가)

  • Lee, Jun-Hwan;Paik, Kyu-Ho;Kim, Dae-Hong;Hwang, Sung-Wuk;Kim, Min-Kee
    • Journal of the Korean Geotechnical Society
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    • v.23 no.4
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    • pp.161-167
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    • 2007
  • In this study, ultimate lateral load capacity of piles is analyzed with consideration of lateral stress effect. Based on results obtained in this study, a method for the estimation of ultimate lateral load capacity is proposed. This makes it possible to more realistically estimate the ultimate lateral load capacity under various stress states caused by in-situ soil condition and pile installation process. Calibration chamber test results with various soil conditions were used in the analysis. From the test results, it was found that effect of the lateral stress was greater than that of the vertical stress on the ultimate lateral load capacity of piles. It was also found that, as the relative density increases, displacements required to reach the ultimate state increases, showing relative displacements of around 14% and 18-25% for $D_R$ : 55% and 86%, respectively. Based on results obtained in this study, a methodology for the estimation of ultimate lateral load capacity of piles using correction factors was proposed. Results from proposed method matched well measured results.

Vitrification of Simulated Combustible Dry Active Wastes in a Pilot Facility

  • Yang, Kyung-Hwa;Park, Seung-Chul;Lee, Kyung-Ho;Hwang, Tae-Won;Maeng, Sung-Jun;Shin, Sang-Woon
    • Nuclear Engineering and Technology
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    • v.33 no.4
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    • pp.355-364
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    • 2001
  • In order to evaluate and finally optimize the vitrification condition for combustible dry active waste (DAW), dust and gas generation characteristics were investigated for PE, cellulose, and mixed waste Tests were conducted by varying the operation variables such as melter configuration, excess oxygen amount, and waste feeding rate. Results showed that dust generation characteristics were affected by the operation parameters and the melter's configuration is the dominant one. For all tested DAWs, dust generation was reduced by increasing the waste feeding rate and the excessive oxygen amount in the melter. Among waste types, dust amount was decreased by the order of mixed wastes, PE, and cellulose. Other parameters such as temperature variation and operation time have also affected the dust generation. The optimum condition for the DAW vitrification was determined as the melter's configuration equipped for minimizing the waste dispersion with 20 kg/h of waste feeding rate and 100% of excessive oxygen supply. CO gas concentration in the off-gas was immediately influenced by the combustion state in the melter, but showed similar trend as the dust generation. For the NOx production during the vitrification process, thermal NOx, which is generated from the Post Combustion Chamber (PCC), rather than fuel NOx was assumed to be dominant. The gas cleaning of efficiencies of the PCC, wet scrubber, and Selective Catalytic Reduction system (SCR) were found to be high enough to keep the concentration of pollutants (CO, NOx, SOx, HCI) in the stack below their relevant emission limits.

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Study of Naturally Occurring Radioactive Material Present in Deep Soil of the Malwa Region of Punjab State of India Using Low Level Background Gamma-Ray Spectrometry

  • Srivastava, Alok;Chahar, Vikash;Chauhan, Neeraj;Krupp, Dominik;Scherer, Ulrich W.
    • Journal of Radiation Protection and Research
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    • v.47 no.1
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    • pp.16-21
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    • 2022
  • Background: Epidemiological observations such as mental retardation, physical deformities, etc., in children besides different types of cancer in the adult population of the Malwa region have been reported. The present study is designed to get insight into the role of naturally occurring radioactive material (NORM) in causing detrimental health effects observed in the general population of this region. Materials and Methods: Deep soil samples were collected from different locations in the Malwa region. Their activity concentrations were determined using low-level background gammaray spectrometry. High efficiency and high purity germanium detector capped in a lead-shielded chamber having a resolution of 1.8 keV at 1,173 keV and 2.0 keV at the 1,332 keV line of 60Co was used in the present work. Data were evaluated with Genie-2000 software. Results and Discussion: Mean activity concentrations of 238U, 232Th, and 40K in deep soil were found to be 101.3 Bq/kg, 65.8 Bq/kg, and 688.6 Bq/kg, respectively. The mean activity concentration of 238U was found to be three and half times higher than the global average prescribed by the United Nations Scientific Committee on the Effects of Atomic Radiation (UNSCEAR). It was further observed that the activity concentration of 232Th and 40K has a magnitude that is nearly one and half times higher than the global average prescribed by UNSCEAR. In addition, the radioisotope 137Cs which is likely to have its origin in radiation fallout was also observed. It is postulated that the NORM present in high quantity in deep soil somehow get mobilized into the water aquifers used by the general population and thereby causing harmful health problems. Conclusion: It can be stated that the present work has been able to demonstrate the use of low background gamma-ray spectrometry to understand the role of NORM in causing health-related effects in a general population of the Malwa region of Punjab, India.

Effect of pre-post injection timing of diesel fuel for naval vessel on the combustion and emission characteristics in an optically-accessible single cylinder diesel engine (단기통 디젤엔진에서 함정용 디젤유의 전·후 분사시기가 연소 및 배출가스 특성에 미치는 영향)

  • Lee, Hyungmin
    • Journal of Advanced Marine Engineering and Technology
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    • v.38 no.7
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    • pp.868-876
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    • 2014
  • The objective of this study is focused on the analyzing combustion, carbon monoxide and hydrocarbon emission characteristics of marine diesel oil, utilized for naval propulsion engine, with varying pre-post injection timing of an optically accessible single cylinder engine. And also the combustion process is analyzed by means of a high speed camera visualization. On the result of retarding pre-injection timing toward main injection timing, the mean effective pressure and maximum pressure of combustion chamber are increased; however, the heat release rate is decreased. Furthermore, the emission rates of carbon monoxide and hydrocarbon are reduced in this case. In hence, when a post-injection timing is advanced, the mean effective pressure and maximum pressure are increased, because the combustion has been performed under the high temperature and high pressurized environment during main injection time, and the emission rates of carbon monoxide and hydrocarbon are increased. From the experimental results, it considered that retarding of pre-injection timing affects to shorten the ignition delay of main injection clearly, and to raise the flame intensity comparing to the advanced state. The ignition delay during post-injection is not appeared at any post-injection time, but the flame intensity has been weakened gradually according to the retarding of post-injection timing.

A Study of Process factors on the Recycling of Reactive Metal Scraps in Plasma Arc Remelting (Plasma Arc Remelting에서 활성 금속 Scrap 재활용에 미치는 공정인자의 연구)

  • Jung, Jae-Young;Sohn, Ho-Sang
    • Resources Recycling
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    • v.26 no.6
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    • pp.3-9
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    • 2017
  • In this study, plasma arc remelting behaviors according to arc current, arc voltage, and types of plasma gas were investigated using Kroll processed Ti sponges as anode. In the discharge pressure range of vacuum pump ($200{\sim}300kgf/cm^2$), the arc voltage did not vary greatly with the increase of discharge pressure at a given arc length. This means that the pressure in the vacuum chamber during operation hardly changes and the atmospheric pressure maintains. Under various conditions of arc currents (700~900A), the arc voltage slightly increased with arc current. The effects of anode materials and operational variables on the arc length-arc voltage relationship were compared with the results in previous studies. When the atmospheric gas changed from argon to helium, double effect of improvement on the output of the steady state was observed. The increase of output in the plasma arc device was accompanied by an increase in the melting rate of the Ti sponge and the quality of the ingot surface was also improved. The plasma arc remelting of the new scrap titanium and the old scrap zirconium alloy could result in the fabrication of an ingot with high surface quality.