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http://dx.doi.org/10.6111/JKCGCT.2021.31.6.276

Solid-state synthesis of yttrium oxyfluoride powders and their application to plasma spray coating  

Lee, Jung-Il (Department of Materials Science and Engineering, Korea National University of Transportation)
Kim, Young-Ju (R&D Center, Daechan Technology Co., Ltd.)
Chae, Hui Ra (Department of Materials Science and Engineering, Korea National University of Transportation)
Kim, Yun Jeong (Department of Materials Science and Engineering, Korea National University of Transportation)
Park, Seong Ju (Department of Materials Science and Engineering, Korea National University of Transportation)
Sin, Gyoung Seon (Department of Materials Science and Engineering, Korea National University of Transportation)
Ha, Tae Bin (Department of Materials Science and Engineering, Korea National University of Transportation)
Kim, Ji Hyeon (Department of Materials Science and Engineering, Korea National University of Transportation)
Jeong, Gu Hun (Department of Materials Science and Engineering, Korea National University of Transportation)
Ryu, Jeong Ho (Department of Materials Science and Engineering, Korea National University of Transportation)
Publication Information
Journal of the Korean Crystal Growth and Crystal Technology / v.31, no.6, 2021 , pp. 276-281 More about this Journal
Abstract
In order to manufacture a semiconductor circuit, etching, cleaning, and deposition processes are repeated. During these processes, the inside of the processing chamber is exposed to corrosive plasma. Therefore, the coating of the inner wall of the semiconductor equipment with a plasma-resistant material has been attempted to minimize the etching of the coating and particle contaminant generation. In this study, we synthesized yttrium oxyfluoride (YOF) powder by a solid-state reaction using Y2O3 and YF3 as raw materials. Mixing ratio of the Y2O3 and YF3 was varied from 1.0:1.0 to 1.0:1.6. Effects of the mixing ratio on crystal structure and microstructure of the synthesized YOF powder were investigated using XRD and FE-SEM. The synthesized YOF powder was successfully applied to plasma spray coating process on Al substrate.
Keywords
Yttrium oxyfluoride; YOF; Solid-state reaction; Plasma spray coating;
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