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http://dx.doi.org/10.5370/KIEE.2016.65.10.1702

A Novel Hydrogen-reduced P-type Amorphous Silicon Oxide Buffer Layer for Highly Efficient Amorphous Silicon Thin Film Solar Cells  

Kang, Dong-Won (Dept. of Solar & Energy Engineering, Cheongju Univerity)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.65, no.10, 2016 , pp. 1702-1705 More about this Journal
Abstract
We propose a novel hydrogen-reduced p-type amorphous silicon oxide buffer layer between $TiO_2$ antireflection layer and p-type silicon window layer of silicon thin film solar cells. This new buffer layer can protect underlying the $TiO_2$ by suppressing hydrogen plasma, which could be made by excluding $H_2$ gas introduction during plasma deposition. Amorphous silicon oxide thin film solar cells with employing the new buffer layer exhibited better conversion efficiency (8.10 %) compared with the standard cell (7.88 %) without the buffer layer. This new buffer layer can be processed in the same p-chamber with in-situ mode before depositing main p-type amorphous silicon oxide window layer. Comparing with state-of-the-art buffer layer of AZO/p-nc-SiOx:H, our new buffer layer can be processed with cost-effective, much simple process based on similar device performances.
Keywords
Amorphous silicon oxide; Hydrogen; $TiO_2$; Buffer; Thin film solar cell;
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1 B. Cai, X. Li, Y. Zhang and B. Jia, "Significant light absorption enhancement in silicon thin film tandem solar cells with metallic nanoparticles", Nanotechnology, vol. 27, No. 19, pp. 195401-1-195401-10, 2016.   DOI
2 T. Fujibayashi, T. Matsui, M. Kondo, "Improvement in quantum efficiency of thin film Si solar cells due to the suppression of optical reflectance at transparent conducting oxide/Si interface by $TiO_2$/ZnO antireflection coating", Applied physics letters, vol. 88, pp. 183508-1-183508-4, 2006.   DOI
3 S. Baek, J. Lee, Y.-J. Lee, S. Iftiquar, Y. Kim, J. Park, J. Yi, "Interface modification effect between p-type a-SiC:H and ZnO:Al in p-i-n amorphous silicon solar cells", Nanoscale Res. Lett. vol. 7, pp. 1-5, 2012.   DOI
4 D.-W. Kang, A. Chowdhury, P. Sichanugrist, M. Konagai, "Light Management of a-$SiO_x$:H Thin Film Solar Cells with Hydrogen-reduced $P^+$ Buffer at $TiO_2$/p-layer Interface, Solar Energy Materials & Solar Cells", vol. 143, pp. 296-301, 2015.   DOI
5 Y. Chiba, K. Kashiwagi, H. Kokai, "Plasma surface treatment effect of $TiO_2$ thin film", Vacuum, vol. 74, pp. 643-646, 2004.   DOI