• Title/Summary/Keyword: Process Chamber

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Step-Coverage Consideration of Inter Metal Dielectrics in DLM Processing : PECVD and $O_3$ ThCVD Oxides (이층 배선공정에서 층간 절연막의 층덮힘성 연구 : PECVD와 $O_3$ThCVD 산화막)

  • Park, Dae-Gyu;Kim, Chung-Tae;Go, Cheol-Gi
    • Korean Journal of Materials Research
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    • v.2 no.3
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    • pp.228-238
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    • 1992
  • An investigation on the step-coverage of PECVD and $O_3$ ThCVD oxides was undertaken to implement into the void-free inter metal dielectric planarization using multi-chamber system for the submicron double level metallization. At various initial aspect ratios the instantaneous aspect ratios were measured through modelling and experiment by depositing the oxides up to $0.9{\mu}m$ in thickness in order to monitor the onset of void formation. The modelling was found to be in a good agreement with the observed instantaneous aspect ratio of TEOS-based PECVD oxide whose re-entrant angle was less than $5^{\circ}$. It is demonstrated that either keeping the instantaneous aspect ratio of PECVD oxide as a first layer less than a factor of 0.8 or employing Ar sputter etch to create sloped oxide edge ensures the void-free planarization after$O_3$ ThCVD oxide deposition whose step-coverage is superior to PECVD oxide. It has been observed that $O_3$ ThCVD oxide etchback scheme has shown higher yield of via contact chain than non etchback process, with resistance per via contact of $0.1~0.3{\Omega}/{\mu}m^2$.

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Regional Distribution of Isotropy Magnetic Property of Dual-type Giant Magnetoresistance-Spin Valve Multilayer (이중구조 거대자기저항-스핀밸브 박막의 자기등방성 영역분포에 관한 연구)

  • Khajidmaa, Purevdorj;Lee, Sang-Suk
    • Journal of the Korean Magnetics Society
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    • v.23 no.6
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    • pp.193-199
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    • 2013
  • The regional distribution of magnetic isotropy depending on the post annealing condition for the dual-type structure GMR-SV (giant magnetoresistance-spin valve) of NiFe/Cu/NiFe/IrMn/NiFe/Cu/NiFe multilayer was investigated. The rotation of in-plane ferromagnetic layer induced by controlment of the post annealing temperature inside of the vacuum chamber. The magnetoresistive curves of a dual-type IrMn based GMR-SV depending on the direction of the magnetization easy axis of the free layer and the pinned layer are measured by between $0^{\circ}$ and $360^{\circ}$ angles for the applied fields. The optimum annealing temperature having a steady and isotropy magnetic sensitivity of 1.52 %/Oe was $107^{\circ}C$ in the rotational section of $0{\sim}90^{\circ}$. By investigating the switching process of magnetization for an arbitrary measuring direction, the in-plane orthogonal magnetization for the dual-type GMR-SV multilayer can be used by a high sensitive biosensor for detection of magnetized micro-beads.

A Study on the Revision of the ISBP745 and Practical Adaptation in the field (국제표준은행관행(ISBP745)의 변경내용과 실무적용에 관한 연구)

  • Lim, Jaewook
    • International Commerce and Information Review
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    • v.16 no.5
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    • pp.87-114
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    • 2014
  • The Uniform Customs and Practice for Documentary Credits (UCP) is a set of rules on the issuance and use of letters of credit. Historically, the commercial parties, particularly banks, have developed the techniques and methods for handling letters of credit in international trade finance. This practice has been standardized by the ICC (International Chamber of Commerce) by publishing the UCP in 1933 and subsequently updating it throughout the years. The ICC has developed and moulded the UCP by regular revisions, the current version being the UCP600. This latest version, called the UCP600, formally commenced on 1 July 2007. During the revision process, notice was taken of the considerable work that had been completed in creating the International Standard Banking Practice for the Examination of Documents under Documentary Credits (ISBP), ICC Publication 745. This publication has evolved into a necessary companion to the UCP for determining compliance of documents with the terms of letters of credit. It is the expectation of the Drafting Group and the Banking Commission that the application of the principles contained in the ISBP, including subsequent revisions thereof, will continue during the time UCP 600 is in force. This paper focuses on documents including various certificates, Packing List, Weight List, Beneficiary's Certificate, Analysiis, Inspection, Health, Phytosanitary, Quantity and Quality Certificates, Courier Receipts, Shipping Advice etc. and suggests some implications in the field.

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Improvement of Diesel Engine Performance for Alternative Fuel Oil (대체연료를 사용할 경우의 디젤기관의 성능향상에 관한 연구)

  • 고장권
    • Journal of Advanced Marine Engineering and Technology
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    • v.16 no.5
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    • pp.97-110
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    • 1992
  • Rape-seed oil has high viscosity and high rubber content like other vegetable oils. When crude rape-seed oil obtained by a general oil extraction process is used in a diesel engine, automization condition during injection is not good and a large amount of combustion product is doposited in a combustion chamber. The improvement of a diesel engine is required to use rape-seed oil as a diesel engine fuel. In this study, the physical and chemical properties and combustion characteristics of rape-seed oil were investigated. The auxiliary aid was developed to improve automization condition and the effect of the auxiliary injection aid on the performance of a diesel engine was determined. The results are as follows. 1) Oil content of rape-seed is 45%. The exraction rate is 33%. The resuls show higher values compared to those of other vegetable oils. 2) The viscosity of rape-seed oil is 50.8 cSt and nearly 14 times of diesel oil viscosity. 3) The heating value and flash point of rape-seed oil are 9720kcal/Kg and 318$^{\circ}C$, respectively. 4) In case rape-seed oil is used as fuel, brake horse power, specific fuel consumption and brake thermal efficiency are compared to those of diesel oil. The results of rape-seed oil show 3.6%, 12.7% and 3.1% higher values. 5) Particle size of injection fuel with the auxiliary injection aid on the performance of a diesel engine was determined. The results are as follows. 1) Oil content of rape-seed is 45%. The extraction rate is 33%. The results show higher values compared to those of other vegetable oils. 2) The viscosity of rape-seed oil is 50.8 cSt and nearly 14 times of diesel oil viscosity. 3) The heating value and flash point of rape-seed oil are 9720kcal/Kg and 318.deg.C, respectively. 4) In case rape-seed oil is used as fuel, brake horse power, specific fuel consumption and brake thermal efficiency are compared to theose of diesel oil. The results of rape-seed oil show 3.6%, 12.7% and 3.1% higher values. 5) Particle size of injection fuel with the auxiliary injection aids is 100.mu.m smaller than that od injection fuel without the aid. 6) Brake horse power and brake thermal efficiency with the auxiliary injection aid increase 5.07% and 6.07%, respectively. However, specific fuel consumption decreases 3.85% with the auxiliary injection aid.

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Analysis of cause of engine failure during power generation using biogas in sewage treatment plant (하수처리장 바이오가스를 이용한 발전시 가스엔진의 고장원인 분석)

  • Kim, Gill Jung;Kim, Lae Hyun
    • Journal of Energy Engineering
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    • v.25 no.4
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    • pp.13-29
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    • 2016
  • In this study, we analyzed the causes of major faults in the biogas plant through the case of gas engine failure when cogenerating electricity and heat using biogas as a fuel in the actual sewage treatment plant and suggested countermeasures. Hydrogen sulfide in the biogas entering the biogas engine and water caused by intermittent malfunction of the water removal system caused intercooler corrosion in the biogas engine. In addition, the siloxane in the biogas forms a silicate compound with silicon dioxide, which causes scratches and wear of the piston surface and the inner wall of the cylinder liner. The substances attached to the combustion chamber and the exhaust system were analyzed to be combined with hydrogen sulfide and other impurities. It is believed that hydrogen sulfide was supplied to the desulfurization plant for a long period of time because of the high content of hydrogen sulfide (more than 50ppm) in the biogas and the hydrogen sulfide was introduced into the engine due to the decrease of the removal efficiency due to the breakthrough point of the activated carbon in the desulfurization plant. In addition, the hydrogen sulfide degrades the function of the activated carbon for siloxane removal of the adsorption column, which is considered to be caused by the introduction of unremoved siloxane waste into the engine, resulting in various types of engine failure. Therefore, hydrogen sulfide, siloxane, and water can be regarded as the main causes of the failure of the biogas engine. Among them, hydrogen sulfide reacts with other materials causing failure and can be regarded as a substance having a great influence on the pretreatment process. As a result, optimization of $H_2S$ removal method seems to be an essential measure for stable operation of the biogas engine.

Pulmonary Toxicity and Recovery from Inhalation of Manual Metal Arc Stainless Steel Welding Fumes in Rats

  • Yang, Mi-Jin;Kim, Jin-Sung;Yang, Young-Su;Cho, Jae-Woo;Choi, Seong-Bong;Chung, Yong-Hyun;Kim, Yong-Bum;Cho, Kyu-Hyuk;Lim, Chae-Woong;Kim, Choong-Yong;Song, Chang-Woo
    • Toxicological Research
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    • v.24 no.2
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    • pp.119-127
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    • 2008
  • The objectives of this study were to examine the lung injury and inflammation caused by manual metal arc stainless steel(MMA-SS) welding fume inhalation and to evaluate the recovery process. Sprague-Dawley rats were exposed to MMA-SS welding fumes for 2 h per day in a whole-body exposure chamber, with a total suspended particulate(TSP) concentration of $51.4{\pm}2.8mg/m^3$(low dose) or $84.6{\pm}2.9mg/m^3$(high dose) for 30 days. The animals were sacrificed after 30 days of exposure as well as after a 30-day recovery period. To assess the inflammatory or injury responses, cellular and biochemical parameters as well as cytokines were assayed in the bronchoalveolar lavage fluid(BALF). MMA-SS welding fume exposure led to a significant elevation in the number of alveolar macrophages(AM) and polymorphonuclear cells(PMN). Additionary, the values of $\beta$-n-acetyl glucosaminidase($\beta$-NAG) and lactate dehydrogenase(LDH) in the BALF were increased in the exposed group when compared to controls. After 30 days of recovery from exposure, a significant reduction in inflammatory parameters of BALF was observed between the exposed and recovered groups. Slight, but significant elevations were noted in the number of AM and PMN in the recovered groups, and AM that had been ingested fume particles still remain in the lungs. In conclusion, these results indicated that welding fumes induced inflammatory responses and cytotoxicity in the lungs of exposed rats. Fume particles were not fully cleared from lungs even after a 30-day recovery period.

Continuous Measurement of Ammonium-nitrogen and Nitrate-nitrogen using a Ion-Selective Microelectrode (이온선택성 미소전극을 이용한 암모니아성 질소 및 질산성 질소의 연속 농도 측정)

  • Lim, Mi-Ji;Seon, Ji-Yun;Park, Jeung-Jin;Byun, Im-Gyu;Park, Tae-Joo;Lee, Tae-Ho
    • Journal of Korean Society on Water Environment
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    • v.24 no.6
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    • pp.718-724
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    • 2008
  • The ion selective microelectrode (ISME) has been used for measuring the ion profile of DO, $NH_4{^+}-N$, $NO_2{^-}-N$ and $NO_3{^-}-N$ in biofilm. In this study we evaluated the detection limit and validity of ISME and applied ISME for the continuous measurement of $NH_4{^+}-N$ and $NO_3{^-}-N$ concentration in the modified Ludzack-Ettinger (MLE) process. Average detection limits of $NH_4{^+}-N$ and $NO_3{^-}-N$ ISME were $10^{-4.44}M$ and $10^{-4.62}M$, respectively. Since the ISME with $5{\sim}10{\mu}m$ of tip diameter showed a faster response time than that of $1{\sim}5{\mu}m$, the ISME with a tip diameter of $5{\sim}10{\mu}m$ was fabricated and used to make real-time ion detections. Direct monitoring of $NH_4{^+}-N$ and $NO_3{^-}-N$ concentrations in the aerobic (2) tank causes the instability of the electromotive force (EMF) for the initial 5~8 hours and also causes remarkable error values of $NH_4{^+}-N$ and $NO_3{^-}-N$ concentration. This phenomenon is caused by aeration and mixing in the reactor. Thus, the measuring chamber was newly designed for the aerobic (2) tank and then the EMF of the ISME were stabilized in less than 1 hour. Errors of $NH_4{^+}-N$ and $NO_3{^-}-N$ concentration were decreased after stabilization of the EMF. The ISME analysis were well corresponded to the results of auto analyzer and ion chromatography. Consequently, the concentration of $NH_4{^+}-N$ and $NO_3{^-}-N$ could be continuously measured for 178 hours by the ISME.

STSAT-3 Main Payload, MIRIS Flight Model Developments

  • Han, Won-Yong;Lee, Dae-Hee;Park, Young-Sik;Jeong, Woong-Seob;Ree, Chang-Hee;Moon, Bong-Kon;Park, Sung-Joon;Cha, Sang-Mok;Nam, Uk-Won;Park, Jang-Hyun;Lee, Duk-Hang;Ka, Nung-Hyun;Seon, Kwang-Il;Yang, Sun-Choel;Park, Jong-Oh;Rhee, Seung-Wu;Lee, Hyung-Mok;Matsumoto, Toshio
    • The Bulletin of The Korean Astronomical Society
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    • v.35 no.1
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    • pp.40.1-40.1
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    • 2010
  • The Main payload of the STSAT-3 (Korea Science & Technology Satellite-3), MIRIS (Multipurpose Infra-Red Imaging System) has been developed for last 3 years by KASI, and its Flight Model (FM) is now being developed as the final stage. All optical lenses and the opto-mechanical components of the FM have been completely fabricated with slight modifications that have been made to some components based on the Engineering Qualification Model (EQM) performances. The components of the telescope have been assembled and the test results show its optical performances are acceptable for required specifications in visual wavelength (@633 nm) at room temperature. The ensuing focal plane integration and focus test will be made soon using the vacuum chamber. The MIRIS mechanical structure of the EQM has been modified to develop FM according to the performance and environment test results. The filter-wheel module in the cryostat was newly designed with Finite Element Analysis (FEM) in order to compensate for the vibration stress in the launching conditions. Surface finishing of all components were also modified to implement the thermal model for the passive cooling technique. The FM electronics design has been completed for final fabrication process. Some minor modifications of the electronics boards were made based on EQM test performances. The ground calibration tests of MIRIS FM will be made with the science grade Teledyne PICNIC IR-array.

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Effect of graphene oxide on mechanical characteristics of polyurethane foam (산화그래핀이 폴리우레탄 폼 기계적 강도에 미치는 영향)

  • Kim, Jong-Min;Kim, Jeong-Hyeon;Choe, Young-Rak;Park, Sung Kyun;Park, Kang Hyun;Lee, Jae-Myung
    • Journal of Advanced Marine Engineering and Technology
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    • v.40 no.6
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    • pp.493-498
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    • 2016
  • In the present study, graphene oxide based polyurethane foams were manufactured as a part of the development process of mechanically strengthened polyurethane foam insulation material. This material is used in a liquefied natural gas carrier cargo containment system. The temperature of the containment system is $-163^{\circ}C$. First, graphene oxide was synthesized using the Hummers' method, and it was supplemented into polyol-isocyanate reagent by considering a different amount of graphene oxide weight percent. Then, a bulk form of graphene-oxide-polyurethane foam was manufactured. In order to investigate the cell stability of the graphene-oxide-polyurethane foam, its microstructural morphology was observed, and the effect of graphene oxide on microstructure of the polyurethane foam was investigated. In addition, the compressive strength of graphene-oxide-polyurethane foam was measured at ambient and cryogenic temperatures. The cryogenic tests were conducted in a cryogenic chamber equipped with universal testing machine to investigate mechanical and failure characteristics of the graphene-oxide-polyurethane foam. The results revealed that the additions of graphene oxide enhanced the mechanical characteristics of polyurethane foam. However, cell stability and mechanical strength of graphene-oxide-polyurethane foam decreased as the weight percent of graphene oxide was increased.

Analysis of the commercial diving national qualification system for the introduction of a diving supervisor (잠수기능장 제도 신설을 위한 산업 잠수 국가자격체계 분석)

  • Sim, Kyoung-Bo;Cha, Joo-Hong;Kang, Sin-Young
    • Journal of Advanced Marine Engineering and Technology
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    • v.40 no.7
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    • pp.655-662
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    • 2016
  • This study proposes that a diving supervisor, who can perform the role of both a field manager and a supervisor, be introduced in the national qualification system. The goal was achieved by surveying the general status of the commercial diving sector, including the statistics of an underwater construction company, commercial diving equipment operation condition, diver working hours, diver supply and demand status, and underwater construction market size. The national qualification and national competency standard (NCS) systems were also analyzed to deduce the role definition and work scope of the diving supervisor. Consequently, the following proposition is made: the diving supervisor should be an "on-site manager with the highest job skill in the commercial diving field, who can perform the on-site process management as well as guide, supervise, and educate project participants and serve as an intermediary between the contractor and the workers." The responsibilities of the diving supervisor are proposed to include "diving planning and operation of the diving team," "diving with surface-supplied air and mixed-gas diving system," "chamber operation," "underwater construction," and "ship salvage." The persistent issues in commercial diving sectors, such as diver career development, management, and worker supervision, are expected to be largely resolved with the introduction of this qualification.